title: Integrated slanted microneedle-LED array for optogenetics.
abstract: This paper presents a three-dimensional (3-D) flexible micro light emitting diode (μ-LED) array for selective optical stimulation of cortical neurons. The array integrated individually addressable μ-LED chips with slanted polymer-based microneedle waveguides to allow precise light delivery to multiple cortical layers simultaneously. A droplet backside exposure method was developed to monolithically fabricate slanted microneedles on a single polymer platform. A wafer-level assembly technique was demonstrated, which permits large-scale, high-density system integration. The electrical, optical, thermal, and mechanical properties of the 3-D slanted microneedle-LED array were characterized experimentally.
authors.forename: Ki Yong
authors.initials: KY
authors.lastname: Kwon
authors.forename: Anton
authors.initials: A
authors.lastname: Khomenko
authors.forename: Mahmoodul
authors.initials: M
authors.lastname: Haq
authors.forename: Wen
authors.initials: W
authors.lastname: Li
mesh_terms: D003198:Computer Simulation; D004560:Electricity; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D021621:Imaging, Three-Dimensional; D055595:Mechanical Phenomena; D055616:Microtechnology / Q000295:instrumentation; D009339:Needles; D062308:Optogenetics / Q000295:instrumentation*; D013696:Temperature