title: Nitrogen-incorporated ultrananocrystalline diamond and multi-layer-graphene-like hybrid carbon films.
abstract: Nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) and multi-layer-graphene-like hybrid carbon films have been synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) on oxidized silicon which is pre-seeded with diamond nanoparticles. MPECVD of N-UNCD on nanodiamond seeds produces a base layer, from which carbon structures nucleate and grow perpendicularly to form standing carbon platelets. High-resolution transmission electron microscopy and Raman scattering measurements reveal that these carbon platelets are comprised of ultrananocrystalline diamond embedded in multilayer-graphene-like carbon structures. The hybrid carbon films are of low electrical resistivity. UNCD grains in the N-UNCD base layer and the hybrid carbon platelets serve as high-density diamond nuclei for the deposition of an electrically insulating UNCD film on it. Biocompatible carbon-based heaters made of low-resistivity hybrid carbon heaters encapsulated by insulating UNCD for possible electrosurgical applications have been demonstrated.
authors.affiliation: 1] Institute of Microelectronics, National Cheng Kung University, No. 1 University Road, Tainan 70101, Taiwan [2] Advanced Optoelectronics Technology Center, National Cheng Kung University, No. 1 University Road, Tainan 70101, Taiwan.
authors.forename: Yonhua
authors.initials: Y
authors.lastname: Tzeng
authors.affiliation: Institute of Microelectronics, National Cheng Kung University, No. 1 University Road, Tainan 70101, Taiwan.
authors.forename: Shoupu
authors.initials: S
authors.lastname: Yeh
authors.affiliation: Institute of Microelectronics, National Cheng Kung University, No. 1 University Road, Tainan 70101, Taiwan.
authors.forename: Wei Cheng
authors.initials: WC
authors.lastname: Fang
authors.affiliation: Institute of Microelectronics, National Cheng Kung University, No. 1 University Road, Tainan 70101, Taiwan.
authors.forename: Yuehchieh
authors.initials: Y
authors.lastname: Chu