title: A low-power integrated humidity CMOS sensor by printing-on-chip technology.
abstract: A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene)/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 μm CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity sensing of the implemented printing-on-chip sensor system is experimentally tested. The sensor shows a sensitivity of 0.98% to humidity in the atmosphere. The maximum dynamic range of the readout circuit is 9.8 MΩ, which can be further tuned by the frequency of input signal to fit the requirement of the resistance of printed sensor. The power consumption keeps only 154 μW. This printing-on-chip sensor provides a practical solution to fulfill an ultra-small integrated sensor for the applications in miniaturized sensing systems.
authors.affiliation: Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan. d98943030@ntu.edu.tw.
authors.forename: Chang-Hung
authors.initials: CH
authors.lastname: Lee
authors.affiliation: Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan. muki1428@gmail.com.
authors.forename: Wen-Yu
authors.initials: WY
authors.lastname: Chuang
authors.affiliation: Intel Lab, Hillsboro, OR 97124, USA. melissa.a.cowan@intel.com.
authors.forename: Melissa A
authors.initials: MA
authors.lastname: Cowan
authors.affiliation: Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan. wjwu@ntumems.net.
authors.forename: Wen-Jung
authors.initials: WJ
authors.lastname: Wu
authors.affiliation: Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan. timlin@ntu.edu.tw.
authors.forename: Chih-Ting
authors.initials: CT
authors.lastname: Lin
mesh_terms: D001272:Atmosphere / Q000032:analysis* / Q000737:chemistry*; D011211:Electric Power Supplies; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006813:Humidity; D054802:Molecular Imprinting / Q000295:instrumentation* / Q000379:methods; D012666:Semiconductors; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D018511:Systems Integration; D014159:Transducers; D014867:Water / Q000032:analysis*
chemical_list: D014867:Water