title: Plasma immersion ion charge state and mass spectrometer.
abstract: Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Igor B
authors.initials: IB
authors.lastname: Stepanov
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Alexander I
authors.initials: AI
authors.lastname: Ryabchikov
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Petr S
authors.initials: PS
authors.lastname: Ananin
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Sergej V
authors.initials: SV
authors.lastname: Dektyarev
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Denis O
authors.initials: DO
authors.lastname: Sivin
authors.affiliation: National Research Tomsk Polytechnic University, Lenina Avenue 30, Tomsk 634050, Russia.
authors.forename: Dan A
authors.initials: DA
authors.lastname: Verigin