title: Solion ion source for high-efficiency, high-throughput solar cell manufacturing.
abstract: In this paper, we introduce the Solion ion source for high-throughput solar cell doping. As the source power is increased to enable higher throughput, negative effects degrade the lifetime of the plasma chamber and the extraction electrodes. In order to improve efficiency, we have explored a wide range of electron energies and determined the conditions which best suit production. To extend the lifetime of the source we have developed an in situ cleaning method using only existing hardware. With these combinations, source life-times of >200 h for phosphorous and >100 h for boron ion beams have been achieved while maintaining 1100 cell-per-hour production.
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: John Bon-Woong
authors.initials: JB
authors.lastname: Koo
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: Brant
authors.initials: B
authors.lastname: Binns
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: Timothy
authors.initials: T
authors.lastname: Miller
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: Stephen
authors.initials: S
authors.lastname: Krause
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: Wesley
authors.initials: W
authors.lastname: Skinner
authors.affiliation: Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.
authors.forename: James
authors.initials: J
authors.lastname: Mullin