title: Nano-patterned dual-layer ITO electrode of high brightness blue light emitting diodes using maskless wet etching.
abstract: We propose a dual-layer transparent Indium Tin Oxide (ITO) top electrode scheme and demonstrate the enhancement of the optical output power of GaN-based light emitting diodes (LEDs). The proposed dual-layer structure is composed of a layer with randomly distributed sphere-like nano-patterns obtained solely by a maskless wet etching process and a pre-annealed bottom layer to maintain current spreading of the electrode. It was observed that the surface morphologies and optoelectronic properties are dependent on etching duration. This electrode significantly improves the optical output power of GaN-based LEDs with an enhancement factor of 2.18 at 100 mA without degradation in electrical property when compared to a reference LED.
authors: Semi
authors: S
authors: Oh
authors: Pei-Chen
authors: PC
authors: Su
authors: Yong-Jin
authors: YJ
authors: Yoon
authors: Soohaeng
authors: S
authors: Cho
authors: Joon-Ho
authors: JH
authors: Oh
authors: Tae-Yeon
authors: TY
authors: Seong
authors: Kyoung-Kook
authors: KK
authors: Kim