title: A wafer-scale backplane-assisted resonating nanoantenna array SERS device created by tunable thermal dewetting nanofabrication.
abstract: A tunable lithography-less nanofabrication process using a metal thin-film thermal dewetting technique has been developed to fabricate wafer-scale and uniform plasmonic substrates at low cost for optimal performance in surface enhanced Raman scattering (SERS) applications. The relationship between the tunable parameters of this process and the corresponding optical and plasmonic characteristic is investigated both experimentally and theoretically to understand the deterministic design of an optimal SERS device with a three-dimensional plasmonic nanoantenna structure. The enhancement of SERS using various nanoplasmonic particle sizes, structure lengths, lateral hot spot spacings and resonating effects are examined and demonstrated. We achieve a uniform optimal enhancement factor of 1.38 × 10(8) on a 4 in wafer-scale SERS substrate with a backplane-assisted resonating nanoantenna array design. Sensitive environmental nitrate sensing, vitamin detection and oligonucleotide identification are demonstrated on the high-performance SERS device.
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois at Urbana Champaign, Urbana, IL, 61801, USA.
authors.forename: Te-Wei
authors.initials: TW
authors.lastname: Chang
authors.forename: Manas Ranjan
authors.initials: MR
authors.lastname: Gartia
authors.forename: Sujin
authors.initials: S
authors.lastname: Seo
authors.forename: Austin
authors.initials: A
authors.lastname: Hsiao
authors.forename: Gang Logan
authors.initials: GL
authors.lastname: Liu
mesh_terms: D004867:Equipment Design; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D009566:Nitrates / Q000032:analysis; D009841:Oligonucleotides / Q000032:analysis; D010316:Particle Size; D013059:Spectrum Analysis, Raman / Q000295:instrumentation / Q000379:methods*; D013499:Surface Properties; D014815:Vitamins / Q000032:analysis
chemical_list: D009566:Nitrates; D009841:Oligonucleotides; D014815:Vitamins