title: A harsh environment-oriented wireless passive temperature sensor realized by LTCC technology.
abstract: To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulin.99@163.com.
authors.forename: Qiulin
authors.initials: Q
authors.lastname: Tan
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. 18935157540@163.com.
authors.forename: Tao
authors.initials: T
authors.lastname: Luo
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xiongjijun@nuc.edu.cn.
authors.forename: Jijun
authors.initials: J
authors.lastname: Xiong
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. 18734135497@163.com.
authors.forename: Hao
authors.initials: H
authors.lastname: Kang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. ji418xiaxia@163.com.
authors.forename: Xiaxia
authors.initials: X
authors.lastname: Ji
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. zhang418yang@163.com.
authors.forename: Yang
authors.initials: Y
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. yang418mingliang@163.com.
authors.forename: Mingliang
authors.initials: M
authors.lastname: Yang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. wangdakeliou@126.com.
authors.forename: Xiaolong
authors.initials: X
authors.lastname: Wang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xuechenyang@nuc.edu.cn.
authors.forename: Chenyang
authors.initials: C
authors.lastname: Xue
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. Liuj@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Liu
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. wdzhang@nuc.edu.cn.
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang