title: Scalable fabrication of high-performance and flexible graphene strain sensors.
abstract: Graphene strain sensors have promising prospects of applications in detecting human motion. However, the shortage of graphene growth and patterning techniques has become a challenging issue hindering the application of graphene strain sensors. Therefore, we propose wafer-scale flexible strain sensors with high-performance, which can be fabricated in one-step laser scribing. The graphene films could be obtained by directly reducing graphene oxide film in a Light-Scribe DVD burner. The gauge factor (GF) of the graphene strain sensor (10 mm × 10 mm square) is 0.11. In order to enhance the GF further, graphene micro-ribbons (20 μm width, 0.6 mm long) has been used as strain sensors, of which the GF is up to 9.49. The devices may conform to various application requirements, such as high GF for low-strain applications and low GF for high deformation applications. The work indicates that laser scribed flexible graphene strain sensors could be widely used in medical-sensing, bio-sensing, artificial skin and many other areas.
authors.affiliation: Institute of Microelectronics, Tsinghua University, Beijing 100084, China. RenTL@tsinghua.edu.cn.
authors.forename: He
authors.initials: H
authors.lastname: Tian
authors.forename: Yi
authors.initials: Y
authors.lastname: Shu
authors.forename: Ya-Long
authors.initials: YL
authors.lastname: Cui
authors.forename: Wen-Tian
authors.initials: WT
authors.lastname: Mi
authors.forename: Yi
authors.initials: Y
authors.lastname: Yang
authors.forename: Dan
authors.initials: D
authors.lastname: Xie
authors.forename: Tian-Ling
authors.initials: TL
authors.lastname: Ren