title: Extended self-ordering regime in hard anodization and its application to make asymmetric AAO membranes for large pitch-distance nanostructures.
abstract: We report here a fast and reliable hard anodization process to make asymmetric anodic aluminum oxide (AAO) membranes which can serve as a template for large pitch-distance nanostructures. In order to make larger pitch distances possible, the common burning failure associated with the high current density during the conventional constant voltage hard anodization, especially at a voltage higher than a known limit, i.e., 155 V for oxalic acid, was effectively suppressed by using a burning-protective agent. A new self-ordering regime beyond the voltage limit was observed with a different voltage-interpore distance relationship of 2.2 nm V(-1) compared to the reported 2.0 nm V(-1) for hard anodization. Combining a sulfuric acid mild anodization with this new regime of hard anodization, we further demonstrate a scalable process to make an asymmetric membrane with size up to ~47 mm in diameter and ~60 μm in thickness. This free-standing membrane can be used as a template for novel nanopatterned structures such as arrays of quantum dots, nanowires or nanotubes with diameters of a few tens of nanometers and pitch distance of over 400 nm.
authors.affiliation: Creative and Fundamental Research Division, Korea Electrotechnology Research Institute, Changwon 642-120, Korea.
authors.forename: Minwoo
authors.initials: M
authors.lastname: Kim
authors.forename: Yoon-Cheol
authors.initials: YC
authors.lastname: Ha
authors.forename: Truong Nhat
authors.initials: TN
authors.lastname: Nguyen
authors.forename: Hae Young
authors.initials: HY
authors.lastname: Choi
authors.forename: Doohun
authors.initials: D
authors.lastname: Kim