title: Development of the ion source for cluster implantation.
abstract: Bernas ion source development to meet needs of 100s of electron-volt ion implanters for shallow junction production is in progress in Institute for Theoretical and Experimental Physics. The ion sources provides high intensity ion beam of boron clusters under self-cleaning operation mode. The last progress with ion source operation is presented. The mechanism of self-cleaning procedure is described.
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia.
authors.forename: T V
authors.initials: TV
authors.lastname: Kulevoy
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia.
authors.forename: D N
authors.initials: DN
authors.lastname: Seleznev
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia.
authors.forename: A V
authors.initials: AV
authors.lastname: Kozlov
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia.
authors.forename: R P
authors.initials: RP
authors.lastname: Kuibeda
authors.affiliation: Institute for Theoretical and Experimental Physics, Moscow, Russia.
authors.forename: G N
authors.initials: GN
authors.lastname: Kropachev
authors.affiliation: OOO "Plasma sources", Tomsk, Russia.
authors.forename: O V
authors.initials: OV
authors.lastname: Alexeyenko
authors.affiliation: State Scientific Center of the Russian Federation State Research Institute for Chemistry and Technology of Organoelement Compounds, Moscow, Russia.
authors.forename: S N
authors.initials: SN
authors.lastname: Dugin
authors.affiliation: OOO "Plasma sources", Tomsk, Russia.
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.affiliation: OOO "Plasma sources", Tomsk, Russia.
authors.forename: V I
authors.initials: VI
authors.lastname: Gushenets
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: A
authors.initials: A
authors.lastname: Hershcovitch
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: B
authors.initials: B
authors.lastname: Jonson
authors.affiliation: PVI, Oxnard, California 93030, USA.
authors.forename: H J
authors.initials: HJ
authors.lastname: Poole