title: Integrated silicon and silicon nitride photonic circuits on flexible substrates.
abstract: Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.
authors: Yu
authors: Y
authors: Chen
authors: Mo
authors: M
authors: Li
mesh_terms: D015374:Biosensing Techniques; D049329:Nanostructures; D036103:Nanotechnology; D055096:Optical Devices; D055620:Optical Phenomena; D011092:Polyethylene Glycols; D011093:Polyethylene Terephthalates; D012825:Silicon; D017655:Silicon Compounds
chemical_list: D011093:Polyethylene Terephthalates; D017655:Silicon Compounds; D011092:Polyethylene Glycols; C032734:silicon nitride; D012825:Silicon