title: Formation of three-way scanning electron microscope moiré on micro/nanostructures.
abstract: Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner. The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré. The design considerations of the three-way EB were discussed. As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented. The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time.
authors.affiliation: Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan.
authors.forename: Qinghua
authors.identifier: 0000-0002-0645-6514
authors.initials: Q
authors.lastname: Wang
authors.affiliation: Hybrid Materials Unit, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan.
authors.forename: Satoshi
authors.initials: S
authors.lastname: Kishimoto
authors.affiliation: Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan.
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Tsuda
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation / Q000379:methods; D021621:Imaging, Three-Dimensional / Q000295:instrumentation* / Q000379:methods*; D008422:Materials Testing / Q000295:instrumentation / Q000379:methods; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods*; D053758:Nanoparticles / Q000648:ultrastructure*; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods*