title: A review of roll-to-roll nanoimprint lithography.
abstract: Since its introduction in 1995, nanoimprint lithography has been demonstrated in many researches as a simple, low-cost, and high-throughput process for replicating micro- and nanoscale patterns. Due to its advantages, the nanoimprint lithography method has been rapidly developed over the years as a promising alternative to conventional nanolithography processes to fulfill the demands generated from the recent developments in the semiconductor and flexible electronics industries, which results in variations of the process. Roll-to-roll (R2R) nanoimprint lithography (NIL) is the most demanded technique due to its high-throughput fulfilling industrial-scale application. In the present work, a general literature review on the various types of nanoimprint lithography processes especially R2R NIL and the methods commonly adapted to fabricate imprint molds are presented to provide a clear view and understanding on the nanoimprint lithography technique as well as its recent developments.
  81.16.Nd.
authors.affiliation: Nanofabrication and Functional Materials Research Group, School of Mechanical Engineering, Universiti Sains Malaysia, Engineering Campus, Nibong Tebal, Penang 14300, Malaysia.
authors.forename: Nazrin
authors.initials: N
authors.lastname: Kooy
authors.affiliation: Nanofabrication and Functional Materials Research Group, School of Mechanical Engineering, Universiti Sains Malaysia, Engineering Campus, Nibong Tebal, Penang 14300, Malaysia.
authors.forename: Khairudin
authors.initials: K
authors.lastname: Mohamed
authors.affiliation: Nanofabrication and Functional Materials Research Group, School of Mechanical Engineering, Universiti Sains Malaysia, Engineering Campus, Nibong Tebal, Penang 14300, Malaysia.
authors.forename: Lee Tze
authors.initials: LT
authors.lastname: Pin
authors.affiliation: Nanofabrication and Functional Materials Research Group, School of Mechanical Engineering, Universiti Sains Malaysia, Engineering Campus, Nibong Tebal, Penang 14300, Malaysia.
authors.forename: Ooi Su
authors.initials: OS
authors.lastname: Guan
keywords: Lithography; Nanofabrication; Nanoimprint; Nanopatterning; Plate-to-plate; Roll-to-plate; Roll-to-roll