title: Relation of optical properties and femtosecond laser damage resistance for Al2O3/AlF3 and Al2O3/SiO2 composite coatings.
abstract: We report on the realization of aluminum oxyfluoride thin films and alumina/silica mixture coatings with different ratios by ion beam sputtering. The atomic compositions quantified by energy dispersive x-ray spectroscopy are correlated with the optical properties calculated from spectrophotometry and laser calorimetry measurements. Furthermore, the femtosecond laser damage resistance (τ=400  fs) of single layers is investigated in the infrared at 1030 nm and in the ultraviolet at 343 nm wavelengths. Experimental results on the wavelength scaling of the laser-induced damage threshold for oxyfluoride and oxide composite coatings are presented.
authors: Mathias
authors: M
authors: Mende
authors: Istvan
authors: I
authors: Balasa
authors: Henrik
authors: H
authors: Ehlers
authors: Detlev
authors: D
authors: Ristau
authors: Dam-be
authors: DB
authors: Douti
authors: Laurent
authors: L
authors: Gallais
authors: Mireille
authors: M
authors: Commandré