title: Fabrication of TiN nanostructure as a hydrogen peroxide sensor by oblique angle deposition.
abstract: Nanostructured titanium nitride (TiN) films with varying porosity were prepared by the oblique angle deposition technique (OAD). The porosity of films increases as the deposition angle becomes larger. The film obtained at an incident angle of 85° exhibits the best catalytic activity and sensitivity to hydrogen peroxide (H2O2). This could be attributed to its largest contact area with the electrolyte. An effective approach is thus proposed to fabricate TiN nanostructure as H2O2 sensor by OAD.
authors.forename: Zheng
authors.initials: Z
authors.lastname: Xie
authors.forename: Xiangxuan
authors.initials: X
authors.lastname: Liu
authors.forename: Weipeng
authors.initials: W
authors.lastname: Wang
authors.forename: Can
authors.initials: C
authors.lastname: Liu
authors.forename: Zhengcao
authors.initials: Z
authors.lastname: Li
authors.affiliation: Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China. zjzhang@tsinghua.edu.cn.
authors.forename: Zhengjun
authors.initials: Z
authors.lastname: Zhang