title: Programmable mechanical resonances in MEMS by localized joule heating of phase change materials.
abstract: A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.
authors.affiliation: CNR-SPIN, Corso Perrone 24, Genova, 16152, Italy; Physics Department, University of Genova, Via Dodecaneso 33, Genova, 16146, Italy.
authors.forename: Nicola
authors.initials: N
authors.lastname: Manca
authors.forename: Luca
authors.initials: L
authors.lastname: Pellegrino
authors.forename: Teruo
authors.initials: T
authors.lastname: Kanki
authors.forename: Syouta
authors.initials: S
authors.lastname: Yamasaki
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Tanaka
authors.forename: Antonio Sergio
authors.initials: AS
authors.lastname: Siri
authors.forename: Daniele
authors.initials: D
authors.lastname: Marré
keywords: Joule heating; adaptative electronics; frequency tuning; mechanical resonators; vanadium dioxide