title: Pr and F co-doped SnO₂ transparent conductive films with high work function deposited by ion-assisted electron beam evaporation.
abstract: A transparent conductive oxide (TCO) Pr and F co-doped SnO2 (PFTO) film is prepared by ion-assisted electron beam deposition. An optimized PFTO film shows a high average visible optical transmittance of 83.6% and a minimum electrical resistivity of 3.7 × 10(-3) Ω·cm corresponding to a carrier density of 1.298 × 10(20) cm(-3) and Hall mobility of 12.99 cm(2)/V⋅s. This PFTO film shows a high work function of 5.147 eV and favorable surface morphology with an average roughness of 1.45 nm. Praseodymium fluoride is found to be an effective material to dope F into SnO2 that can simplify the fabrication process of SnO2-based TCO films.
authors.forename: Shaohang
authors.initials: S
authors.lastname: Wu
authors.forename: Yantao
authors.initials: Y
authors.lastname: Li
authors.forename: Jinsong
authors.initials: J
authors.lastname: Luo
authors.forename: Jie
authors.initials: J
authors.lastname: Lin
authors.forename: Yi
authors.initials: Y
authors.lastname: Fan
authors.forename: Zhihong
authors.initials: Z
authors.lastname: Gan
authors.forename: Xingyuan
authors.initials: X
authors.lastname: Liu