title: Interfacial energy-dispersive spectroscopy profile X-ray resolution measurements in variable pressure SEM.
abstract: A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (DINT) has been achieved.
authors: 1Univ-Lille Nord de France,Ecole des Mines de Douai,941 rue Charles Bourseul,BP 10838,59500 Douai,France.
authors: Abdelhalim
authors: A
authors: Zoukel
authors: 1Univ-Lille Nord de France,Ecole des Mines de Douai,941 rue Charles Bourseul,BP 10838,59500 Douai,France.
authors: Lahcen
authors: L
authors: Khouchaf
authors: 2Department of Advanced Materials and Structures,Centre de Recherche Public Henri Tudor,5 rue Bommel,L-4940 Hautcharage,Luxembourg.
authors: Jean
authors: J
authors: Di Martino
authors: 2Department of Advanced Materials and Structures,Centre de Recherche Public Henri Tudor,5 rue Bommel,L-4940 Hautcharage,Luxembourg.
authors: David
authors: D
authors: Ruch