Electrochemical mechanical micromachining based on confined etchant layer technique.
The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale.
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Ye
Y
Yuan
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Lianhuan
L
Han
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Jie
J
Zhang
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Jingchun
J
Jia
Center for Precision Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, China.
Xuesen
X
Zhao
Center for Precision Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, China.
Yongzhi
Y
Cao
Center for Precision Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, China.
Zhenjiang
Z
Hu
Center for Precision Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, China.
Yongda
Y
Yan
Center for Precision Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, China.
Shen
S
Dong
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Zhong-Qun
ZQ
Tian
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Zhao-Wu
ZW
Tian
College of Chemistry and Chemical Engineering, and State Key Laboratory for Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, China.
Dongping
D
Zhan