title: Note: Accurate determination of thickness of multiple layers of thin film deposited on a piezoelectric quartz crystal.
abstract: Modern day piezoelectric quartz crystal microbalances for thin film deposition control are based on Z-match equation, which is mathematically valid for deposition of a single material on a given quartz crystal. When multiple layers are deposited, thickness and deposition rate errors accumulate due to mismatch of acoustic impedance of different materials. Here we present a novel method, based on the acoustic transfer matrix formalism, for accurate determination of thickness of an arbitrary number of layers of dissimilar materials deposited on a quartz crystal. Laboratory data show excellent accuracy of the method compared to conventional Z-match equation.
authors.affiliation: INFICON Inc., Two Technology Place, East Syracuse, New York 13057, USA.
authors.forename: Abdul
authors.initials: A
authors.lastname: Wajid