title: Ultra-thin 3D nano-devices from atomic layer deposition on polyimide.
authors.affiliation: Department of Mechanical Engineering, University of Colorado at Boulder, 1111 Engineering Drive, 427 UCB, Boulder, CO, 80309-0427, USA.
authors.forename: Nathan T
authors.initials: NT
authors.lastname: Eigenfeld
authors.forename: Jason M
authors.initials: JM
authors.lastname: Gray
authors.forename: Joseph J
authors.initials: JJ
authors.lastname: Brown
authors.forename: George D
authors.initials: GD
authors.lastname: Skidmore
authors.forename: Steven M
authors.initials: SM
authors.lastname: George
authors.forename: Victor M
authors.initials: VM
authors.lastname: Bright
keywords: NEMS; atomic layer deposition; microbolometer; nanofabrication; polymers