title: Air heating approach for multilayer etching and roll-to-roll transfer of silicon nanowire arrays as SERS substrates for high sensitivity molecule detection.
abstract: SiNW array represents an attractive system for construction of high-performance energy, electronic, and sensor devices. To meet the demand for flexible devices as well as address the concern about the full use of the Si material, large-area transfer of the SiNW array from growth substrate is very desirable. Here, we report a simple air heating approach to achieve the multilayer etched SiNW array. This method allows the fabrication of up to a five-layer (while perfectly three-layer) cracked SiNW array on single-crystalline Si wafer via a templateless metal-assisted etching approach. Fractures could happen at the crack position when an appropriate pressure was applied on the SiNW array, facilitating the wafer-scale layer-by-layer transfer of the SiNW array onto a flexible substrate through a low-cost and time-efficient roll-to-roll (R2R) technique. Further releasing of the SiNW array to other receiving substrates was accomplished with the aid of a thermal release tape. After modification with sliver nanoparticles (AgNPs), the flexible SiNW array showed great potential as a high-sensitivity surface-enhanced Raman spectroscopy (SERS) substrate for detecting rhodamine 6G (R6G) molecule with concentration as low as 10(-9) M.
authors.affiliation: Institute of Functional Nano & Soft Materials (FUNSOM) & Collaborative Innovation Center of Suzhou Nano Science and Technology, Jiangsu Key Laboratory for Carbon-Based Functional Materials & Devices, Soochow University , Suzhou, Jiangsu 215123, P. R. China.
authors.forename: Yan
authors.initials: Y
authors.lastname: Wang
authors.forename: Xiujuan
authors.initials: X
authors.lastname: Zhang
authors.forename: Peng
authors.initials: P
authors.lastname: Gao
authors.forename: Zhibin
authors.initials: Z
authors.lastname: Shao
authors.forename: Xiwei
authors.initials: X
authors.lastname: Zhang
authors.forename: Yuanyan
authors.initials: Y
authors.lastname: Han
authors.forename: Jiansheng
authors.initials: J
authors.lastname: Jie
mesh_terms: D015374:Biosensing Techniques / Q000379:methods*; D053770:Nanowires / Q000737:chemistry*; D012235:Rhodamines / Q000737:chemistry / Q000302:isolation & purification*; D012825:Silicon / Q000737:chemistry; D013059:Spectrum Analysis, Raman; D013499:Surface Properties
chemical_list: D012235:Rhodamines; C026188:rhodamine 6G; D012825:Silicon