title: Design and performance of a scanning ptychography microscope.
abstract: We have designed and constructed a dedicated instrument to perform ptychography measurements and characterization of multilayer Laue lenses nanofocusing optics. The design of the scanning microscope provides stability of components and minimal thermal drifts, requirements for nanometer scale spatial resolution measurements. We performed thorough laboratory characterization of the instrument in terms of resolution and thermal drifts with subsequent measurements at a synchrotron. We have successfully acquired and reconstructed ptychography data yielding 11 nm line focus.
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: E
authors.initials: E
authors.lastname: Nazaretski
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: X
authors.initials: X
authors.lastname: Huang
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: H
authors.initials: H
authors.lastname: Yan
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: K
authors.initials: K
authors.lastname: Lauer
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: R
authors.initials: R
authors.lastname: Conley
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: N
authors.initials: N
authors.lastname: Bouet
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: J
authors.initials: J
authors.lastname: Zhou
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: W
authors.initials: W
authors.lastname: Xu
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: D
authors.initials: D
authors.lastname: Eom
authors.affiliation: Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: D
authors.initials: D
authors.lastname: Legnini
authors.affiliation: Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: R
authors.initials: R
authors.lastname: Harder
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: C-H
authors.initials: CH
authors.lastname: Lin
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Y-S
authors.initials: YS
authors.lastname: Chen
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Y
authors.initials: Y
authors.lastname: Hwu
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: Y S
authors.initials: YS
authors.lastname: Chu