title: Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence.
abstract: We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.
authors.affiliation: Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853.
authors.forename: John M
authors.initials: JM
authors.lastname: Gregoire
authors.affiliation: Cornell High Energy Synchrotron Source, Cornell University, Ithaca, New York 14853.
authors.forename: Darren
authors.initials: D
authors.lastname: Dale
authors.affiliation: Cornell High Energy Synchrotron Source, Cornell University, Ithaca, New York 14853.
authors.forename: Alexander
authors.initials: A
authors.lastname: Kazimirov
authors.affiliation: Department of Chemistry and Chemical Biology, Cornell University, Ithaca, New York 14853.
authors.forename: Francis J
authors.initials: FJ
authors.lastname: DiSalvo
authors.affiliation: Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853.
authors.forename: R
authors.initials: R
authors.lastname: Bruce van Dover