title: An inverted cylindrical sputter magnetron as metal vapor supply for electron cyclotron resonance ion sources.
abstract: An inverted cylindrical sputter magnetron device has been developed. The magnetron is acting as a metal vapor supply for an electron cyclotron resonance (ECR) ion source. FEM simulation of magnetic flux density was used to ensure that there is no critical interaction between both magnetic fields of magnetron and ECR ion source. Spatially resolved double Langmuir probe and optical emission spectroscopy measurements show an increase in electron density by one order of magnitude from 1 × 10(10) cm(-3) to 1 × 10(11) cm(-3), when the magnetron plasma is exposed to the magnetic mirror field of the ECR ion source. Electron density enhancement is also indicated by magnetron plasma emission photography with a CCD camera. Furthermore, photographs visualize the formation of a localized loss-cone - area, when the magnetron is operated at magnetic mirror field conditions. The inverted cylindrical magnetron supplies a metal atom load rate of R > 1 × 10(18) atoms/s for aluminum, which meets the demand for the production of a milliampere Al(+) ion beam.
authors.affiliation: Fraunhofer Institute for Electron Beam and Plasma Technology, 01277 Dresden, Germany.
authors.forename: T
authors.initials: T
authors.lastname: Weichsel
authors.affiliation: Fraunhofer Institute for Electron Beam and Plasma Technology, 01277 Dresden, Germany.
authors.forename: U
authors.initials: U
authors.lastname: Hartung
authors.affiliation: Fraunhofer Institute for Electron Beam and Plasma Technology, 01277 Dresden, Germany.
authors.forename: T
authors.initials: T
authors.lastname: Kopte
authors.affiliation: Institute of Solid State Physics, Dresden University of Technology, 01062 Dresden, Germany and Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Dresden, Germany.
authors.forename: G
authors.initials: G
authors.lastname: Zschornack
authors.affiliation: DREEBIT GmbH, 01900 Grossroehrsdorf, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Kreller
authors.affiliation: DREEBIT GmbH, 01900 Grossroehrsdorf, Germany.
authors.forename: A
authors.initials: A
authors.lastname: Silze