title: Ultraweak background scattered light reveals structure of a diffractive element.
abstract: Background scattered light should normally be reduced in industrial fabrication processes; however, we demonstrated that background scattered light from an optical element contains significant structural information about the element. This was revealed by quite good agreement between the measured scattering intensity distribution of a sample and a computer simulation of the light intensity from the sample. The intensity distribution from a carefully fabricated sample with artificially controlled defects was obtained with a measurement system designed to measure ultraweak background scattered light covering an intensity range of over 10(10).
authors.forename: Manabu
authors.initials: M
authors.lastname: Hakko
authors.forename: Tomohiro
authors.initials: T
authors.lastname: Kiire
authors.forename: Daisuke
authors.initials: D
authors.lastname: Barada
authors.forename: Toyohiko
authors.initials: T
authors.lastname: Yatagai
authors.forename: Yoshio
authors.initials: Y
authors.lastname: Hayasaki