title: Micro-and nanostructured silicon-based superomniphobic surfaces.
abstract: We report on the fabrication of silicon nanostructured superhydrophobic and superoleophobic surfaces also called "superomniphobic" surfaces. For this purpose, silicon interfaces with different surface morphologies, single or double scale structuration, were investigated. These structured surfaces were chemically treated with perfluorodecyltrichlorosilane (PFTS), a low surface energy molecule. The morphology of the resulting surfaces was characterized using scanning electron microscopy (SEM). Their wetting properties: static contact angle (CA) and contact angle hysteresis (CAH) were investigated using liquids of various surface tensions. Despite that we found that all the different morphologies display a superhydrophobic character (CA>150° for water) and superoleophobic behavior (CA ≈ 140° for hexadecane), values of hysteresis are strongly dependent on the liquid surface tension and surface morphology. The best surface described in this study was composed of a dual scale texturation i.e. silicon micropillars covered by silicon nanowires. Indeed, this surface displayed high static contact angles and low hysteresis for all tested liquids.
authors.affiliation: Institut de Recherche Interdisciplinaire (IRI), USR CNRS 3078, Université Lille1, Parc de la Haute Borne, 50 Avenue de Halley, 59658 Villeneuve d'Ascq, France; Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN - UMR 8520), Cité Scientifique, Avenue Poincaré, BP 60069, 59652 Villeneuve d'Ascq, France; PetroVietnam University, 30/4 Street, Vung Tau City, Vietnam.
authors.forename: Thi Phuong Nhung
authors.initials: TP
authors.lastname: Nguyen
authors.affiliation: Institut de Recherche Interdisciplinaire (IRI), USR CNRS 3078, Université Lille1, Parc de la Haute Borne, 50 Avenue de Halley, 59658 Villeneuve d'Ascq, France.
authors.forename: Rabah
authors.initials: R
authors.lastname: Boukherroub
authors.affiliation: Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN - UMR 8520), Cité Scientifique, Avenue Poincaré, BP 60069, 59652 Villeneuve d'Ascq, France. Electronic address: Vincent.thomy@iemn.univ-lille1.fr.
authors.forename: Vincent
authors.initials: V
authors.lastname: Thomy
authors.affiliation: Institut de Recherche Interdisciplinaire (IRI), USR CNRS 3078, Université Lille1, Parc de la Haute Borne, 50 Avenue de Halley, 59658 Villeneuve d'Ascq, France. Electronic address: Yannick.coffinier@iri.univ-lille1.fr.
authors.forename: Yannick
authors.initials: Y
authors.lastname: Coffinier
mesh_terms: D000473:Alkanes / Q000737:chemistry; D005466:Fluorocarbons / Q000737:chemistry; D057927:Hydrophobic and Hydrophilic Interactions; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D012825:Silicon / Q000737:chemistry*; D013500:Surface Tension; D014867:Water / Q000737:chemistry*; D017155:Wettability
chemical_list: D000473:Alkanes; D005466:Fluorocarbons; D014867:Water; C007932:n-hexadecane; D012825:Silicon
keywords: Multi-scale roughness; Organic coating; Silicon nanostructures; Superoleophobic; Surperhydrophobic