title: MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.
abstract: We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.
authors.forename: Cheng
authors.initials: C
authors.lastname: Pang
authors.forename: Hyungdae
authors.initials: H
authors.lastname: Bae
authors.forename: Ashwani
authors.initials: A
authors.lastname: Gupta
authors.forename: Kenneth
authors.initials: K
authors.lastname: Bryden
authors.forename: Miao
authors.initials: M
authors.lastname: Yu
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D018511:Systems Integration; D013817:Thermography / Q000295:instrumentation*; D014160:Transducers, Pressure