title: Retrospective sputter depth profiling using 3D mass spectral imaging.
abstract: A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C60+cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.
authors.affiliation: Department of Chemistry, Pennsylvania State University, University Park, PA 16802, USA.
authors.forename: Leiliang
authors.initials: L
authors.lastname: Zheng
authors.affiliation: Faculty of Physics, University Duisburg-Essen, 47048 Duisburg, Germany.
authors.forename: Andreas
authors.initials: A
authors.lastname: Wucher
authors.affiliation: Department of Chemistry, Pennsylvania State University, University Park, PA 16802, USA.
authors.forename: Nicholas
authors.initials: N
authors.lastname: Winograd
keywords: 3D analysis; depth resolution; molecular depth profiling; organic multilayer analysis