title: Beamline BL-07 at Indus-2: a facility for microfabrication research.
abstract: The X-ray lithography beamline on Indus-2 is now operational, with two modes of operation. With a pair of X-ray mirrors it is possible to tune the energy spectrum between 1 and 20 keV with a controlled spectral bandwidth. In its 'no optics' mode, hard X-rays up to 40 keV are available. Features and performance of the beamline are presented along with some example structures. Structures fabricated include honeycomb structures in PMMA using a stainless steel stencil mask and a compound refractive X-ray lens using a polyimide-gold mask in SU-8.
authors.affiliation: Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus-2, Indore, MP 452012, India.
authors.forename: V P
authors.initials: VP
authors.lastname: Dhamgaye
authors.affiliation: Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus-2, Indore, MP 452012, India.
authors.forename: G S
authors.initials: GS
authors.lastname: Lodha
authors.affiliation: Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus-2, Indore, MP 452012, India.
authors.forename: B
authors.initials: B
authors.lastname: Gowri Sankar
authors.affiliation: Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus-2, Indore, MP 452012, India.
authors.forename: C
authors.initials: C
authors.lastname: Kant
keywords: X-ray lithography; beamlines; high-aspect-ratio structures; resist