title: Surface-normal emission from subwavelength GaN membrane grating.
abstract: We present here the fabrication of subwavelength GaN membrane grating with a double-side process. Controllable GaN membrane thickness is achieved by backside thinning technique, which is essential to realize guided-mode resonant GaN grating in the visible range. Subwavelength GaN grating can serve as an optical resonator and accommodate surface-normal emission coupling. The measured photoluminescence (PL) spectra are sensitive to the parameters and shapes of GaN gratings. Both numerical simulation and reflectivity measurement are in consistent with the PL experimental results. This work opens a promising way to embed GaN-based photon emitter inside subwavelength grating to further produce a surface emitting device with a single layer GaN grating.
authors: Yongjin
authors: Y
authors: Wang
authors: Zheng
authors: Z
authors: Shi
authors: Xin
authors: X
authors: Li
authors: Shumin
authors: S
authors: He
authors: Miao
authors: M
authors: Zhang
authors: Hongbo
authors: H
authors: Zhu