title: Electronic structure of two precursors for nanofabrication: [(CH3)3CN]2W[N(CH3)2]2 and Ti(NMe2)2(NEt2)2.
abstract: The electronic structures of bis(tert-butylimino)bis(dimethylamino) tungsten and bis(N-ethylethanaminato)bis(N-methylmethanaminato) titanium heteroleptic complexes, which are precursors for atomic layer deposition of metallic nitride on surfaces, have been investigated by HeI and HeII UV photoelectron spectroscopy and DFT/OVGF calculations. We discuss the electronic structures of these two and other related d(0)-type complexes in relation to the mechanism of adsorption and decomposition of metal alkylamide precursors on surfaces.
authors.affiliation: Charles Sturt University, P.O. Box 883, Orange NSW 2800, Australia.
authors.forename: Igor
authors.initials: I
authors.lastname: Novak
authors.forename: Branka
authors.initials: B
authors.lastname: Kovač
authors.forename: Milan
authors.initials: M
authors.lastname: Jokić