title: [The research on high-density flexible microelectrode array of retinal prosthesis based on MEMS technology].
abstract: The paper proposed a new method to design and fabricate a flexible neural microelectrode arrays (MEA) for retinal prosthesis, the ion-beam technology was introduced to decrease the width of conductive wires and the distances between wires, a high density MEA (120 microelectrodes with a matrix of 10 x 12) was fabricated on a single layer of polymer from this. The MEA was proved to possess a fine electrochemical property. In vitro test, the average impedance of MEA on 1 kHz was 16 k omega +/- 2 k omega and the average phase difference was -85 degrees +/-30 degrees.
authors.forename: Gang
authors.initials: G
authors.lastname: Feng
authors.forename: Xiaohong
authors.initials: X
authors.lastname: Sui
authors.forename: Yu
authors.initials: Y
authors.lastname: Wang
authors.forename: Gang
authors.initials: G
authors.lastname: Li
authors.forename: Xinyu
authors.initials: X
authors.lastname: Chai
mesh_terms: D055617:Micro-Electrical-Mechanical Systems; D008839:Microelectrodes; D011474:Prosthesis Design; D057488:Visual Prosthesis