Building a Fab on a Chip.
Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.
Department of Electrical and Computer Engineering, Boston University, Boston, Massachusetts 02215, USA. mimboden@bu.edu.
Matthias
M
Imboden
Han
H
Han
Thomas
T
Stark
Evan
E
Lowell
Jackson
J
Chang
Flavio
F
Pardo
Cristian
C
Bolle
Pablo G
PG
del Corro
David J
DJ
Bishop