title: A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance.
abstract: A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Markus
authors.initials: M
authors.lastname: Kubicek
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Gerald
authors.initials: G
authors.lastname: Holzlechner
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Alexander K
authors.initials: AK
authors.lastname: Opitz
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Silvia
authors.initials: S
authors.lastname: Larisegger
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Herbert
authors.initials: H
authors.lastname: Hutter
authors.affiliation: Institute of Chemical Technologies and Analytics, Vienna University of Technology, Getreidemarkt 9, A-1060 Vienna, Austria.
authors.forename: Jürgen
authors.initials: J
authors.lastname: Fleig
keywords: Lateral resolution; Oxygen isotope analysis; ToF-SIMS
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