title: Partially fluorinated oxo-alkoxide tungsten(VI) complexes as precursors for deposition of WOx nanomaterials.
abstract: The partially fluorinated oxo-alkoxide tungsten(VI) complexes WO(OR)4 [4; R = C(CH3)2CF3, 5; R = C(CH3)(CF3)2] have been synthesized as precursors for chemical vapour deposition (CVD) of WOx nanocrystalline material. Complexes 4 and 5 were prepared by salt metathesis between sodium salts of the fluoroalkoxides and WOCl4. Crystallographic structure analysis allows comparison of the bonding in 4 and 5 as the fluorine content of the fluoroalkoxide ligands is varied. Screening of as a CVD precursor by mass spectrometry and thermogravimetric analysis was followed by deposition of WOx nanorods.
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA. lmwhite@chem.ufl.edu.
authors.forename: Richard O
authors.initials: RO
authors.lastname: Bonsu
authors.forename: Hankook
authors.initials: H
authors.lastname: Kim
authors.forename: Christopher
authors.initials: C
authors.lastname: O'Donohue
authors.forename: Roman Y
authors.initials: RY
authors.lastname: Korotkov
authors.forename: K Randall
authors.initials: KR
authors.lastname: McClain
authors.forename: Khalil A
authors.initials: KA
authors.lastname: Abboud
authors.forename: Ashley A
authors.initials: AA
authors.lastname: Ellsworth
authors.forename: Amy V
authors.initials: AV
authors.lastname: Walker
authors.forename: Timothy J
authors.initials: TJ
authors.lastname: Anderson
authors.forename: Lisa
authors.initials: L
authors.lastname: McElwee-White