The effect of probe inaccuracies on the quantitative model-based analysis of high angle annular dark field scanning transmission electron microscopy images.
Quantitative structural and chemical information can be obtained from high angle annular dark field scanning transmission electron microscopy (HAADF STEM) images when using statistical parameter estimation theory. In this approach, we assume an empirical parameterized imaging model for which the total scattered intensities of the atomic columns are estimated. These intensities can be related to the material structure or composition. Since the experimental probe profile is assumed to be known in the description of the imaging model, we will explore how the uncertainties in the probe profile affect the estimation of the total scattered intensities. Using multislice image simulations, we analyze this effect for Cs corrected and non-Cs corrected microscopes as a function of inaccuracies in cylindrically symmetric aberrations, such as defocus and spherical aberration of third and fifth order, and non-cylindrically symmetric aberrations, such as 2-fold and 3-fold astigmatism and coma.
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Gronenborgerlaan 171, 2020 Antwerp, Belgium. Electronic address: gerardo.martinez@uantwerpen.be.
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Martinez
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Gronenborgerlaan 171, 2020 Antwerp, Belgium.
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De Backer
Institut für Festkörperphysik, Universität Bremen, Otto-Hahn-Alle 1, D-28359 Bremen, Germany.
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Rosenauer
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Gronenborgerlaan 171, 2020 Antwerp, Belgium.
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Verbeeck
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Gronenborgerlaan 171, 2020 Antwerp, Belgium.
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Van Aert
HAADF STEM; Probe aberrations; STEM simulations; Statistical parameter estimation theory