title: Surface scattering mechanisms of tantalum nitride thin film resistor.
abstract: In this letter, we utilize an electrical analysis method to develop a TaN thin film resistor with a stricter spec and near-zero temperature coefficient of resistance (TCR) for car-used electronic applications. Simultaneously, we also propose a physical mechanism mode to explain the origin of near-zero TCR for the TaN thin film resistor (TFR). Through current fitting, the carrier conduction mechanism of the TaN TFR changes from hopping to surface scattering and finally to ohmic conduction for different TaN TFRs with different TaN microstructures. Experimental data of current-voltage measurement under successive increasing temperature confirm the conduction mechanism transition. A model of TaN grain boundary isolation ability is eventually proposed to influence the carrier transport in the TaN thin film resistor, which causes different current conduction mechanisms.
authors.affiliation: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Huey-Ru
authors.initials: HR
authors.lastname: Chen
authors.affiliation: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Ying-Chung
authors.initials: YC
authors.lastname: Chen
authors.affiliation: Department of Physics, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Ting-Chang
authors.initials: TC
authors.lastname: Chang
authors.affiliation: Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Kuan-Chang
authors.initials: KC
authors.lastname: Chang
authors.affiliation: Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Tsung-Ming
authors.initials: TM
authors.lastname: Tsai
authors.affiliation: Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Tian-Jian
authors.initials: TJ
authors.lastname: Chu
authors.affiliation: Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
authors.forename: Chih-Cheng
authors.initials: CC
authors.lastname: Shih
authors.affiliation: R&D Department, Walsin Technology Co, Kaohsiung 806, Taiwan.
authors.forename: Nai-Chuan
authors.initials: NC
authors.lastname: Chuang
authors.affiliation: R&D Department, Walsin Technology Co, Kaohsiung 806, Taiwan.
authors.forename: Kao-Yuan
authors.initials: KY
authors.lastname: Wang
keywords: Surface scattering; TaN; Temperature coefficient of resistance; Thin film resistor
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