title: Novel field emission SEM column with beam deceleration technology.
abstract: A novel field-emission SEM column has been developed that features Beam Deceleration Mode, high-probe current and ultra-fast scanning. New detection system in the column is introduced to detect true secondary electron signal. The resolution power at low energy was doubled for conventional SEM optics and moderately improved for immersion optics. Application examples at low landing energies include change of contrast, imaging of non-conductive samples and thin layers.
authors.affiliation: TESCAN, Libušina třída 1, 62300 Brno, Czech Republic.
authors.forename: Jaroslav
authors.initials: J
authors.lastname: Jiruše
authors.affiliation: TESCAN, Libušina třída 1, 62300 Brno, Czech Republic.
authors.forename: Miloslav
authors.initials: M
authors.lastname: Havelka
authors.affiliation: TESCAN, Libušina třída 1, 62300 Brno, Czech Republic.
authors.forename: Filip
authors.initials: F
authors.lastname: Lopour
keywords: Beam deceleration; Cathode lens mode; Low energy electrons; SEM