title: Patternable large-scale molybdenium disulfide atomic layers grown by gold-assisted chemical vapor deposition.
abstract: A novel way to grow MoS2 on a large scale with uniformity and in desired patterns is developed. We use Au film as a catalyst on which [Mo(CO)6 ] vapor decomposes to form a Mo-Au surface alloy that is an ideal Mo reservoir for the growth of atomic layers of MoS2 . Upon exposure to H2 S, this surface alloy transforms into a few layers of MoS2 , which can be isolated and transferred on an arbitrary substrate. By simply patterning Au catalyst film by conventional lithographic techniques, MoS2 atomic layers in desired patterns can be fabricated.
authors.affiliation: Center for Artificial Low Dimensional Electronic Systems, Institute for Basic Science (IBS), 77 Cheongam-Ro, Nam-Gu, Pohang, 790-784 (Korea); Department of Chemistry, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, 790-784 (Korea) http://www.postech.ac.kr/chem/nmrl.
authors.forename: Intek
authors.initials: I
authors.lastname: Song
authors.forename: Chibeom
authors.initials: C
authors.lastname: Park
authors.forename: Misun
authors.initials: M
authors.lastname: Hong
authors.forename: Jaeyoon
authors.initials: J
authors.lastname: Baik
authors.forename: Hyun-Joon
authors.initials: HJ
authors.lastname: Shin
authors.forename: Hee Cheul
authors.initials: HC
authors.lastname: Choi
keywords: 2D nanomaterials; chemical vapor deposition; molybdenum disulfide; patterned growth; surface alloys