title: Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement.
abstract: We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of ∼320  nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry-Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of ∼1036  pm/MPa at 1550 nm and a low temperature cross-sensitivity of ∼960  Pa/°C are achieved when a silica diaphragm of ∼500  nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.
authors: Changrui
authors: C
authors: Liao
authors: Shen
authors: S
authors: Liu
authors: Lei
authors: L
authors: Xu
authors: Chao
authors: C
authors: Wang
authors: Yiping
authors: Y
authors: Wang
authors: Zhengyong
authors: Z
authors: Li
authors: Qiao
authors: Q
authors: Wang
authors: D N
authors: DN
authors: Wang
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D005336:Fiber Optic Technology / Q000295:instrumentation*; D007368:Interferometry / Q000295:instrumentation*; D008365:Manometry / Q000295:instrumentation*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D012822:Silicon Dioxide / Q000737:chemistry*
chemical_list: D012822:Silicon Dioxide