title: Synthesis and bidirectional frequency tuning of cantilever-shape nano resonators using a focused ion beam.
abstract: The synthesis of cantilever-shape nano resonators and their resonant frequency tunings in both upward and downward directions have been demonstrated using FIB-CVD (focused ion beam-chemical vapor deposition). The in situ experimental observations of mechanical resonances as well as cutting and adding of resonator materials have been accomplished inside the FIB vacuum chamber. Extending the length of the cantilever-shape resonator by 500 nm scale using either the same material or alternating different materials effectively reduced resonant frequency. On the other hand, direct cutting and gradual trimming of the end point of nano resonator increases its resonant frequency. This simple yet versatile synthesis and frequency tuning scheme could be applicable to both constructing micro/nano scale resonators and tuning nanostructures with reduced efforts and enhanced efficiency.
authors.affiliation: Center of Integrated Nanomechanical Systems, University of California at Berkeley , Berkeley, California, 94720 United States.
authors.forename: Jiyoung
authors.initials: J
authors.lastname: Chang
authors.forename: Kisik
authors.initials: K
authors.lastname: Koh
authors.forename: Byung-Kwon
authors.initials: BK
authors.lastname: Min
authors.forename: Sang Jo
authors.initials: SJ
authors.lastname: Lee
authors.forename: Jongbaeg
authors.initials: J
authors.lastname: Kim
authors.forename: Liwei
authors.initials: L
authors.lastname: Lin