title: Fabrication of metallic nanopatterns with ultrasmooth surface on various substrates through lift-off and transfer process.
abstract: The smooth surface of the metallic nanostructure is essential for the propagation of surface plasmon polaritons. In this paper, we present a novel method to fabricate the metallic nanopatterns with ultra-smooth surface on various substrates. By using a silica film as the sacrificial layer, we show that the prefabricated metallic nanopatterns produced by electron beam lithography and film deposition can be hydrolyzed and transferred onto a designated substrate. The ultra-smooth surface morphology of nanopatterns has been characterized and verified by scanning electron microscopy and atomic force microscopy. More importantly, we demonstrate that this method can successfully produce a variety of nanostructures with high product yield, even onto the uneven substrate. The results indicate that our proposed method is a promising and versatile means to fabricate multiplicate smooth metallic nanostructure on various substrates for the application of nanophotonic devices.
authors: Cai
authors: C
authors: Hongbing
authors: Ren
authors: R
authors: Wenzhen
authors: Zhang
authors: Z
authors: Kun
authors: Tian
authors: T
authors: Yangchao
authors: Pan
authors: P
authors: Nan
authors: Luo
authors: L
authors: Yi
authors: Wang
authors: W
authors: Xiaoping
mesh_terms: D004583:Electrons; D008422:Materials Testing; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D054802:Molecular Imprinting / Q000379:methods*; D012031:Refractometry / Q000379:methods*; D013499:Surface Properties / Q000528:radiation effects