title: Cyclic olefin copolymer plasma millireactors.
abstract: The novelty of this paper lies in the development of a multistep process for the manufacturing of plasma millireactors operating at atmospheric pressure. The fabrication process relies on the integration of metallic electrodes over a cyclic olefin copolymer chip by a combination of photopatterning and sputtering. The developed plasma millireactors were successfully tested by creating air discharges in the gas volume of the millichannel. A sputtered silica layer was deposited on the channel walls to provide a barrier between the plasma and the polymer in order to prevent the alteration of polymer surfaces during the plasma treatment. Interest in this process of employing plasma millireactor as a high reactive environment is demonstrated here by the degradation of a volatile organic compound (acetaldehyde) in ambient air. In this miniaturized device, we obtained a high acetaldehyde conversion (98%) for a specific input energy lower than 200 J L(-1).
authors: Institut de Recherche de Chimie Paris, CNRS - Chimie ParisTech, 11 rue Pierre et Marie Curie, 75005 Paris, France. michael.tatoulian@chimie-paristech.fr.
authors: G
authors: G
authors: Schelcher
authors: C
authors: C
authors: Guyon
authors: S
authors: S
authors: Ognier
authors: S
authors: S
authors: Cavadias
authors: E
authors: E
authors: Martinez
authors: V
authors: V
authors: Taniga
authors: L
authors: L
authors: Malaquin
authors: P
authors: P
authors: Tabeling
authors: M
authors: M
authors: Tatoulian