title: 25th anniversary article: CVD polymers: a new paradigm for surface modification and device fabrication.
abstract: Well-adhered, conformal, thin (<100 nm) coatings can easily be obtained by chemical vapor deposition (CVD) for a variety of technological applications. Room temperature modification with functional polymers can be achieved on virtually any substrate: organic, inorganic, rigid, flexible, planar, three-dimensional, dense, or porous. In CVD polymerization, the monomer(s) are delivered to the surface through the vapor phase and then undergo simultaneous polymerization and thin film formation. By eliminating the need to dissolve macromolecules, CVD enables insoluble polymers to be coated and prevents solvent damage to the substrate. CVD film growth proceeds from the substrate up, allowing for interfacial engineering, real-time monitoring, and thickness control. Initiated-CVD shows successful results in terms of rationally designed micro- and nanoengineered materials to control molecular interactions at material surfaces. The success of oxidative-CVD is mainly demonstrated for the deposition of organic conducting and semiconducting polymers.
authors.affiliation: Institute of Solid State Physics, Graz University of Technology, Graz, 8010 , Austria.
authors.forename: Anna Maria
authors.initials: AM
authors.lastname: Coclite
authors.forename: Rachel M
authors.initials: RM
authors.lastname: Howden
authors.forename: David C
authors.initials: DC
authors.lastname: Borrelli
authors.forename: Christy D
authors.initials: CD
authors.lastname: Petruczok
authors.forename: Rong
authors.initials: R
authors.lastname: Yang
authors.forename: Jose Luis
authors.initials: JL
authors.lastname: Yagüe
authors.forename: Asli
authors.initials: A
authors.lastname: Ugur
authors.forename: Nan
authors.initials: N
authors.lastname: Chen
authors.forename: Sunghwan
authors.initials: S
authors.lastname: Lee
authors.forename: Won Jun
authors.initials: WJ
authors.lastname: Jo
authors.forename: Andong
authors.initials: A
authors.lastname: Liu
authors.forename: Xiaoxue
authors.initials: X
authors.lastname: Wang
authors.forename: Karen K
authors.initials: KK
authors.lastname: Gleason
mesh_terms: D002621:Chemistry / Q000379:methods*; D005461:Fluorine / Q000737:chemistry; D005740:Gases / Q000737:chemistry; D006801:Humans; D058105:Polymerization; D011108:Polymers / Q000737:chemistry*; D013499:Surface Properties; D014835:Volatilization
chemical_list: D005740:Gases; D011108:Polymers; D005461:Fluorine
keywords: chemical vapor deposition; conformality; conjugated polymers; functional polymers; surface modification