title: High-Q CMOS-integrated photonic crystal microcavity devices.
abstract: Integrated optical resonators are necessary or beneficial in realizations of various functions in scaled photonic platforms, including filtering, modulation, and detection in classical communication systems, optical sensing, as well as addressing and control of solid state emitters for quantum technologies. Although photonic crystal (PhC) microresonators can be advantageous to the more commonly used microring devices due to the former's low mode volumes, fabrication of PhC cavities has typically relied on electron-beam lithography, which precludes integration with large-scale and reproducible CMOS fabrication. Here, we demonstrate wavelength-scale polycrystalline silicon (pSi) PhC microresonators with Qs up to 60,000 fabricated within a bulk CMOS process. Quasi-1D resonators in lateral p-i-n structures allow for resonant defect-state photodetection in all-silicon devices, exhibiting voltage-dependent quantum efficiencies in the range of a few 10 s of %, few-GHz bandwidths, and low dark currents, in devices with loaded Qs in the range of 4,300-9,300; one device, for example, exhibited a loaded Q of 4,300, 25% quantum efficiency (corresponding to a responsivity of 0.31 A/W), 3 GHz bandwidth, and 30 nA dark current at a reverse bias of 30 V. This work demonstrates the possibility for practical integration of PhC microresonators with active electro-optic capability into large-scale silicon photonic systems.
authors: Department of Electrical Engineering & Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA 02139.
authors: Karan K
authors: KK
authors: Mehta
authors: Department of Electrical Engineering & Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA 02139.
authors: Jason S
authors: JS
authors: Orcutt
authors: 1] Micron Semiconductor Israel, Kiryat-Gat, Israel [2].
authors: Ofer
authors: O
authors: Tehar-Zahav
authors: Micron Semiconductor Israel, Kiryat-Gat, Israel.
authors: Zvi
authors: Z
authors: Sternberg
authors: Micron Technology, Inc., Process R&D, San Jose, CA, USA 95134.
authors: Reha
authors: R
authors: Bafrali
authors: Micron Technology, Inc., Process R&D, Boise, ID, USA 83707.
authors: Roy
authors: R
authors: Meade
authors: Department of Electrical Engineering & Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA 02139.
authors: Rajeev J
authors: RJ
authors: Ram