Broadband antireflection and light extraction enhancement in fluorescent SiC with nanodome structures.
We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.
DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.
Yiyu
Y
Ou
DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.
Xiaolong
X
Zhu
Department of Physics, Chemistry and Biology, Linköping University, SE-58183 Linköping, Sweden.
Valdas
V
Jokubavicius
Department of Physics, Chemistry and Biology, Linköping University, SE-58183 Linköping, Sweden.
Rositza
R
Yakimova
DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.
N Asger
NA
Mortensen
Department of Physics, Chemistry and Biology, Linköping University, SE-58183 Linköping, Sweden.
Mikael
M
Syväjärvi
DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.
Sanshui
S
Xiao
DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.
Haiyan
H
Ou