title: Post-fabrication trimming of athermal silicon waveguides.
abstract: We experimentally demonstrate the post-fabrication trimming of polymer-coated athermal silicon waveguides by exploiting the photosensitivity of As(2)S(3) chalcogenide glass to near-bandgap visible light. Our technique enables compensation of fabrication tolerances and modification of specific circuit functionalities after fabrication. Moreover, our athermal and trimmable waveguide technology is highly resilient to high optical power, and thus extremely appealing for nonlinear applications. Finally, it enables to fix the absolute wavelength and spectral response of silicon devices with extremely low dependence from temperature and power.
authors.forename: Stefano
authors.initials: S
authors.lastname: Grillanda
authors.forename: Vivek
authors.initials: V
authors.lastname: Raghunathan
authors.forename: Vivek
authors.initials: V
authors.lastname: Singh
authors.forename: Francesco
authors.initials: F
authors.lastname: Morichetti
authors.forename: Jurgen
authors.initials: J
authors.lastname: Michel
authors.forename: Lionel
authors.initials: L
authors.lastname: Kimerling
authors.forename: Andrea
authors.initials: A
authors.lastname: Melloni
authors.forename: Anu
authors.initials: A
authors.lastname: Agarwal