Polymer waveguide grating sensor integrated with a thin-film photodetector.
This paper presents a planar waveguide grating sensor integrated with a photodetector (PD) for on-chip optical sensing systems which are suitable for diagnostics in the field and in-situ measurements. III-V semiconductor-based thin-film PD is integrated with a polymer based waveguide grating device on a silicon platform. The fabricated optical sensor successfully discriminates optical spectral characteristics of the polymer waveguide grating from the on-chip PD. In addition, its potential use as a refractive index sensor is demonstrated. Based on a planar waveguide structure, the demonstrated sensor chip may incorporate multiple grating waveguide sensing regions with their own optical detection PDs. In addition, the demonstrated processing is based on a post-integration process which is compatible with silicon complementary metal-oxide semiconductor (CMOS) electronics. Potentially, this leads a compact, chip-scale optical sensing system which can monitor multiple physical parameters simultaneously without need for external signal processing.
Department of Electrical Engineering, The City College of New York, 160 Convent Avenue, New York, NY 10031, USA.
Fuchuan
F
Song
Department of Electrical Engineering, The City College of New York, 160 Convent Avenue, New York, NY 10031, USA.
Jing
J
Xiao
Department of Electrical Engineering, The City College of New York, 160 Convent Avenue, New York, NY 10031, USA.
Antonio Jou
AJ
Xie
Department of Electrical Engineering, The City College of New York, 160 Convent Avenue, New York, NY 10031, USA.
Sang-Woo
SW
Seo