title: Design of a silicon Mach-Zehnder modulator with a U-type PN junction.
abstract: We have developed a silicon depletion-mode modulator featuring a novel U-type PN junction that enables a substantial improvement in electro-optical modulation efficiency. Through electrical, optical, and manufacturing process simulations, an ultralow VπL of 0.63  V·cm is exhibited with 3 V reverse bias. The high modulation efficiency enables a high extinction ratio (ER) of >17  dB with only a 1 mm phase shifter when the excess loss at the "on" state is 2 dB. The ER can maintain >12  dB at ∼28  GHz operation with a 3 V peak-to-peak voltage due to the small voltage attenuation of the short phase shifter.
authors.forename: Tongtong
authors.initials: T
authors.lastname: Cao
authors.forename: Yonghao
authors.initials: Y
authors.lastname: Fei
authors.forename: Libin
authors.initials: L
authors.lastname: Zhang
authors.forename: Yanmei
authors.initials: Y
authors.lastname: Cao
authors.forename: Shaowu
authors.initials: S
authors.lastname: Chen