title: Nanoscale control designs for systems.
abstract: Nanoscale control is the science of the control of objects at dimensions with 100 nm or less and the manipulation of them at this level of precision. The desired attributes of systems under nanoscale control design are extreme high resolution, accuracy, stability, and fast response. An important perspective of investigation in nanoscale control design includes system modeling and precision control devices and materials at a nanoscale dimension, i.e., design of nanopositioners. Nanopositioners are mechatronic systems with an ultraprecise resolution down to a fraction of an atomic diameter and developed to move objects over a small range in nanoscale dimension. After reviewing a lot of existing literatures for nanoscale control designs, the way to successful nanoscale control is accurate position sensing and feedback control of the motion. An overview of nanoscale identification, linear, and nonlinear control technologies, and devices that are playing a key role in improving precision, accuracy, and response of operation of these systems are introduced in this research.
authors.forename: Yung-Yue
authors.initials: YY
authors.lastname: Chen
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005246:Feedback; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*