title: Note: Symmetric modulation methodology applied in improving the performance of scanning tunneling microscopy.
abstract: A symmetric modulation methodology is proposed to combine robust control of external disturbance, rapid response to steep sidewalls with the high speed of a traditional scanning tunneling microscopy. The 1400 × 200 μm(2) topography of a comb-like steep sidewalls micro-structure with the depth of 23 μm was acquired at a high scanning speed of 120 μms(-1) and the detectable slope angle is up to 85°. The total measuring time was only 17 min. In addition, a 4 × 4 mm(2) aluminum dual-sinusoidal array has been successfully measured with a scanning speed up to 500 μms(-1). It improved the performance of the normal scanning tunneling microscope and enables efficient and stable measurement of large-area complex micro-structures, and thus can be introduced to engineering applications.
authors.affiliation: The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, People's Republic of China.
authors.forename: Bing-Feng
authors.initials: BF
authors.lastname: Ju
authors.affiliation: The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, People's Republic of China.
authors.forename: Wu-Le
authors.initials: WL
authors.lastname: Zhu
authors.affiliation: The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, People's Republic of China.
authors.forename: Wei
authors.initials: W
authors.lastname: Zhang