title: Sandwich structure of Pd doped nanostructure TiO2 film as O2 sensor.
abstract: In this paper, we investigated the sensing properties of sandwich structure of TiO2/Pd/TiO2 thin films at various operating temperatures and oxygen partial pressures. The nanostructure TiO2 thin films were prepared by the sol-gel method. Various thickness of Pd buried layer was deposited by magnetron sputtering of a pure Pd target. The films were characterized using X-ray diffraction analysis and SEM. It was found that TiO2/Pd/TiO2 thin films have the p-type behavior while the pure TiO2 thin film is n-type semiconductor materials. We found that the structure of TiO2/Pd/TiO2 thin films with 10 s sputtering Pd layer has a better stability at 240 °C.
authors.affiliation: State Key Laboratory for Manufacturing Systems Engineering, Xi'an, Shaanxi 710049, People's Republic of China.
authors.forename: Hairong
authors.initials: H
authors.lastname: Wang
authors.forename: Quantao
authors.initials: Q
authors.lastname: Sun
authors.forename: Lei
authors.initials: L
authors.lastname: Chen
authors.forename: Yulong
authors.initials: Y
authors.lastname: Zhao