title: Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry.
abstract: A technique which can measure thickness variation of a moving glass plate in real-time with nanometric resolution is proposed. The technique is based on the double-slit interference of light. Owing to the nature of differential measurement scheme, the measurement system is immune to harsh environmental condition of a production line, and the measurement results are not affected by the swaying motion of the panel. With the preliminary experimental setup with scanning speed of 100 mm/s, the measurement repeatability was 3 nm for the waviness component of the thickness profile, filtered with a Gaussian filter with cutoff wavelength of 8 mm.
authors.forename: Jong-Ahn
authors.initials: JA
authors.lastname: Kim
authors.forename: Jae Wan
authors.initials: JW
authors.lastname: Kim
authors.forename: Tae Bong
authors.initials: TB
authors.lastname: Eom
authors.forename: Jonghan
authors.initials: J
authors.lastname: Jin
authors.forename: Chu-Shik
authors.initials: CS
authors.lastname: Kang