title: Optical characterization of two-dimensional array of 2,048 tilting micromirrors for astronomical spectroscopy.
abstract: A micromirror array composed of 2048 silicon micromirrors measuring 200 × 100 μm² and tilting by 25° was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively.
authors.forename: Michael D
authors.initials: MD
authors.lastname: Canonica
authors.forename: Frédéric
authors.initials: F
authors.lastname: Zamkotsian
authors.forename: Patrick
authors.initials: P
authors.lastname: Lanzoni
authors.forename: Wilfried
authors.initials: W
authors.lastname: Noell
authors.forename: Nico
authors.initials: N
authors.lastname: De Rooij