title: A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement.
abstract: This paper presents a simple method based on the measurement of the 3D intensity point spread function for the quality evaluation of high numerical aperture micro-optical components. The different slices of the focal volume are imaged thanks to a microscope objective and a standard camera. Depending on the optical architecture, it allows characterizing both transmissive and reflective components, for which either the imaging part or the component itself are moved along the optical axis, respectively. This method can be used to measure focal length, Strehl ratio, resolution and overall wavefront RMS and to estimate optical aberrations. The measurement setup and its implementation are detailed and its advantages are demonstrated with micro-ball lenses and micro-mirrors. This intuitive method is adapted for optimization of micro-optical components fabrication processes, especially because heavy equipments and/or data analysis are not required.
authors.forename: Maciej
authors.initials: M
authors.lastname: Baranski
authors.forename: Stephane
authors.initials: S
authors.lastname: Perrin
authors.forename: Nicolas
authors.initials: N
authors.lastname: Passilly
authors.forename: Luc
authors.initials: L
authors.lastname: Froehly
authors.forename: Jorge
authors.initials: J
authors.lastname: Albero
authors.forename: Sylwester
authors.initials: S
authors.lastname: Bargiel
authors.forename: Christophe
authors.initials: C
authors.lastname: Gorecki