title: Characterization, optimization and surface physics aspects of in situ plasma mirror cleaning.
abstract: Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still under development. In this study an analysis of remediation strategies all based on in situ low-pressure RF plasma cleaning approaches is reported, including a quantitative determination of the optimum process parameters and their influence on the chemistry as well as the morphology of optical test surfaces. It appears that optimum results are obtained for a specific pressure range as well as for specific combinations of the plasma feedstock gases, the latter depending on the chemical aspects of the optical surfaces to be cleaned.
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Eric
authors.initials: E
authors.lastname: Pellegrin
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Igors
authors.initials: I
authors.lastname: Sics
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Juan
authors.initials: J
authors.lastname: Reyes-Herrera
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Carlos
authors.initials: C
authors.lastname: Perez Sempere
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Juan Josep
authors.initials: JJ
authors.lastname: Lopez Alcolea
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Michel
authors.initials: M
authors.lastname: Langlois
authors.affiliation: Experiments Division, CELLS-ALBA, Carretera BP1413, km 3.3, Cerdanyola del Valles, Barcelona 08290, Spain.
authors.forename: Jose
authors.initials: J
authors.lastname: Fernandez Rodriguez
authors.affiliation: ibss Group Inc., 1559B Sloat Blvd, Suite 270, San Francisco, CA 94132, USA.
authors.forename: Vincent
authors.initials: V
authors.lastname: Carlino
keywords: X-ray photoemission spectroscopy; carbon contamination; interference microscopy; low-pressure RF plasma; optical emission spectroscopy; synchrotron optics