title: Broadband all-electronically tunable MEMS terahertz quantum cascade lasers.
abstract: In this work, we demonstrate all-electronically tunable terahertz quantum cascade lasers (THz QCLs) with MEMS tuner structures. A two-stage MEMS tuner device is fabricated by a commercial open-foundry process performed by the company MEMSCAP. This provides an inexpensive, rapid, and reliable approach for MEMS tuner fabrication for THz QCLs with a high-precision alignment scheme. In order to electronically actuate the MEMS tuner device, an open-loop cryogenic piezo nanopositioning stage is integrated with the device chip. Our experimental result shows that at least 240 GHz of single-mode continuous electronic tuning can be achieved in cryogenic environments (∼4  K) without mode hopping. This provides an important step toward realizing turn-key bench-top tunable THz coherent sources for spectroscopic and coherent tomography applications.
authors: Ningren
authors: N
authors: Han
authors: Alexander
authors: A
authors: de Geofroy
authors: David P
authors: DP
authors: Burghoff
authors: Chun Wang I
authors: CW
authors: Chan
authors: Alan Wei Min
authors: AW
authors: Lee
authors: John L
authors: JL
authors: Reno
authors: Qing
authors: Q
authors: Hu