title: Note: Design and development of an integrated three-dimensional scanner for atomic force microscopy.
abstract: A compact scanning head for the Atomic Force Microscope (AFM) greatly enhances the portability of AFM and facilitates easy integration with other tools. This paper reports the design and development of a three-dimensional (3D) scanner integrated into an AFM micro-probe. The scanner is realized by means of a novel design for the AFM probe along with a magnetic actuation system. The integrated scanner, the actuation system, and their associated mechanical mounts are fabricated and evaluated. The experimentally calibrated actuation ranges are shown to be over 1 μm along all the three axes.
authors.affiliation: Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India.
authors.forename: T
authors.initials: T
authors.lastname: Rashmi
authors.forename: G
authors.initials: G
authors.lastname: Dharsana
authors.forename: R
authors.initials: R
authors.lastname: Sriramshankar
authors.forename: R
authors.initials: R
authors.lastname: Sri Muthu Mrinalini
authors.forename: G R
authors.initials: GR
authors.lastname: Jayanth