title: A compact, versatile low-energy electron beam ion source.
abstract: A new compact Electron Beam Ion Source, the Dresden EBIT-LE, is introduced as an ion source working at low electron beam energies. The EBIT-LE operates at an electron energy ranging from 100 eV to some keV and can easily be modified to an EBIT also working at higher electron beam energies of up to 15 keV. We show that, depending on the electron beam energy, electron beam currents from a few mA in the low-energy regime up to about 40 mA in the high-energy regime are possible. Technical solutions as well as first experimental results of the EBIT-LE are presented. In ion extraction experiments, a stable production of low and intermediate charged ions at electron beam energies below 2 keV is demonstrated. Furthermore, X-ray spectroscopy measurements confirm the possibility of using the machine as a source of X-rays from ions excited at low electron energies.
authors.affiliation: Department of Physics, Dresden University of Technology, 01062 Dresden, Germany and Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, 01328 Dresden, Germany.
authors.forename: G
authors.initials: G
authors.lastname: Zschornack
authors.affiliation: DREEBIT GmbH, 01109 Dresden, Germany.
authors.forename: J
authors.initials: J
authors.lastname: König
authors.affiliation: DREEBIT GmbH, 01109 Dresden, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Schmidt
authors.affiliation: DREEBIT GmbH, 01109 Dresden, Germany.
authors.forename: A
authors.initials: A
authors.lastname: Thorn
mesh_terms: D004583:Electrons