title: A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head.
abstract: We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.
authors.forename: Mourad
authors.initials: M
authors.lastname: Idir
authors.forename: Konstantine
authors.initials: K
authors.lastname: Kaznatcheev
authors.forename: Guillaume
authors.initials: G
authors.lastname: Dovillaire
authors.forename: Jerome
authors.initials: J
authors.lastname: Legrand
authors.forename: Rakchanok
authors.initials: R
authors.lastname: Rungsawang