title: All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications.
abstract: An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 °C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.
authors.affiliation: Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576. elelc@nus.edu.sg.
authors.forename: You
authors.initials: Y
authors.lastname: Qian
authors.forename: Bo Woon
authors.initials: BW
authors.lastname: Soon
authors.forename: Pushpapraj
authors.initials: P
authors.lastname: Singh
authors.forename: Humberto
authors.initials: H
authors.lastname: Campanella
authors.forename: Chengkuo
authors.initials: C
authors.lastname: Lee