title: ITO/Ag/ITO multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes.
abstract: ITO/Ag/ITO (IAI) multilayer-based transparent conductive electrodes for ultraviolet light-emitting diodes are fabricated by reactive sputtering, optimized by annealing, and characterized with respect to electrical and optical properties. Increasing the annealing temperature from 300°C to 500°C decreased the sheet resistance and increased the transmittance. This may result from an observed improvement in the crystallinity of the IAI multilayer and a reduction in the near-UV absorption coefficient of Ag. We observed the lowest sheet resistance (9.21 Ω/sq) and the highest optical transmittance (88%) at 380 nm for the IAI multilayer samples annealed in N₂ gas at 500°C.
authors.forename: Jae Hoon
authors.initials: JH
authors.lastname: Lee
authors.forename: Kie Young
authors.initials: KY
authors.lastname: Woo
authors.forename: Kyeong Heon
authors.initials: KH
authors.lastname: Kim
authors.forename: Hee-Dong
authors.initials: HD
authors.lastname: Kim
authors.forename: Tae Geun
authors.initials: TG
authors.lastname: Kim