Effect of gas atmosphere on Ag-embedded ZnO nanofilms: structural, optical and electrical properties.
The effects of gas atmosphere and sputter time for depositing silver (Ag) on the structural, optical and electrical properties of ZnO/Ag/ZnO transparent conducting oxide (TCO) films have been investigated with sputtering Ag target in Ar or N2. It was found that the properties of the Ag and ZnO/Ag/ZnO films are quite dependent on the gas environment and the sputter time. The optical transparency of ZnO/Ag/ZnO films was easily controllable when sputtering the Ag target in N2 rather than in Ar. With optimizing the sputter time and atmosphere for Ag adsorption, the ZnO-based TCO films where the Ag layer was embedded in N2 yielded low resistance of 6.1-9.1 omega/sq and high transmittance of 93-96% over the visible range of wavelengths.
School of Semiconductor and Chemical Engineering, and Nanomaterials Processing Research Center, Chonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju 561-756, Republic of Korea.
Jin-Hwan
JH
Kim
Haslin
H
Kim
Mohammed
M
Vaseem
Yoon-Bong
YB
Hahn