Calculation of the performance of magnetic lenses with limited machining precision.
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
FEI Czech Republic s.r.o., Podnikatelská 6, 61200 Brno, Czech Republic; Institute of Physical Engineering, Brno University of Technology, Technická 2, Brno 616 69, Czech Republic. Electronic address: ondrej.shanel@fei.com.
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Sháněl
Institute of Physical Engineering, Brno University of Technology, Technická 2, Brno 616 69, Czech Republic; CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic.
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Zlámal
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 61264 Brno, Czech Republic.
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Oral
Aberrations; Perturbed geometry; Saturated magnetic lens; Spot size; Tolerance analysis