title: Fast synthesis of high-performance graphene films by hydrogen-free rapid thermal chemical vapor deposition.
abstract: The practical use of graphene in consumer electronics has not been demonstrated since the size, uniformity, and reliability problems are yet to be solved to satisfy industrial standards. Here we report mass-produced graphene films synthesized by hydrogen-free rapid thermal chemical vapor deposition (RT-CVD), roll-to-roll etching, and transfer methods, which enabled faster and larger production of homogeneous graphene films over 400 × 300 mm(2) area with a sheet resistance of 249 ± 17 Ω/sq without additional doping. The properties of RT-CVD graphene have been carefully characterized by high-resolution transmission electron microscopy, Raman spectroscopy, chemical grain boundary analysis, and various electrical device measurements, showing excellent uniformity and stability. In particular, we found no significant correlation between graphene domain sizes and electrical conductivity, unlike previous theoretical expectations for nanoscale graphene domains. Finally, the actual application of the RT-CVD films to capacitive multitouch devices installed in the most sophisticated mobile phone was demonstrated.
authors.affiliation: Micro Device & Machinery Solution Division, Samsung Techwin R&D Center , Seongnam-si, Gyeonggi-do, 463-400, Republic of Korea.
authors.forename: Jaechul
authors.initials: J
authors.lastname: Ryu
authors.forename: Youngsoo
authors.initials: Y
authors.lastname: Kim
authors.forename: Dongkwan
authors.initials: D
authors.lastname: Won
authors.forename: Nayoung
authors.initials: N
authors.lastname: Kim
authors.forename: Jin Sung
authors.initials: JS
authors.lastname: Park
authors.forename: Eun-Kyu
authors.initials: EK
authors.lastname: Lee
authors.forename: Donyub
authors.initials: D
authors.lastname: Cho
authors.forename: Sung-Pyo
authors.initials: SP
authors.lastname: Cho
authors.forename: Sang Jin
authors.initials: SJ
authors.lastname: Kim
authors.forename: Gyeong Hee
authors.initials: GH
authors.lastname: Ryu
authors.forename: Hae-A-Seul
authors.initials: HA
authors.lastname: Shin
authors.forename: Zonghoon
authors.initials: Z
authors.lastname: Lee
authors.forename: Byung Hee
authors.initials: BH
authors.lastname: Hong
authors.forename: Seungmin
authors.initials: S
authors.lastname: Cho