title: Development of microwave ion source for industrial applications.
abstract: A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured spectra show that, under the experimental condition, almost all of produced ions were Ar(+) ions. For more than 6 h, the ion beam was stable.
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: N
authors.initials: N
authors.lastname: Takahashi
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Murata
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Mitsubori
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: J
authors.initials: J
authors.lastname: Sakuraba
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Soga
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Aoki
authors.affiliation: Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Katoh
authors.affiliation: Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Saitoh
authors.affiliation: Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan.
authors.forename: K
authors.initials: K
authors.lastname: Yamada
authors.affiliation: Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan.
authors.forename: N
authors.initials: N
authors.lastname: Ikenaga
authors.affiliation: Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan.
authors.forename: N
authors.initials: N
authors.lastname: Sakudo