Highly automated electron energy-loss spectroscopy elemental quantification.
A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.
1AppFive LLC,1095 West Rio Salado Parkway,Suite 110,Tempe,AZ 85281,USA.
Raman D
RD
Narayan
1AppFive LLC,1095 West Rio Salado Parkway,Suite 110,Tempe,AZ 85281,USA.
J K
JK
Weiss
2Department of Physics,Arizona State University,PO Box 871504,Tempe,AZ 85287,USA.
Peter
P
Rez