title: Aberration compensation in aplanatic solid immersion lens microscopy.
abstract: The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.
authors: Yang
authors: Y
authors: Lu
authors: Thomas
authors: T
authors: Bifano
authors: Selim
authors: S
authors: Ünlü
authors: Bennett
authors: B
authors: Goldberg