Athermal silicon microring resonators with titanium oxide cladding.
We describe a novel approach for CMOS-compatible passively temperature insensitive silicon based optical devices using titanium oxide cladding which has a negative thermo-optic (TO) effect. We engineer the mode confinement in Si and TiO2 such that positive TO of Si is exactly cancelled out by negative TO of TiO2. We demonstrate robust operation of the resulting device over 35 degrees.
Biswajeet
B
Guha
Jaime
J
Cardenas
Michal
M
Lipson