title: Identification of microfluidic two-phase flow patterns in lab-on-chip devices.
abstract: This work describes a capacitive sensor for identification of microfluidic two-phase flow in lab-on-chip devices. With interdigital electrodes and thin insulation layer utilized, this sensor is capable of being integrated with the microsystems easily. Transducing principle and design considerations are presented with respect to the microfluidic gas/liquid flow patterns. Numerical simulation results verify the operational principle. And the factors affecting the performance of the sensor are discussed. Besides, a feasible process flow for the fabrication is also proposed.
authors.affiliation: Department of Micro and Nano Systems Technology, Vestfold University College, Postboks 2243, 3103 Tonsberg, Norway.
authors.forename: Zhaochu
authors.initials: Z
authors.lastname: Yang
authors.forename: Tao
authors.initials: T
authors.lastname: Dong
authors.forename: Einar
authors.initials: E
authors.lastname: Halvorsen
mesh_terms: D000388:Air; D000465:Algorithms; D003198:Computer Simulation; D003199:Computer Systems; D025802:Electric Capacitance; D004566:Electrodes; D004867:Equipment Design; D020342:Finite Element Analysis; D005740:Gases; D056656:Lab-On-A-Chip Devices; D046210:Microfluidic Analytical Techniques; D044085:Microfluidics / Q000379:methods*; D008962:Models, Theoretical; D012984:Software; D014867:Water / Q000737:chemistry
chemical_list: D005740:Gases; D014867:Water
keywords: flow patterns; interdigital electrode; lab on a chip; microchannel; microfluidic; two-phase flow