Ion-molecule reactions in mixtures of trimethylaluminum and methylamines.
The ion-molecule reactions of mixtures of trimethylaluminum and methylamines, to serve as a model system for group 13-15 semiconductor fabrication, were examined by using Fourier transform ion cyclotron resonance mass spectrometry. Sequential ion-molecule reactions leading to formation of multiple adduets were observed for each of the reactant mixtures investigated. Collision-induced dissociation was used to probe the adduct structures. There is evidence for hydrogen bonding between the amines and aluminum in most of the adducts studied. Rearrangement of the aluminum/nitrogen skeletons was not observed, although the aluminum/nitrogen bonds appear to be relatively strong, so that stable adducts can be formed. The monomethylamine and dimethylamine readily produce gas-phase neutral adducts with trimethylaluminum, which can be related to the basicities of the methylamines.
Chemistry Division/Code 6110, Naval Research Laboratory, 20375-5000, Washington, D.C., USA.
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