title: A compact microelectrode array chip with multiple measuring sites for electrochemical applications.
abstract: In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. maria.dimaki@nanotech.dtu.dk.
authors.forename: Maria
authors.initials: M
authors.lastname: Dimaki
authors.affiliation: Dipartimento di Elettronica e Informazione, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy. Marco.Vergani@flextronics.com.
authors.forename: Marco
authors.initials: M
authors.lastname: Vergani
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. arto.heiskanen@nanotech.dtu.dk.
authors.forename: Arto
authors.initials: A
authors.lastname: Heiskanen
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. dorota.kwasny@nanotech.dtu.dk.
authors.forename: Dorota
authors.initials: D
authors.lastname: Kwasny
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. luigi.sasso@canterbury.ac.nz.
authors.forename: Luigi
authors.initials: L
authors.lastname: Sasso
authors.affiliation: Dipartimento di Elettronica e Informazione, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy. marco.carminati@polimi.it.
authors.forename: Marco
authors.initials: M
authors.lastname: Carminati
authors.affiliation: The MacDiarmid Institute for Advanced Materials and Nanotechnology, Biomolecular Interaction Centre, School of Biological Sciences, University of Canterbury, Private Bag 4800, Christchurch 8140, New Zealand. juliet.gerrard@canterbury.ac.nz.
authors.forename: Juliet A
authors.initials: JA
authors.lastname: Gerrard
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. jenny.emneus@nanotech.dtu.dk.
authors.forename: Jenny
authors.initials: J
authors.lastname: Emneus
authors.affiliation: DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark. winnie.svendsen@nanotech.dtu.dk.
authors.forename: Winnie E
authors.initials: WE
authors.lastname: Svendsen
mesh_terms: D055664:Electrochemical Techniques / Q000295:instrumentation*; D004867:Equipment Design; D008839:Microelectrodes; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D018625:Microscopy, Atomic Force