title: Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining.
abstract: We report on fabrication of a microtoroid resonator of a high-quality factor (i.e., Q-factor of ~3.24 × 10(6) measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21 × 10(5) as measured in air, which should still be sufficient for many sensing applications. We test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. It is shown that a detection limit of ~1.2 × 10(-4) refractive index unit can be achieved. Our result showcases the capability of integration of high-Q microresonators with complex microfluidic systems using femtosecond laser 3D micromachining.
authors: Jiangxin
authors: J
authors: Song
authors: Jintian
authors: J
authors: Lin
authors: Jialei
authors: J
authors: Tang
authors: Yang
authors: Y
authors: Liao
authors: Fei
authors: F
authors: He
authors: Zhaohui
authors: Z
authors: Wang
authors: Lingling
authors: L
authors: Qiao
authors: Koji
authors: K
authors: Sugioka
authors: Ya
authors: Y
authors: Cheng