title: Influence of preferred orientation on the electrical conductivity of fluorine-doped tin oxide films.
abstract: Current development of high-performance transparent conductive oxide (TCO) films is limited with tradeoff between carrier mobility and concentration since none of them can be improved without sacrificing the other. In this study, we prepare fluorine doped tin oxide (FTO) films by chemical vapor deposition with inclusions of different additives and report that the mobility can be varied from 0.65 to 28.5 cm(2) V(-1) s(-1) without reducing the achieved high carrier concentration of 4 × 10(20) cm(-3). Such an increase in mobility is shown to be clearly associated with the development of (200) preferred orientation (PO) but concurrent degradation of (110) PO in films. Thus, at a constant high carrier concentration, the electrical conductivity can be improved via carrier mobility simply by PO control. Such a one-step approach avoiding conventional post-deposition treatment is suggested for developing next-generation FTO as well as other TCO films with better than ever conductivities.
authors.affiliation: Nanomaterials-X Research Center, School of Mechanical and Power Engineering and School of Chemistry and Molecular Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, P. R. of China.
authors.forename: Jian Tao
authors.initials: JT
authors.lastname: Wang
authors.affiliation: Nanomaterials-X Research Center, School of Mechanical and Power Engineering and School of Chemistry and Molecular Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, P. R. of China.
authors.forename: Xiang Lei
authors.initials: XL
authors.lastname: Shi
authors.affiliation: Nanomaterials-X Research Center, School of Mechanical and Power Engineering and School of Chemistry and Molecular Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, P. R. of China.
authors.forename: Wei Wei
authors.initials: WW
authors.lastname: Liu
authors.affiliation: Nanomaterials-X Research Center, School of Mechanical and Power Engineering and School of Chemistry and Molecular Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, P. R. of China.
authors.forename: Xin Hua
authors.initials: XH
authors.lastname: Zhong
authors.affiliation: Nanomaterials-X Research Center, School of Mechanical and Power Engineering and School of Chemistry and Molecular Engineering, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237, P. R. of China.
authors.forename: Jian Nong
authors.initials: JN
authors.lastname: Wang
authors.affiliation: Pilkington Technology Management Limited, Pilkington European Technical Centre, Hall Lane, Lathom L40 5UF, United Kingdom.
authors.forename: Leo
authors.initials: L
authors.lastname: Pyrah
authors.affiliation: Pilkington Technology Management Limited, Pilkington European Technical Centre, Hall Lane, Lathom L40 5UF, United Kingdom.
authors.forename: Kevin D
authors.initials: KD
authors.lastname: Sanderson
authors.affiliation: Pilkington Technology Management Limited, Pilkington European Technical Centre, Hall Lane, Lathom L40 5UF, United Kingdom.
authors.forename: Philip M
authors.initials: PM
authors.lastname: Ramsey
authors.affiliation: Nippon Sheet Glass Co., Ltd., R&D, 2-13-12 Konoike, Itami, Hyogo 664-8520, Japan.
authors.forename: Masahiro
authors.initials: M
authors.lastname: Hirata
authors.affiliation: Nippon Sheet Glass Co., Ltd., R&D, 2-13-12 Konoike, Itami, Hyogo 664-8520, Japan.
authors.forename: Keiko
authors.initials: K
authors.lastname: Tsuri