title: Ultrasmooth metallic foils for growth of high quality graphene by chemical vapor deposition.
abstract: Synthesis of graphene by chemical vapor deposition is a promising route for manufacturing large-scale high-quality graphene for electronic applications. The quality of the employed substrates plays a crucial role, since the surface roughness and defects alter the graphene growth and cause difficulties in the subsequent graphene transfer. Here, we report on ultrasmooth high-purity copper foils prepared by sputter deposition of Cu thin film on a SiO2/Si template, and the subsequent peeling off of the metallic layer from the template. The surface displays a low level of oxidation and contamination, and the roughness of the foil surface is generally defined by the template, and was below 0.6 nm even on a large scale. The roughness and grain size increase occurred during both the annealing of the foils, and catalytic growth of graphene from methane (≈1000 °C), but on the large scale still remained far below the roughness typical for commercial foils. The micro-Raman spectroscopy and transport measurements proved the high quality of graphene grown on such foils, and the room temperature mobility of the graphene grown on the template stripped foil was three times higher compared to that of one grown on the commercial copper foil. The presented high-quality copper foils are expected to provide large-area substrates for the production of graphene suitable for electronic applications.
authors.affiliation: CEITEC-Central European Institute of Technology, Brno University of Technology, Technická 3058/10, 616 00 Brno, Czech Republic. Institute of Physical Engineering, Brno University of Technology, Technická 2896/2, 616 69 Brno, Czech Republic.
authors.forename: Pavel
authors.initials: P
authors.lastname: Procházka
authors.forename: Jindřich
authors.initials: J
authors.lastname: Mach
authors.forename: Dominik
authors.initials: D
authors.lastname: Bischoff
authors.forename: Zuzana
authors.initials: Z
authors.lastname: Lišková
authors.forename: Petr
authors.initials: P
authors.lastname: Dvořák
authors.forename: Marek
authors.initials: M
authors.lastname: Vaňatka
authors.forename: Pauline
authors.initials: P
authors.lastname: Simonet
authors.forename: Anastasia
authors.initials: A
authors.lastname: Varlet
authors.forename: Dušan
authors.initials: D
authors.lastname: Hemzal
authors.forename: Martin
authors.initials: M
authors.lastname: Petrenec
authors.forename: Lukáš
authors.initials: L
authors.lastname: Kalina
authors.forename: Miroslav
authors.initials: M
authors.lastname: Bartošík
authors.forename: Klaus
authors.initials: K
authors.lastname: Ensslin
authors.forename: Peter
authors.initials: P
authors.lastname: Varga
authors.forename: Jan
authors.initials: J
authors.lastname: Čechal
authors.forename: Tomáš
authors.initials: T
authors.lastname: Šikola