title: Acoustic resonator based on periodically poled lithium niobate ridge.
abstract: The constant improvement of industrial needs to face modern telecommunication challenges leads to the development of novel transducer principles as alternatives to SAW and BAW solutions. The main technological limits of SAW (short-circuit between electrodes) and BAW (precise thickness control) solutions can be overcome by a new kind of transducer based on periodically poled ferroelectric substrate. The approach proposed in this paper exploits a ridge structure combined with a periodically poled transducer (PPT), allowing for the excitation of highly coupled modes unlike previously published results on planar PPTs. High-aspect-ratio ridges showing micrometer dimensions are achieved by dicing PPT plates with a diamond-tipped saw. An adapted metallization is achieved to excite acoustic modes exhibiting electromechanical coupling in excess of 15% with phase velocities up to 10 000 m·s(-1). Theoretical predictions show that these figures may reach values up to 20% and 18 000 m·s(-1), respectively, using an appropriate design.
authors.forename: Fabien
authors.initials: F
authors.lastname: Henrot
authors.forename: Florent
authors.initials: F
authors.lastname: Bassignot
authors.forename: Blandine
authors.initials: B
authors.lastname: Guichardaz
authors.forename: Gwenn
authors.initials: G
authors.lastname: Ulliac
authors.forename: Emilie
authors.initials: E
authors.lastname: Courjon
authors.forename: Jean-Yves
authors.initials: JY
authors.lastname: Rauch
authors.forename: Thomas
authors.initials: T
authors.lastname: Baron
authors.forename: Sylvain
authors.initials: S
authors.lastname: Ballandras