title: Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.
abstract: The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.
authors.forename: Shaoming
authors.initials: S
authors.lastname: Yang
authors.forename: Xiuqin
authors.initials: X
authors.lastname: Chen
authors.forename: Kazuo
authors.initials: K
authors.lastname: Yamamoto
authors.forename: Masanori
authors.initials: M
authors.lastname: Iitake
authors.forename: D
authors.initials: D
authors.lastname: Nishio-Hamane
authors.forename: Hideki
authors.initials: H
authors.lastname: Sakai
authors.forename: Masahiko
authors.initials: M
authors.lastname: Abe
mesh_terms: D002516:Ceramics / Q000737:chemistry*; D055119:Elastic Modulus; D004553:Electric Conductivity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008968:Molecular Conformation; D036103:Nanotechnology / Q000295:instrumentation*; D010316:Particle Size; D013314:Stress, Mechanical; D013499:Surface Properties; D013718:Tensile Strength; D014025:Titanium / Q000737:chemistry*
chemical_list: C041500:titanium nitride; D014025:Titanium