Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer.
The roll angle measurement is difficult to be achieved directly using a typical commercial interferometer due to its low sensitivity in axial direction, where the axial direction is orthogonal to the plane of the roll angular displacement. A roll angle measurement method combined diffraction gratings with a laser heterodyne interferometer is discussed in this paper. The diffraction grating placed in the plane of a roll angular displacement and the interferometer arranged in the plane's orthogonal direction, constitute the measurement pattern for the roll angle with high resolution. The roll angular displacement, considered as the linear, can be tested precisely when the corresponding angle is very small. Using the proposed method, the angle roll measurement obtains the high resolution of 0.002″. Experiment has proved its feasibility and practicability.
Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China.
Shanzhi
S
Tang
School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Zhao
Z
Wang
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China.
Jianmin
J
Gao
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China.
Junjie
J
Guo