Note: error elimination for ellipsometry by laser feedback instrument.
Ellipsometry has in recent decades been used in measuring optical phase retardation. Known for its high resolution but uncertain accuracy, we analyze the systematic error involved with this technique and give error values regarding phase retardation measurements. We developed a laser-feedback assembly to measure phase retardation to a higher resolution and accuracy compared with that from ellipsometry. We eliminated the systematic error associated with ellipsometry using results obtained with this assembly and improved measurement accuracies for ellipsometry to about 0.2°. Such high-precision ellipsometry would greatly improve the manufacturing of wave plates.
Department of Opto-electronic Engineering, College of Opto-electronic Science and Engineering, National University of Defense Technology, Changsha 410073, China.
Wenxue
W
Chen
The State Key Lab of Precision Measurement Technology and Instrument, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
Shulian
S
Zhang
Department of Opto-electronic Engineering, College of Opto-electronic Science and Engineering, National University of Defense Technology, Changsha 410073, China.
Xingwu
X
Long
Department of Opto-electronic Engineering, College of Opto-electronic Science and Engineering, National University of Defense Technology, Changsha 410073, China.
Zhibin
Z
Ni
Department of Opto-electronic Engineering, College of Opto-electronic Science and Engineering, National University of Defense Technology, Changsha 410073, China.
Biwu
B
Yang