title: Point spread function measurement of an X-ray beam focused by a multilayer zone plate with narrow annular aperture.
abstract: The experimental procedure for obtaining the point spread function (PSF) of a focusing beam generated using an X-ray multilayer zone plate (MZP) with a narrow annular aperture has been developed. It was possible to reconstruct the PSF by applying the tomographic process to the measured dataset consisting of line spread functions (LSFs) in every radial direction on the focal plane. The LSFs were measured by a knife-edge scanning method of detecting scattered intensity. In the experimental work, quasi-monochromatic undulator radiation with a first harmonic energy of 20 keV was directly focused without a monochromator by the MZP, and the PSF was measured using this procedure. As a result, a near diffraction-limited focused beam size of 46 nm full width at half-maximum was obtained.
authors.affiliation: Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Takano
authors.affiliation: Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
authors.forename: Shigeki
authors.initials: S
authors.lastname: Konishi
authors.affiliation: Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
authors.forename: Takahisa
authors.initials: T
authors.lastname: Koyama
authors.affiliation: Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
authors.forename: Yoshiyuki
authors.initials: Y
authors.lastname: Tsusaka
authors.affiliation: NTT Advanced Technology Corporation, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan.
authors.forename: Satoshi
authors.initials: S
authors.lastname: Ichimaru
authors.affiliation: NTT Advanced Technology Corporation, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan.
authors.forename: Tadayuki
authors.initials: T
authors.lastname: Ohchi
authors.affiliation: NTT Advanced Technology Corporation, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan.
authors.forename: Hisataka
authors.initials: H
authors.lastname: Takenaka
authors.affiliation: Center for Novel Material Science Under Multi-Extreme Conditions, Graduate School of Material Science, University of Hyogo, 3-2-1 Kouto, Kamigori, Ako, Hyogo 578-1297, Japan.
authors.forename: Yasushi
authors.initials: Y
authors.lastname: Kagoshima
keywords: Fresnel zone plate; X-ray focusing; computed tomography; line spread function; multilayer zone plate; point spread function