title: Tandem array of nanoelectronic readers embedded coplanar to a fluidic nanochannel for correlated single biopolymer analysis.
abstract: We have developed a two-step electron-beam lithography process to fabricate a tandem array of three pairs of tip-like gold nanoelectronic detectors with electrode gap size as small as 9 nm, embedded in a coplanar fashion to 60 nm deep, 100 nm wide, and up to 150 μm long nanochannels coupled to a world-micro-nanofluidic interface for easy sample introduction. Experimental tests with a sealed device using DNA-protein complexes demonstrate the coplanarity of the nanoelectrodes to the nanochannel surface. Further, this device could improve transverse current detection by correlated time-of-flight measurements of translocating samples, and serve as an autocalibrated velocimeter and nanoscale tandem Coulter counters for single molecule analysis of heterogeneous samples.
authors.affiliation: Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 11529, Taiwan ; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan ; Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Leonardo
authors.initials: L
authors.lastname: Lesser-Rojas
authors.affiliation: Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 11529, Taiwan ; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan ; Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: K K
authors.initials: KK
authors.lastname: Sriram
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Kuo-Tang
authors.initials: KT
authors.lastname: Liao
authors.affiliation: AS Nano Core Facility, Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Shui-Chin
authors.initials: SC
authors.lastname: Lai
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan ; AS Nano Core Facility, Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Pai-Chia
authors.initials: PC
authors.lastname: Kuo
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Ming-Lee
authors.initials: ML
authors.lastname: Chu
authors.affiliation: Institute of Physics, Academia Sinica, Taipei 11529, Taiwan ; Research Centre for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan ; Genomics Research Centre, Academia Sinica, Taipei 11529, Taiwan.
authors.forename: Chia-Fu
authors.initials: CF
authors.lastname: Chou
references.citation: Nanotechnology. 2009 Mar 11;20(10):105302
references.pmid: 19417517
references.citation: Sci Rep. 2012;2:394
references.pmid: 22558512
references.citation: Nano Lett. 2011 Jan 12;11(1):279-85
references.pmid: 21133389
references.citation: Biomicrofluidics. 2013 Mar;7(2):26501
references.pmid: 23573176
references.citation: Sci Rep. 2011;1:46
references.pmid: 22355565
references.citation: Phys Rev Lett. 2008 Sep 5;101(10):108303
references.pmid: 18851263
references.citation: Nature. 1989 Aug 31;340(6236):730-2
references.pmid: 2671751
references.citation: Proc Natl Acad Sci U S A. 1996 Nov 26;93(24):13770-3
references.pmid: 8943010
references.citation: Biomicrofluidics. 2013 Nov 21;7(6):64105
references.pmid: 24396539
references.citation: Lab Chip. 2007 Sep;7(9):1198-201
references.pmid: 17713620
references.citation: Nat Biotechnol. 2008 Oct;26(10):1146-53
references.pmid: 18846088
references.citation: Nature. 2010 Mar 4;464(7285):45-53
references.pmid: 20203602
references.citation: Nature. 2003 Oct 16;425(6959):698-701
references.pmid: 14562098
references.citation: Biomicrofluidics. 2012 Mar;6(1):12806-1280614
references.pmid: 22481998
references.citation: Lab Chip. 2011 May 21;11(10):1721-9
references.pmid: 21431167
references.citation: Nat Nanotechnol. 2011 Sep 18;6(10):615-24
references.pmid: 21926981
references.citation: Nano Lett. 2007 Sep;7(9):2774-7
references.pmid: 17696560
references.citation: J Am Chem Soc. 2012 May 30;134(21):8742-5
references.pmid: 22594700
references.citation: Nano Lett. 2006 Apr;6(4):779-82
references.pmid: 16608283
references.citation: Biomicrofluidics. 2010 Jun 29;4(2):
references.pmid: 20697589
references.citation: Biomicrofluidics. 2012 Mar;6(1):12819-1281911
references.pmid: 22662086
references.citation: Biophys J. 2008 Jul;95(1):273-86
references.pmid: 18339746
references.citation: Biomicrofluidics. 2010 Jun 15;4(2):
references.pmid: 20697574
references.citation: Biophys J. 2006 Jun 15;90(12):4538-45
references.pmid: 16732056
references.citation: Nano Lett. 2008 May;8(5):1472-6
references.pmid: 18416580
references.citation: Biomicrofluidics. 2011 Sep;5(3):34106-341068
references.pmid: 21869910
references.citation: Sens Actuators B Chem. 2008 Jun 16;132(2):593-600
references.pmid: 19584949
references.citation: Nat Nanotechnol. 2006 Dec;1(3):173-81
references.pmid: 18654182
references.citation: Nano Lett. 2012 Mar 14;12(3):1597-602
references.pmid: 22329347
references.citation: Proc Natl Acad Sci U S A. 2004 Jul 27;101(30):10979-83
references.pmid: 15252203
references.citation: Nano Lett. 2005 Mar;5(3):421-4
references.pmid: 15755087
references.citation: Biomicrofluidics. 2009 Aug 18;3(3):31101
references.pmid: 20216956
references.citation: Nano Lett. 2009 Apr;9(4):1659-62
references.pmid: 19256477
references.citation: Phys Rev Lett. 2001 Feb 12;86(7):1378-81
references.pmid: 11178088