title: Nanofabrication of gate-defined GaAs/AlGaAs lateral quantum dots.
abstract: A quantum computer is a computer composed of quantum bits (qubits) that takes advantage of quantum effects, such as superposition of states and entanglement, to solve certain problems exponentially faster than with the best known algorithms on a classical computer. Gate-defined lateral quantum dots on GaAs/AlGaAs are one of many avenues explored for the implementation of a qubit. When properly fabricated, such a device is able to trap a small number of electrons in a certain region of space. The spin states of these electrons can then be used to implement the logical 0 and 1 of the quantum bit. Given the nanometer scale of these quantum dots, cleanroom facilities offering specialized equipment- such as scanning electron microscopes and e-beam evaporators- are required for their fabrication. Great care must be taken throughout the fabrication process to maintain cleanliness of the sample surface and to avoid damaging the fragile gates of the structure. This paper presents the detailed fabrication protocol of gate-defined lateral quantum dots from the wafer to a working device. Characterization methods and representative results are also briefly discussed. Although this paper concentrates on double quantum dots, the fabrication process remains the same for single or triple dots or even arrays of quantum dots. Moreover, the protocol can be adapted to fabricate lateral quantum dots on other substrates, such as Si/SiGe.
authors.affiliation: Département de Physique, Faculté des Sciences, Université de Sherbrooke.
authors.forename: Chloé
authors.initials: C
authors.lastname: Bureau-Oxton
authors.forename: Julien
authors.initials: J
authors.lastname: Camirand Lemyre
authors.forename: Michel
authors.initials: M
authors.lastname: Pioro-Ladrière
mesh_terms: D017607:Aluminum Compounds / Q000737:chemistry*; D001152:Arsenicals / Q000737:chemistry*; D003201:Computers; D004566:Electrodes; D005708:Gallium / Q000737:chemistry*; D007254:Information Science; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D045663:Quantum Dots; D012666:Semiconductors
chemical_list: D017607:Aluminum Compounds; D001152:Arsenicals; C043055:gallium arsenide; D005708:Gallium