title: Large arrays and properties of 3-terminal graphene nanoelectromechanical switches.
abstract: Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.
authors: Department of Mechanical Engineering, University of Colorado, Boulder, CO, 80309, USA.
authors: Xinghui
authors: X
authors: Liu
authors: Ji Won
authors: JW
authors: Suk
authors: Narasimha G
authors: NG
authors: Boddeti
authors: Lauren
authors: L
authors: Cantley
authors: Luda
authors: L
authors: Wang
authors: Jason M
authors: JM
authors: Gray
authors: Harris J
authors: HJ
authors: Hall
authors: Victor M
authors: VM
authors: Bright
authors: Charles T
authors: CT
authors: Rogers
authors: Martin L
authors: ML
authors: Dunn
authors: Rodney S
authors: RS
authors: Ruoff
authors: J Scott
authors: JS
authors: Bunch
keywords: finite element analysis; graphene; microsystems; nanoelectromechanical systems; nanomechanical switches