title: Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE.
abstract: In x Al1-x N films were deposited on Si(100) substrate using metal-organic molecular beam epitaxy. We investigated the effect of the trimethylindium/trimethylaluminum (TMIn/TMAl) flow ratios on the structural, morphological, and optical properties of In x Al1-x N films. Surface morphologies and microstructure of the In x Al1-x N films were measured by atomic force microscopy, scanning electron microscopy, X-ray diffraction (XRD), and transmission electron microscopy (TEM), respectively. Optical properties of all films were evaluated using an ultraviolet/visible/infrared (UV/Vis/IR) reflection spectrophotometer. XRD and TEM results indicated that In x Al1-x N films were preferentially oriented in the c-axis direction. Besides, the growth rates of In x Al1-x N films were measured at around 0.6 μm/h in average. Reflection spectrum shows that the optical absorption of the In x Al1-x N films redshifts with an increase in the In composition.
authors.affiliation: Instrument Technology Research Center, National Applied Research Laboratories, 20 R&D Rd. VI, Hsinchu Science Park, Hsinchu 30076, Taiwan.
authors.forename: Wei-Chun
authors.initials: WC
authors.lastname: Chen
authors.affiliation: Department of Materials Science and Engineering, National Chiao Tung University, 1001, Tahsueh Road, Hsinchu 30010, Taiwan.
authors.forename: Yue-Han
authors.initials: YH
authors.lastname: Wu
authors.affiliation: Department of Materials Science and Engineering, National Chiao Tung University, 1001, Tahsueh Road, Hsinchu 30010, Taiwan.
authors.forename: Chun-Yen
authors.initials: CY
authors.lastname: Peng
authors.affiliation: Instrument Technology Research Center, National Applied Research Laboratories, 20 R&D Rd. VI, Hsinchu Science Park, Hsinchu 30076, Taiwan.
authors.forename: Chien-Nan
authors.initials: CN
authors.lastname: Hsiao
authors.affiliation: Department of Materials Science and Engineering, National Chiao Tung University, 1001, Tahsueh Road, Hsinchu 30010, Taiwan.
authors.forename: Li
authors.initials: L
authors.lastname: Chang
keywords: In/Al ratios; InAlN; RF-MOMBE