Range-based control of dual-stage nanopositioning systems.
A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation. The proposed control approach addresses the issue that some precision positioning trajectories are not achievable through existing control schemes. Specifically, short-range, low-speed inputs are typically diverted to the long-range actuator, which coincidentally has lower positioning resolution. This approach then limits the dual-stage nanopositioner's ability to achieve the required positioning resolution that is needed in applications where range and frequency are not inversely correlated (which is a typical, but not always the correct assumption for dual stage systems). The proposed range-based control approach is proposed to overcome the limitations of existing control methods. Experimental results show that the proposed control strategy is effective.
Department of Mechanical Engineering, Villanova University, Villanova, Pennsylvania 19085, USA.
Garrett M
GM
Clayton
Department of Mechanical Engineering, University of Nevada-Reno, Reno, Nevada 89557-0312, USA.
Christopher J
CJ
Dudley
Department of Mechanical Engineering, University of Nevada-Reno, Reno, Nevada 89557-0312, USA.
Kam K
KK
Leang