title: Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges.
abstract: Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al2 O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, 200 Union St. S.E., Minneapolis, MN, 55455, USA.
authors.forename: Hyungsoon
authors.initials: H
authors.lastname: Im
authors.forename: Sang-Hyun
authors.initials: SH
authors.lastname: Oh
keywords: atomic layer deposition; metallic pyramid; near-field optical microscopy; plasmonic nanofocusing; template stripping