title: [Application of confocal technology based on polycapillary X-ray lens in measuring thickness].
abstract: A confocal micro X-ray fluorescence thickness gauge based on a polycapillary focusing X-ray lens, a polycapillary parallel X-ray lens and a laboratory X-ray source was designed in order to analyze nondestructively the thickness of thin film and cladding material. The performances of this confocal thickness gauge were studied. Two Ni films with a thickness of about 25 and 15 microm respectively were measured. The relative errors corresponding to them were 3.5% and 7.1%, respectively. The thickness uniformity of a Ni films with a thickness of about 10 microm was analyzed. This confocal technology for measuring the thickness was both spatially resolved and elemental sensitive, and therefore, it could be used to measure the thickness of the multilayer sample and analyze the thickness uniformity of the sample. This confocal thickness gauge had potential applications in analyzing the thickness of sample.
authors.affiliation: The Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875, China. yks0651@sina.com
authors.forename: Song
authors.initials: S
authors.lastname: Peng
authors.forename: Zhi-Guo
authors.initials: ZG
authors.lastname: Liu
authors.forename: Tian-Xi
authors.initials: TX
authors.lastname: Sun
authors.forename: Yu-De
authors.initials: YD
authors.lastname: Li
authors.forename: He-He
authors.initials: HH
authors.lastname: Liu
authors.forename: Wei-Gang
authors.initials: WG
authors.lastname: Zhao
authors.forename: Guang-Cui
authors.initials: GC
authors.lastname: Zhao
authors.forename: Xiao-Yan
authors.initials: XY
authors.lastname: Lin
authors.forename: Ping
authors.initials: P
authors.lastname: Luo
authors.forename: Qiu-Li
authors.initials: QL
authors.lastname: Pan
authors.forename: Xun-Liang
authors.initials: XL
authors.lastname: Ding