title: Characteristics of acetone cluster ion beam for surface processing and modification.
abstract: An acetone cluster ion beam was produced by the adiabatic expansion method without using helium as a support gas. The cluster source for the production of ethanol clusters was replaced with that sealed with metal gaskets. The Laval nozzle for the production of ethanol clusters was also replaced with a stainless steel conical nozzle. The cluster size distributions of the acetone cluster ion beams had mean values approximately at 2 × 10(3) molecules and increased with source pressure. The typical beam current density of the acetone cluster ion beam was approximately 0.5 μA/cm(2).
authors.affiliation: Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Ryuto
authors.affiliation: Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Kakumoto
authors.affiliation: Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: M
authors.initials: M
authors.lastname: Takeuchi
authors.affiliation: Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto 615-8510, Japan.
authors.forename: G H
authors.initials: GH
authors.lastname: Takaoka