title: Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography.
abstract: We demonstrate the use of optical coherence tomography (OCT) as a non-destructive diagnostic tool for evaluating laser-processing performance by imaging the features of a pit and a rim. A pit formed on a material at different laser-processing conditions is imaged using both a conventional scanning electron microscope (SEM) and OCT. Then using corresponding images, the geometrical characteristics of the pit are analyzed and compared. From the results, we could verify the feasibility and the potential of the application of OCT to the monitoring of the laser-processing performance.
authors.affiliation: Laser Imaging Laboratory and Department of Physics, Chosun University, 375 Seosuk-dong, Dong-gu, Gwangju 501-759, Republic of Korea.
authors.forename: Youngseop
authors.initials: Y
authors.lastname: Kim
authors.affiliation: Laser Imaging Laboratory and Department of Physics, Chosun University, 375 Seosuk-dong, Dong-gu, Gwangju 501-759, Republic of Korea.
authors.forename: Eun Seo
authors.initials: ES
authors.lastname: Choi
authors.affiliation: Laser Imaging Laboratory and Department of Physics, Chosun University, 375 Seosuk-dong, Dong-gu, Gwangju 501-759, Republic of Korea.
authors.forename: Wooseop
authors.initials: W
authors.lastname: Kwak
authors.affiliation: Laser Imaging Laboratory and Department of Physics, Chosun University, 375 Seosuk-dong, Dong-gu, Gwangju 501-759, Republic of Korea.
authors.forename: Yongjin
authors.initials: Y
authors.lastname: Shin
authors.affiliation: Beckman Laser Institute and Department of Biomedical Engineering, University of California at Irvine, Irvine, CA 92612, USA.
authors.forename: Woonggyu
authors.initials: W
authors.lastname: Jung
authors.affiliation: Beckman Laser Institute and Department of Biomedical Engineering, University of California at Irvine, Irvine, CA 92612, USA.
authors.forename: Yeh-Chan
authors.initials: YC
authors.lastname: Ahn
authors.affiliation: Beckman Laser Institute and Department of Biomedical Engineering, University of California at Irvine, Irvine, CA 92612, USA.
authors.forename: Zhongping
authors.initials: Z
authors.lastname: Chen
keywords: Laser marking; Non-destructive diagnosis; Optical coherence tomography (OCT)