title: Fabrication of polydimethylsiloxane (PDMS) - based multielectrode array for neural interface.
abstract: Flexible multielectrode arrays (MEAs) are being developed with various materials, and polyimide has been widely used due to the conveniece of process. Polyimide is developed in the form of photoresist. And this enable precise and reproducible fabrication. PDMS is another good candidate for MEA base material, but it has poor surface energy and etching property. In this paper, we proposed a better fabrication process that could modify PDMS surface for a long time and open the site of electrode and pad efficiently without PDMS etching.
authors.forename: Jun-Min
authors.initials: JM
authors.lastname: Kim
authors.forename: Da-Rong
authors.initials: DR
authors.lastname: Oh
authors.forename: Joaquin
authors.initials: J
authors.lastname: Sanchez
authors.forename: Shang-Hyub
authors.initials: SH
authors.lastname: Kim
authors.forename: Jong-Mo
authors.initials: JM
authors.lastname: Seo
mesh_terms: D020099:Coated Materials, Biocompatible / Q000737:chemistry; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D006801:Humans; D058117:Neural Prostheses
chemical_list: D020099:Coated Materials, Biocompatible; D004129:Dimethylpolysiloxanes; C013830:baysilon