title: Fabrication and testing of microfluidic optomechanical oscillators.
abstract: Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.
authors: Mechanical Science and Engineering, University of Illinois at Urbana-Champaign.
authors: Kewen
authors: K
authors: Han
authors: Electrical Engineering and Computer Science, University of Michigan.
authors: Kyu Hyun
authors: KH
authors: Kim
authors: Mechanical Science and Engineering, University of Illinois at Urbana-Champaign.
authors: Junhwan
authors: J
authors: Kim
authors: Electrical Engineering and Computer Science, University of Michigan; Biomedical Engineering, University of Michigan.
authors: Wonsuk
authors: W
authors: Lee
authors: Biomedical Engineering, University of Michigan.
authors: Jing
authors: J
authors: Liu
authors: Biomedical Engineering, University of Michigan.
authors: Xudong
authors: X
authors: Fan
authors: Electrical Engineering and Computer Science, University of Michigan.
authors: Tal
authors: T
authors: Carmon
authors: Mechanical Science and Engineering, University of Illinois at Urbana-Champaign; bahl@illinois.edu.
authors: Gaurav
authors: G
authors: Bahl
mesh_terms: D004867:Equipment Design; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000592:standards; D055095:Optics and Photonics / Q000295:instrumentation / Q000379:methods / Q000592:standards; D009991:Oscillometry / Q000295:instrumentation* / Q000379:methods / Q000592:standards