title: Note: Measurement speed improvement of microchip Nd:YAG laser feedback interferometer.
abstract: We analyze the measurement speed limit of the quasi-common-path laser feedback interferometer and demonstrate a much improved measurement speed from 100 μm/s to 60 mm/s owing to the optimized system parameters and a novel signal processing method. The performance is experimentally verified by comparing to an Agilent 5529A dual-frequency laser interferometer.
authors.affiliation: The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
authors.forename: Song
authors.initials: S
authors.lastname: Zhang
authors.affiliation: The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
authors.forename: Yidong
authors.initials: Y
authors.lastname: Tan
authors.affiliation: The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
authors.forename: Shulian
authors.initials: S
authors.lastname: Zhang