title: Nanolithography based on metalized DNA templates for graphene patterning.
abstract: DNA self-assembly, such as DNA origami and single-stranded tile (SST) assembly, can create complex nanostructures with prescribed two-dimensional (2-D) and three-dimensional (3-D) shapes. Distinct patterned DNA nanostructures can be used as templates or shadow masks for the lithographic patterning of 2-D thin-film materials for nanodevices. The protocols in this article describe a general procedure of metalized DNA nanolithography based upon DNA metalization and subsequent etching to transfer the shape information from DNA templates to graphene, such that the shape of complex graphene nanostructures can be rationally programmed. Spatial information within the predesigned DNA patterns, such as width, orientation, curvature, and angles, can be successfully transferred to the graphene nanostructures with sub-10 nm resolution. This method could be further generalized to enable patterning of nano-sized modules of graphene and other 2-D electronic materials with predesigned shapes for complex electronic and quantum circuits.
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts.
authors.forename: Zhong
authors.initials: Z
authors.lastname: Jin
authors.affiliation: Wyss Institute for Biologically Inspired Engineering, Harvard University, Boston, Massachusetts.|Department of Systems Biology, Harvard Medical School, Boston, Massachusetts.
authors.forename: Wei
authors.initials: W
authors.lastname: Sun
authors.affiliation: Wyss Institute for Biologically Inspired Engineering, Harvard University, Boston, Massachusetts.|Department of Systems Biology, Harvard Medical School, Boston, Massachusetts.
authors.forename: Peng
authors.initials: P
authors.lastname: Yin
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts.
authors.forename: Michael S
authors.initials: MS
authors.lastname: Strano
mesh_terms: D004247:DNA / Q000737:chemistry*; D006046:Gold / Q000737:chemistry; D006108:Graphite / Q000737:chemistry*; D007202:Indicators and Reagents; D008670:Metals / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D009690:Nucleic Acid Conformation; D013698:Templates, Genetic
chemical_list: D007202:Indicators and Reagents; D008670:Metals; D006046:Gold; D006108:Graphite; D004247:DNA
keywords: DNA metalization; DNA self-assembly; graphene nanostructure patterning; masked etching; templated nanolithography