title: Parametric nonlinear lumped element model for circular CMUTs in collapsed mode.
abstract: We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.
authors.forename: Elif
authors.initials: E
authors.lastname: Aydoğdu
authors.forename: Alper
authors.initials: A
authors.lastname: Ozgurluk
authors.forename: Abdullah
authors.initials: A
authors.lastname: Atalar
authors.forename: Hayrettin
authors.initials: H
authors.lastname: Köymen
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D025802:Electric Capacitance; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization; D008962:Models, Theoretical; D017711:Nonlinear Dynamics; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*