title: A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples.
abstract: A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The μ-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The μ-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. Measurement results for diffusivity and heat capacitance using time delay method and thermal wave analysis are presented.
authors.affiliation: Nanoscale Devices Laboratory, Marquette University, Milwaukee, Wisconsin 53233, USA.
authors.forename: Benyamin
authors.initials: B
authors.lastname: Davaji
authors.affiliation: Nanoscale Devices Laboratory, Marquette University, Milwaukee, Wisconsin 53233, USA.
authors.forename: Hye
authors.initials: H
authors.lastname: Jeong Bak
authors.affiliation: University of Wisconsin-Milwaukee, Milwaukee, Wisconsin 53211, USA.
authors.forename: Woo-Jin
authors.initials: WJ
authors.lastname: Chang
authors.affiliation: Nanoscale Devices Laboratory, Marquette University, Milwaukee, Wisconsin 53233, USA.
authors.forename: Chung
authors.initials: C
authors.lastname: Hoon Lee