title: A method to test the performance of an energy-dispersive X-ray spectrometer (EDS).
abstract: A test material for routine performance evaluation of energy-dispersive X-ray spectrometers (EDS) is presented. It consists of a synthetic, thick coating of C, Al, Mn, Cu, and Zr, in an elemental composition that provides interference-free characteristic X-ray lines of similar intensities at 10 kV scanning electron microscope voltage. The EDS energy resolution at the C-K, Mn-Lα, Cu-Lα, Al-K, Zr-Lα, and Mn-Kα lines, the calibration state of the energy scale, and the Mn-Lα/Mn-Kα intensity ratio as a measure for the low-energy detection efficiency are calculated by a dedicated software package from the 10 kV spectrum. Measurements at various input count rates and processor shaping times enable an estimation of the operation conditions for which the X-ray spectrum is not yet corrupted by pile-up events. Representative examples of EDS systems characterized with the test material and the related software are presented and discussed.
authors.affiliation: 1BAM Federal Institute for Materials Research and Testing,Division 6.8 Surface Analysis and Interfacial Chemistry,12200 Berlin,Germany.
authors.forename: Vasile-Dan
authors.initials: VD
authors.lastname: Hodoroaba
authors.affiliation: 2Institute for Scientific Instruments,Rudower Chaussee 29/31,12489 Berlin,Germany.
authors.forename: Mathias
authors.initials: M
authors.lastname: Procop