title: Quality control of oblique incidence optical coatings based on normal incidence measurement data.
abstract: We demonstrate selection of reliable approaches for post-production characterization of oblique incidence multilayer optical coatings. The approaches include choice of input information, selection of adequate coating model, corresponding numerical characterization algorithm, and verification of the results. Applications of the approaches are illustrated with post-production characterization of oblique incidence edge filter, oblique incidence beam splitter and oblique incidence 43-layer quarter-wave mirror.
authors.forename: Tatiana V
authors.initials: TV
authors.lastname: Amotchkina
authors.forename: Michael K
authors.initials: MK
authors.lastname: Trubetskov
authors.forename: Alexander V
authors.initials: AV
authors.lastname: Tikhonravov
authors.forename: Sebastian
authors.initials: S
authors.lastname: Schlichting
authors.forename: Henrik
authors.initials: H
authors.lastname: Ehlers
authors.forename: Detlev
authors.initials: D
authors.lastname: Ristau
authors.forename: David
authors.initials: D
authors.lastname: Death
authors.forename: Robert J
authors.initials: RJ
authors.lastname: Francis
authors.forename: Vladimir
authors.initials: V
authors.lastname: Pervak