title: Design of a new electron cyclotron resonance ion source at Oshima National College of Maritime Technology.
abstract: A new electron cyclotron resonance ion/plasma source has been designed and will be built at Oshima National College of Maritime Technology by early 2014. We have developed an ion source that allows the control of the plasma parameters over a wide range of electron temperatures for material research. A minimum-B magnetic field composed of axial mirror fields and radial cusp fields was designed using mainly Nd-Fe-B permanent magnets. The axial magnetic field can be varied by three solenoid coils. The apparatus has 2.45 GHz magnetron and 2.5-6.0 GHz solid-state microwave sources.
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Asaji
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: N
authors.initials: N
authors.lastname: Hirabara
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Izumihara
authors.affiliation: Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Hitobo
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Nakamizu
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Ohba
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Nakamura
authors.affiliation: Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193, Japan.
authors.forename: M
authors.initials: M
authors.lastname: Furuse
authors.affiliation: Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Kato