title: 25th anniversary article: materials for high-performance biodegradable semiconductor devices.
abstract: We review recent progress in a class of silicon-based electronics that is capable of complete, controlled dissolution when immersed in water or bio-fluids. This type of technology, referred to in a broader sense as transient electronics, has potential applications in resorbable biomedical devices, eco-friendly electronics, environmental sensors, secure hardware systems and others. New results reported here include studies of the kinetics of hydrolysis of nanomembranes of single crystalline silicon in bio-fluids and aqueous solutions at various pH levels and temperatures. Evaluations of toxicity using live animal models and test coupons of transient electronic materials provide some evidence of their biocompatibility, thereby suggesting potential for use in bioresorbable electronic implants.
authors.affiliation: Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801, USA.
authors.forename: Suk-Won
authors.initials: SW
authors.lastname: Hwang
authors.forename: Gayoung
authors.initials: G
authors.lastname: Park
authors.forename: Huanyu
authors.initials: H
authors.lastname: Cheng
authors.forename: Jun-Kyul
authors.initials: JK
authors.lastname: Song
authors.forename: Seung-Kyun
authors.initials: SK
authors.lastname: Kang
authors.forename: Lan
authors.initials: L
authors.lastname: Yin
authors.forename: Jae-Hwan
authors.initials: JH
authors.lastname: Kim
authors.forename: Fiorenzo G
authors.initials: FG
authors.lastname: Omenetto
authors.forename: Yonggang
authors.initials: Y
authors.lastname: Huang
authors.forename: Kyung-Mi
authors.initials: KM
authors.lastname: Lee
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
mesh_terms: D000818:Animals; D001672:Biocompatible Materials / Q000737:chemistry / Q000378:metabolism / Q000633:toxicity; D006868:Hydrolysis; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry / Q000378:metabolism / Q000633:toxicity; D014867:Water / Q000737:chemistry
chemical_list: D001672:Biocompatible Materials; D014867:Water; D012825:Silicon
keywords: biocompatible; biodegradable; bioresorbable; biosensors; transient electronics