title: Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry.
abstract: Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.
authors.affiliation: 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan.
authors.forename: Masami
authors.initials: M
authors.lastname: Terauchi
authors.affiliation: 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan.
authors.forename: Shogo
authors.initials: S
authors.lastname: Koshiya
authors.affiliation: 1Institute of Multidisciplinary Research for Advanced Materials,Tohoku University,2-1-1 Katahira,Aoba-ku,Sendai 980-8577,Japan.
authors.forename: Futami
authors.initials: F
authors.lastname: Satoh
authors.affiliation: 2JEOL Ltd.,3-1-2 Musashino,Akishima,Tokyo 196-8558,Japan.
authors.forename: Hideyuki
authors.initials: H
authors.lastname: Takahashi
authors.affiliation: 2JEOL Ltd.,3-1-2 Musashino,Akishima,Tokyo 196-8558,Japan.
authors.forename: Nobuo
authors.initials: N
authors.lastname: Handa
authors.affiliation: 2JEOL Ltd.,3-1-2 Musashino,Akishima,Tokyo 196-8558,Japan.
authors.forename: Takanori
authors.initials: T
authors.lastname: Murano
authors.affiliation: 3Quantum Beam Science Directorate,Japan Atomic Energy Agency,8-1-7 Umemidai,Kizugawa,Kyoto 619-0215,Japan.
authors.forename: Masato
authors.initials: M
authors.lastname: Koike
authors.affiliation: 3Quantum Beam Science Directorate,Japan Atomic Energy Agency,8-1-7 Umemidai,Kizugawa,Kyoto 619-0215,Japan.
authors.forename: Takashi
authors.initials: T
authors.lastname: Imazono
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Masaru
authors.initials: M
authors.lastname: Koeda
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Nagano
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Hiroyuki
authors.initials: H
authors.lastname: Sasai
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Yuki
authors.initials: Y
authors.lastname: Oue
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Zeno
authors.initials: Z
authors.lastname: Yonezawa
authors.affiliation: 4Device Department,SHIMADZU Corp.,1 Nishinokyo-Kuwabaracho,Nakagyo-ku,Kyoto 604-8511,Japan.
authors.forename: Satoshi
authors.initials: S
authors.lastname: Kuramoto