title: MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN.
abstract: A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.
authors.affiliation: Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
authors.forename: Lin
authors.initials: L
authors.lastname: Liu
authors.affiliation: Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
authors.forename: Erkang
authors.initials: E
authors.lastname: Wang
authors.affiliation: Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
authors.forename: Xiaoyang
authors.initials: X
authors.lastname: Zhang
authors.affiliation: Dept. of Biomedical Engineering, Johns Hopkins University, Baltimore, MD 21205.
authors.forename: Wenxuan
authors.initials: W
authors.lastname: Liang
authors.affiliation: Dept. of Biomedical Engineering, Johns Hopkins University, Baltimore, MD 21205.
authors.forename: Xingde
authors.initials: X
authors.lastname: Li
authors.affiliation: Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
authors.forename: Huikai
authors.initials: H
authors.lastname: Xie
keywords: 3D confocal imaging; 3D microendoscope; MEMS mirror; MEMS tunable lens; bimorph; electrothermal actuator; large scan range