title: Efficient curvilinear coordinate method for grating diffraction simulation.
abstract: The article presents a new method for rigorous simulation of the light diffraction on one-dimensional gratings. The method is capable to solve metal-dielectric structures in linear time and consumed memory with respect to structure complexity. Exceptional performance and convergence for metal gratings are achieved by implementing a curvilinear coordinate transformation into the generalized source method previously developed for dielectric gratings.
authors.forename: Alexey A
authors.initials: AA
authors.lastname: Shcherbakov
authors.forename: Alexandre V
authors.initials: AV
authors.lastname: Tishchenko