title: Liquid Tunable Microlenses based on MEMS techniques.
abstract: The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems.
authors.affiliation: Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706 USA ; Globalfoundries US Inc., 400 Stone Break Extension, Malta, NY 12020.
authors.forename: Xuefeng
authors.initials: X
authors.lastname: Zeng
authors.forename: Hongrui
authors.initials: H
authors.lastname: Jiang
keywords: MEMS; Microelectromechanical systems; micro optics; microlenses; tunable lenses