title: Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry.
abstract: Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe are employed to characterize the morphology and image measurement of the micro-cantilever arrays, respectively. Compared with conventional AFM and SPM measurement technique, the proposed method has demonstrated sufficient flexibility and reliability. The experimental results have been analyzed and presented in this paper for MEMS Micro-cantilevers. The scanning White Light Interferometry based two point high resolution optical method is presented for characterizing Micro-cantilevers and other MEMS micro-structures. The repeatable error and the repeatable precision produced in the proposed image measurement method is nanometre confirmable. In this piece of work, we investigate the micro-structure fabrication and image measurement of Length, Width and Step-Height of micro-cantilever arrays fabricated using bulk micromachining technique onto Silicon <100> substrate.
authors.affiliation: Deptt. of Electrical Engg., Indian Institute of Technology Bombay, Powai, Mumbai, India.
authors.forename: Anil Sudhakar
authors.initials: AS
authors.lastname: Kurhekar
authors.forename: P R
authors.initials: PR
authors.lastname: Apte
keywords: Atomic Force Microscopy; Image Measurement; Micro-cantilever; Optics; Scanning Electron Microscopy; Silicon (100), Scanning White Light Interferometry