title: Micromachined silicon attenuated total reflectance infrared spectroscopy: an emerging detection method in micro/nanofluidics.
abstract: Microfluidics is an emerging field with various applications. In situ analysis of liquids inside microfluidic channels is an important research subject for any of these applications. On the other hand, attenuated total reflectance infrared spectroscopy (ATR-IR) is a strong surface detection method. Recently, there have been various attempts to use ATR-IR for detection of liquids inside microfluidic channels. Micromachined silicon ATR-IR (μSi-ATR-IR) is an emerging analytical tool for micro/nanofluidics. This paper reviews μSi-ATR-IR micro/nanofluidics detection devices and discusses the application fields, capabilities, advantages, and disadvantages of the method.
authors.affiliation: Mesoscale Chemical Systems Group (MCS), MESA+ Institute for Nanotechnology, University of Twente, The Netherlands.
authors.forename: Engin
authors.initials: E
authors.lastname: Karabudak
mesh_terms: D004867:Equipment Design; D006878:Hydroxides; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D017680:Potassium Compounds; D012825:Silicon / Q000737:chemistry*; D017550:Spectroscopy, Fourier Transform Infrared / Q000295:instrumentation*
chemical_list: D006878:Hydroxides; D017680:Potassium Compounds; C029943:potassium hydroxide; D012825:Silicon
keywords: Attenuated total reflection; Infrared spectroscopy; Microfluidics; Nanofluidics; Online detection