Investigation of quasi lateral-field-excitation on (yxl)-17° LiNbO3 single crystal.
Quasi lateral-field-excitation (LFE) on LiNbO3 crystal is investigated both theoretically and experimentally. It is found that when the driving electric field direction is parallel to the crystallographic X-axis of the piezoelectric substrate, (yxl)-17° LiNbO3 LFE bulk acoustic wave devices work on quasi-LFE mode. The experimental results agreed with the theoretical prediction well. The results provide the cut of LiNbO3 crystal for quasi-LFE bulk acoustic wave devices, which is important for designing high performance LFE sensors on LiNbO3 substrates.
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China. Electronic address: matingfeng@nbu.edu.cn.
Tingfeng
T
Ma
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
Ji
J
Wang
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
Jianke
J
Du
Piezoelectric Device Laboratory, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, China.
Lili
L
Yuan
State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.
Zhenghua
Z
Qian
Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China.
Zhitian
Z
Zhang
Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China.
Chao
C
Zhang
LiNbO(3) crystal; Piezoelectricity; Plate; Quasi lateral-field-excitation; Resonator