title: Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology.
abstract: The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer's design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.
authors.forename: María Gabriela
authors.initials: MG
authors.lastname: Capeluto
authors.forename: Mario Carlos
authors.initials: MC
authors.lastname: Marconi
authors.forename: Claudio Cesar
authors.initials: CC
authors.lastname: Iemmi