title: Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications.
abstract: Focused ion beam technology is combined with chemical etching of specifically designed fibers to create Fabry-Perot interferometers. Hydrofluoric acid is used to etch special fibers and create microwires with diameters of 15 μm. These microwires are then milled with a focused ion beam to create two different structures: an indented Fabry-Perot structure and a cantilever Fabry-Perot structure that are characterized in terms of temperature. The cantilever structure is also sensitive to vibrations and is capable of measuring frequencies in the range 1 Hz - 40 kHz.
authors.forename: Ricardo M
authors.initials: RM
authors.lastname: André
authors.forename: Simon
authors.initials: S
authors.lastname: Pevec
authors.forename: Martin
authors.initials: M
authors.lastname: Becker
authors.forename: Jan
authors.initials: J
authors.lastname: Dellith
authors.forename: Manfred
authors.initials: M
authors.lastname: Rothhardt
authors.forename: Manuel B
authors.initials: MB
authors.lastname: Marques
authors.forename: Denis
authors.initials: D
authors.lastname: Donlagic
authors.forename: Hartmut
authors.initials: H
authors.lastname: Bartelt
authors.forename: Orlando
authors.initials: O
authors.lastname: Frazão