title: Microstructure and optical properties of Ag/ITO/Ag multilayer films.
abstract: Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.
authors.affiliation: School of Physics & Materials Science, Anhui University, Hefei 230601, People's Republic of China. szq@ahu.edu.cn.
authors.forename: Zhaoqi
authors.initials: Z
authors.lastname: Sun
authors.forename: Maocui
authors.initials: M
authors.lastname: Zhang
authors.forename: Qiping
authors.initials: Q
authors.lastname: Xia
authors.forename: Gang
authors.initials: G
authors.lastname: He
authors.forename: Xueping
authors.initials: X
authors.lastname: Song