title: A cheap and quickly adaptable in situ electrical contacting TEM sample holder design.
abstract: In situ electrical characterization of nanostructures inside a transmission electron microscope provides crucial insight into the mechanisms of functioning micro- and nano-electronic devices. For such in situ investigations specialized sample holders are necessary. A simple and affordable but flexible design is important, especially, when sample geometries change, a holder should be adaptable with minimum effort. Atomic resolution imaging is standard nowadays, so a sample holder must ensure this capability. A sample holder design for on-chip samples is presented that fulfils these requisites. On-chip sample devices have the advantage that they can be manufactured via standard fabrication routes.
authors: Speziallabor Triebenberg, Technische Universität Dresden, 01062 Dresden, Germany; IFW Dresden, PF 27 01 16, 01171 Dresden, Germany. Electronic address: felix.boerrnert@triebenberg.de.
authors: Felix
authors: F
authors: Börrnert
authors: IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
authors: Ralf
authors: R
authors: Voigtländer
authors: IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
authors: Bernd
authors: B
authors: Rellinghaus
authors: IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
authors: Bernd
authors: B
authors: Büchner
authors: IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
authors: Mark H
authors: MH
authors: Rümmeli
authors: Speziallabor Triebenberg, Technische Universität Dresden, 01062 Dresden, Germany.
authors: Hannes
authors: H
authors: Lichte
mesh_terms: D004560:Electricity; D046529:Microscopy, Electron, Transmission / Q000295:instrumentation*; D049329:Nanostructures
keywords: Electrical contacting; In situ TEM; TEM sample holder