title: Note: real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscope.
abstract: Miniature pillars are three-dimensional (3D) features commonly found in microfluidic device. These features are usually employed as filters. Non-confocal profilometers have difficulties in measuring 3D topography of pillar structures in transparent microfluidic devices. Confocal sensors can be used to measure the 3D topography of pillar structures but they are usually time consuming due to the scanning process. We have developed a technique to measure 3D topography using a modified confocal microscope with a spinning Nipkow disk and chromatic confocal technique. Experimental results on a microfluidic device with pillar structures demonstrate the feasibility of the proposed technique. Our technique is suitable for in situ, real time measurement of microfluidic device at production speed since it requires only one confocal image to complete a measurement.
authors.affiliation: Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.
authors.forename: Kar Tien
authors.initials: KT
authors.lastname: Ang
authors.affiliation: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075.
authors.forename: Zhong Ping
authors.initials: ZP
authors.lastname: Fang
authors.affiliation: Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.
authors.forename: Arthur
authors.initials: A
authors.lastname: Tay
mesh_terms: D002138:Calibration; D021621:Imaging, Three-Dimensional / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D018613:Microscopy, Confocal / Q000295:instrumentation*; D013997:Time Factors