title: Using STED and ELSM confocal microscopy for a better knowledge of fused silica polished glass interface.
abstract: Characteristics and nature of close surface defects existing in fused silica polished optical surfaces were explored. Samples were deliberately scratched using a modified polishing process in presence of different fluorescent dyes. Various techniques including Epi-fluorescence Laser Scanning Mode (ELSM) or STimulated Emission Depletion (STED) confocal microscopy were used to measure and quantify scratches that are sometimes embedded under the polished layer. We show using a non-destructive technique that depth of the modified region extends far below the surface. Moreover cracks of 120 nm width can be present ten micrometers below the surface.
authors: Rodolphe
authors: R
authors: Catrin
authors: Jérôme
authors: J
authors: Neauport
authors: Philippe
authors: P
authors: Legros
authors: Daniel
authors: D
authors: Taroux
authors: Thomas
authors: T
authors: Corbineau
authors: Philippe
authors: P
authors: Cormont
authors: Cédric
authors: C
authors: Maunier
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D005898:Glass / Q000737:chemistry*; D006358:Hot Temperature; D008422:Materials Testing / Q000295:instrumentation* / Q000379:methods*; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods*; D012822:Silicon Dioxide / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D012822:Silicon Dioxide