title: Highly efficient beamline and spectrometer for inelastic soft X-ray scattering at high resolution.
abstract: The design, construction and commissioning of a beamline and spectrometer for inelastic soft X-ray scattering at high resolution in a highly efficient system are presented. Based on the energy-compensation principle of grating dispersion, the design of the monochromator-spectrometer system greatly enhances the efficiency of measurement of inelastic soft X-rays scattering. Comprising two bendable gratings, the set-up effectively diminishes the defocus and coma aberrations. At commissioning, this system showed results of spin-flip, d-d and charge-transfer excitations of NiO. These results are consistent with published results but exhibit improved spectral resolution and increased efficiency of measurement. The best energy resolution of the set-up in terms of full width at half-maximum is 108 meV at an incident photon energy tuned about the Ni L3-edge.
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: C H
authors.initials: CH
authors.lastname: Lai
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: H S
authors.initials: HS
authors.lastname: Fung
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: W B
authors.initials: WB
authors.lastname: Wu
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: H Y
authors.initials: HY
authors.lastname: Huang
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: H W
authors.initials: HW
authors.lastname: Fu
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: S W
authors.initials: SW
authors.lastname: Lin
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: S W
authors.initials: SW
authors.lastname: Huang
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: C C
authors.initials: CC
authors.lastname: Chiu
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: D J
authors.initials: DJ
authors.lastname: Wang
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: L J
authors.initials: LJ
authors.lastname: Huang
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: T C
authors.initials: TC
authors.lastname: Tseng
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: S C
authors.initials: SC
authors.lastname: Chung
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: C T
authors.initials: CT
authors.lastname: Chen
authors.affiliation: National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.
authors.forename: D J
authors.initials: DJ
authors.lastname: Huang
keywords: active grating; grating monochromator; resonant inelastic X-ray scattering; soft X-ray beamline; soft X-ray optics; soft X-ray spectra