title: Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits.
abstract: An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change.
authors: Chia-Ling
authors: CL
authors: Wei
authors: Yu-Chen
authors: YC
authors: Lin
authors: Tse-An
authors: TA
authors: Chen
authors: Ren-Yi
authors: RY
authors: Lin
authors: Tin-Hao
authors: TH
authors: Liu
mesh_terms: D004867:Equipment Design; D006801:Humans; D055617:Micro-Electrical-Mechanical Systems; D018670:Monitoring, Ambulatory / Q000295:instrumentation*; D012119:Respiration; D059629:Signal-To-Noise Ratio; D013696:Temperature