title: Poly-silicon nanowire sensor for sodium chloride concentration measurement.
abstract: In this paper, the poly-Si nanowire sensor was fabricated by top-down technique for sodium chloride concentration measurement. The results showed that the smallest threshold voltage and the best resolution were 1.65 V and 0.41 μM, respectively. Furthermore, the sensor can be reused more than 50 times which maintained acceptable performance and showed good linearity of the calibration within wide range of the concentration. Based on these results, it can be concluded that the proposed sensor has great potential to be used for measuring complicated sample with suitable modification on the surface of nanowires.
authors.affiliation: Department of Communications Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li, 32003 Taiwan.
authors.forename: Yao-Chiang
authors.initials: YC
authors.lastname: Kan
authors.forename: Cheng-Chih
authors.initials: CC
authors.lastname: Hsu
authors.forename: Wen-Kai
authors.initials: WK
authors.lastname: Ho
authors.forename: Tsai-Chen
authors.initials: TC
authors.lastname: Wu
authors.forename: Yao-Yaun
authors.initials: YY
authors.lastname: Ho
authors.forename: Chia Yu
authors.initials: CY
authors.lastname: Yang
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation*; D002138:Calibration; D004563:Electrochemistry; D004867:Equipment Design; D006801:Humans; D006863:Hydrogen-Ion Concentration; D006973:Hypertension / Q000175:diagnosis; D007477:Ions; D008855:Microscopy, Electron, Scanning; D053770:Nanowires / Q000737:chemistry*; D015203:Reproducibility of Results; D012825:Silicon / Q000737:chemistry*; D012965:Sodium Chloride / Q000032:analysis* / Q000097:blood*; D013696:Temperature; D013997:Time Factors; D014173:Transistors, Electronic
chemical_list: D007477:Ions; D012965:Sodium Chloride; D012825:Silicon
keywords: NaCl concentration; ion sensitive field-effect transistor; poly-silicon nanowire