title: Emittance of compact microwave ion source for low energy application.
abstract: The emittance of the compact microwave ion source for low energy application was investigated. The source structure was slightly modified from the previously reported version. The extraction apertures of 3 mm and 4 mm were used to evaluate the emittance. It was found that the normalized emittance of the present ion source ranged from 6 × 10(-8) m rad (3 mm extraction aperture) to 2 × 10(-7) m rad (4 mm extraction aperture), which are similar to that of the original ion source.
authors.affiliation: Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: Yasuhito
authors.initials: Y
authors.lastname: Gotoh
authors.affiliation: Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: Shuhei
authors.initials: S
authors.lastname: Taguchi
authors.affiliation: Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Tsuji
authors.affiliation: Department of Electronics and Information Engineering, Chubu University, Kasugai 487-8501, Japan.
authors.forename: Junzo
authors.initials: J
authors.lastname: Ishikawa
authors.affiliation: Nissin Ion Equipment, Co., Ltd., Kyoto 601-8205, Japan.
authors.forename: Shigeki
authors.initials: S
authors.lastname: Sakai