title: A novel side electrode configuration integrated in fused silica microsystems for synchronous optical and electrical spectroscopy.
abstract: We present a novel electrode configuration consisting of coplanar side electrode pairs integrated at the half height of the microchannels for the creation of a homogeneous electric field distribution as well as for synchronous optical and electrical measurements. For the integration of such electrodes in fused silica microsystems, a dedicated microfabrication method was utilized, whereby an intermediate bonding layer was applied to lower the temperature for fusion bonding to avoid thereby metal degradation and subsequently to preserve the electrode structures. Finally, we demonstrate the applicability of our devices with integrated electrodes for single cell electrical lysis and simultaneous fluorescence and impedance measurements for both cell counting and characterization.
authors.affiliation: BIOS - Lab on a Chip group, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands. s.sukas@utwente.nl.
authors.forename: Sertan
authors.initials: S
authors.lastname: Sukas
authors.forename: Erik
authors.initials: E
authors.lastname: Schreuder
authors.forename: Bjorn
authors.initials: B
authors.lastname: de Wagenaar
authors.forename: Joost
authors.initials: J
authors.lastname: Swennenhuis
authors.forename: Albert
authors.initials: A
authors.lastname: van den Berg
authors.forename: Leon
authors.initials: L
authors.lastname: Terstappen
authors.forename: Séverine
authors.initials: S
authors.lastname: Le Gac
mesh_terms: D058266:Dielectric Spectroscopy / Q000295:instrumentation / Q000379:methods; D004566:Electrodes; D018922:HL-60 Cells; D006801:Humans; D012822:Silicon Dioxide; D013050:Spectrometry, Fluorescence
chemical_list: D012822:Silicon Dioxide