title: Simple approach for fast real-time line scan microscopic imaging.
abstract: A simple fast line scan microscopic imaging approach based on a wavelength-space-time mapping technique has been proposed. With a lab-made subpicosecond pulse laser with 10 dB bandwidth of 12 nm, we experimentally demonstrate a free-space optical apparatus designed for fast line scan imaging of microscopic objects. This system has a spatial resolution of 22 μm, field-of-view of 2.5 mm, and line scan rate of 20.9 MHz. By imaging a modified unitraveling carrier photodetector, we demonstrate the application of semiconductor device inspection for speeding up quality control.
authors.forename: Fangjian
authors.initials: F
authors.lastname: Xing
authors.forename: Hongwei
authors.initials: H
authors.lastname: Chen
authors.forename: Minghua
authors.initials: M
authors.lastname: Chen
authors.forename: Sigang
authors.initials: S
authors.lastname: Yang
authors.forename: Shizhong
authors.initials: S
authors.lastname: Xie
mesh_terms: D003199:Computer Systems; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007834:Lasers; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods*; D010783:Photometry / Q000295:instrumentation*; D012666:Semiconductors