title: High spatial resolution Raman thermometry analysis of TiO2 microparticles.
abstract: A new technique of high-resolution micro-Raman thermometry using anatase TiO2 microparticles (0.5-3 μm) is presented. These very high spatial resolution measurements (280 nm) reveal temperature gradients even within individual microparticles. Potential applications of this technique are demonstrated by probing the temperature distribution of a micro-fabricated heater consisting of a thin silicon nitride (Si-N) membrane with a gold coil on top of the membrane. Using TiO2 microparticle micro-Raman thermometry, the temperature from the outer edge of the coil to the inner portion was measured to increase by ~40 °C. These high spatial resolution microscopic measurements were also used to measure the temperature gradient within the 20 μm wide Si-N between the gold heating coils. 2D numerical simulations of the micro heater temperature distribution are in excellent agreement with the experimental measurements of the temperatures. These measurements illustrate the potential to extend applications of micro-Raman thermometry to obtain temperature details on a sub-micrometer spatial resolution by employing microparticles.
authors.affiliation: Chemical Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Nils
authors.initials: N
authors.lastname: Lundt
authors.forename: Stephen T
authors.initials: ST
authors.lastname: Kelly
authors.forename: Tobias
authors.initials: T
authors.lastname: Rödel
authors.forename: Benjamin
authors.initials: B
authors.lastname: Remez
authors.forename: Adam M
authors.initials: AM
authors.lastname: Schwartzberg
authors.forename: Alejandro
authors.initials: A
authors.lastname: Ceballos
authors.forename: Chloé
authors.initials: C
authors.lastname: Baldasseroni
authors.forename: Peter A F
authors.initials: PA
authors.lastname: Anastasi
authors.forename: Malcolm
authors.initials: M
authors.lastname: Cox
authors.forename: Frances
authors.initials: F
authors.lastname: Hellman
authors.forename: Stephen R
authors.initials: SR
authors.lastname: Leone
authors.forename: Mary K
authors.initials: MK
authors.lastname: Gilles