title: Peculiarities of temperature dependent ion beam sputtering and channeling of crystalline bismuth.
abstract: In this paper, we report on the surface evolution of focused ion beam treated single crystalline Bi(001) with respect to different beam incidence angles and channeling effects. 'Erosive' sputtering appears to be the dominant mechanism at room temperature (RT) and diffusion processes during sputtering seem to play only a minor role for the surface evolution of Bi. The sputtering yield of Bi(001) shows anomalous behavior when increasing the beam incidence angle along particular azimuthal angles of the specimen. The behavior of the sputtering yield could be related to channeling effects and the relevant channeling directions are identified. Dynamic annealing processes during ion irradiation retain the crystalline quality of the Bi specimen allowing ion channeling at RT. Lowering the specimen temperature to T = -188 °C reduces dynamic annealing processes and thereby disables channeling effects. Furthermore unexpected features are observed at normal beam incidence angle. Spike-like features appear during the ion beam induced erosion, whose growth directions are not determined by the ion beam but by the channeling directions of the Bi specimen.
authors.affiliation: Institute for Solid State Electronics, Vienna University of Technology, Vienna, Austria.
authors.forename: Rupert
authors.initials: R
authors.lastname: Langegger
authors.forename: Klaudia
authors.initials: K
authors.lastname: Hradil
authors.forename: Andreas
authors.initials: A
authors.lastname: Steiger-Thirsfeld
authors.forename: Emmerich
authors.initials: E
authors.lastname: Bertagnolli
authors.forename: Alois
authors.initials: A
authors.lastname: Lugstein