title: New silicon technologies enable high-performance arrays of Single Photon Avalanche Diodes.
abstract: In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency at the longer wavelengths (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we will analyze the factors the currently prevent the fabrication of arrays of SPADs by adopting such a Red-Enhanced (RE) technology and we will propose further modifications to the device structure that will enable the fabrication of high performance RE-SPAD arrays for photon timing applications.
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy.
authors.forename: Angelo
authors.initials: A
authors.lastname: Gulinatti
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy.
authors.forename: Ivan
authors.initials: I
authors.lastname: Rech
authors.affiliation: IMM-CNR sezione di Bologna, Via Piero Gobetti, 101 - 40129 Bologna, Italy.
authors.forename: Piera
authors.initials: P
authors.lastname: Maccagnani
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy ; MPD Micro-Photon-Devices, via Stradivari 4 - 39100 Bolzano, Italy.
authors.forename: Sergio
authors.initials: S
authors.lastname: Cova
authors.affiliation: Politecnico di Milano, Dipartimento di Elettronica, Informazione e Bioingegneria, piazza Leonardo da Vinci 32 - 20133 Milano, Italy ; MPD Micro-Photon-Devices, via Stradivari 4 - 39100 Bolzano, Italy.
authors.forename: Massimo
authors.initials: M
authors.lastname: Ghioni
keywords: Enhanced Photon Detection Efficiency; Photon Counting; Photon Detection Efficiency (PDE); RE-SPAD; Red-Enhanced SPAD; SPAD arrays; Single-Photon Avalanche Diode (SPAD); Time Correlated Single Photon Counting (TCSPC)