title: Enhanced quantification for 3D energy dispersive spectrometry: going beyond the limitation of large volume of X-ray emission.
abstract: This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.
authors: 1Department of Materials Science and Metallurgy,University of Cambridge,Charles Babbage Road 27,Cambridge CB3 0FS,Cambridgeshire,UK.
authors: Pierre
authors: P
authors: Burdet
authors: 2Centre Interdisciplinaire de Microscopie Electronique,Ecole Polytechnique Fédérale de Lausanne (EPFL),Station 12,Lausanne 1015,Switzerland.
authors: Cécile
authors: C
authors: Hébert
authors: 2Centre Interdisciplinaire de Microscopie Electronique,Ecole Polytechnique Fédérale de Lausanne (EPFL),Station 12,Lausanne 1015,Switzerland.
authors: Marco
authors: M
authors: Cantoni