title: 3D nanostructure reconstruction based on the SEM imaging principle, and applications.
abstract: This paper addresses a novel 3D reconstruction method for nanostructures based on the scanning electron microscopy (SEM) imaging principle. In this method, the shape from shading (SFS) technique is employed, to analyze the gray-scale information of a single top-view SEM image which contains all the visible surface information, and finally to reconstruct the 3D surface morphology. It offers not only unobstructed observation from various angles but also the exact physical dimensions of nanostructures. A convenient and commercially available tool (NanoViewer) is developed based on this method for nanostructure analysis and characterization of properties. The reconstruction result coincides well with the SEM nanostructure image and is verified in different ways. With the extracted structure information, subsequent research of the nanostructure can be carried out, such as roughness analysis, optimizing properties by structure improvement and performance simulation with a reconstruction model. Efficient, practical and non-destructive, the method will become a powerful tool for nanostructure surface observation and characterization.
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, People's Republic of China.
authors.forename: Fu-Yun
authors.initials: FY
authors.lastname: Zhu
authors.forename: Qi-Qi
authors.initials: QQ
authors.lastname: Wang
authors.forename: Xiao-Sheng
authors.initials: XS
authors.lastname: Zhang
authors.forename: Wei
authors.initials: W
authors.lastname: Hu
authors.forename: Xin
authors.initials: X
authors.lastname: Zhao
authors.forename: Hai-Xia
authors.initials: HX
authors.lastname: Zhang
mesh_terms: D006801:Humans; D021621:Imaging, Three-Dimensional / Q000379:methods*; D008855:Microscopy, Electron, Scanning / Q000379:methods*; D008962:Models, Theoretical; D049329:Nanostructures; D012825:Silicon
chemical_list: D012825:Silicon