title: Waveguide coupled air-slot photonic crystal nanocavity for optomechanics.
abstract: We investigate a structure consisting of two parallel GaAs thin membranes with an air-slot type photonic crystal (PhC) nanocavity, which is designed to achieve highly efficient optomechanical coupling. The structure shows a large theoretical optomechanical coupling factor of ~990 GHz/nm. We designed, fabricated, and performed optical characterization of a system consisting of a grating coupler, a PhC waveguide, and a PhC nanocavity, which achieves highly efficient vertical emission using the band folding technique. The experimentally obtained overall efficiency is about 0.3% for a microscope objective lens with a moderate numerical aperture of 0.65. This waveguide coupled air-slot PhC nanocavity with efficient vertical light coupling can be useful for on-chip cavity optomechanical systems.
authors.forename: Wataru
authors.initials: W
authors.lastname: Shimizu
authors.forename: Naomi
authors.initials: N
authors.lastname: Nagai
authors.forename: Kenta
authors.initials: K
authors.lastname: Kohno
authors.forename: Kazuhiko
authors.initials: K
authors.lastname: Hirakawa
authors.forename: Masahiro
authors.initials: M
authors.lastname: Nomura
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008853:Microscopy / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*