In-situ and elementally resolved determination of the thickness uniformity of multi-ply films by confocal micro XRF.
Confocal micro X-ray fluorescence (CM-XRF) with quasi-monochromatic excitation based on polycapillary X-ray optics was used to measure the thickness of multi-ply films. The relative errors of measuring an Fe film with a thickness of 16.3 μm and a Cu film with a thickness of 24.5 μm were 7.3% and 0.4%, respectively. The non-destructive and in-situ measurement of the thickness and uniformity of multi-ply films of Cu, Fe and Ni on a silicon surface was performed. CM-XRF was convenient in in-situ and elementally resolved analysis of the thickness of multi-ply films without a cumbersome theoretical correction model.
The Key Laboratory of Beam Technology and Materials Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China; College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China; Beijing Radiation Center, Beijing 100875, China.
Song
S
Peng
The Key Laboratory of Beam Technology and Materials Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China; College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China; Beijing Radiation Center, Beijing 100875, China.
Zhiguo
Z
Liu
The Key Laboratory of Beam Technology and Materials Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China; College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China; Beijing Radiation Center, Beijing 100875, China. Electronic address: stx@bnu.edu.cn.
Tianxi
T
Sun
The Key Laboratory of Beam Technology and Materials Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China; College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China; Beijing Radiation Center, Beijing 100875, China.
Guangfu
G
Wang
Center for Disease Control and Prevention of Beijing, Beijing 100013, China.
Yongzhong
Y
Ma
The Key Laboratory of Beam Technology and Materials Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China; College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China; Beijing Radiation Center, Beijing 100875, China.
Xunliang
X
Ding
Confocal micro X-ray fluorescence; In-situ and elementally resolved measurement of the thickness of multi-ply films; Polycapillary X-ray optics