title: Factors affecting degradation of dimethyl sulfoxide (DMSO) by fluidized-bed Fenton process.
abstract: In this study, the target compound is dimethyl sulfoxide (DMSO), which is used as a photoresist stripping solvent in the semiconductor and thin-film transistor liquid crystal display (TFT-LCD) manufacturing processes. The effects of the operating parameters (pH, Fe(2+) and H2O2 concentrations) on the degradation of DMSO in the fluidized-bed Fenton process were examined. This study used the Box-Behnken design (BBD) to investigate the optimum conditions of DMSO degradation. The highest DMSO removal was 98 % for pH 3, when the H2O2 to Fe(2+) molar ratio was 12. At pH 2 and 4, the highest DMSO removal was 82 %, when the H2O2 to Fe(2+) molar ratio was 6.5. The correlation of DMSO removal showed that the effect of the parameters on DMSO removal followed the order Fe(2+) > H2O2 > pH. From the BBD prediction, the optimum conditions were pH 3, 5 mM of Fe(2+), and 60 mM of H2O2. The difference between the experimental value (98 %) and the predicted value (96 %) was not significant. The removal efficiencies of DMSO, chemical oxygen demand (COD), total organic carbon (TOC), and iron in the fluidized-bed Fenton process were higher than those in the traditional Fenton process.
authors: Archie Eustaquio Research Laboratory, Universidad de Zamboanga, Zamboanga City, Philippines.
authors: Luzvisminda M
authors: LM
authors: Bellotindos
authors: Meng-Hsuan
authors: MH
authors: Lu
authors: Thanakorn
authors: T
authors: Methatham
authors: Ming-Chun
authors: MC
authors: Lu
mesh_terms: D057919:Biological Oxygen Demand Analysis; D004121:Dimethyl Sulfoxide / Q000032:analysis* / Q000737:chemistry; D006861:Hydrogen Peroxide / Q000737:chemistry*; D007501:Iron / Q000737:chemistry*; D010084:Oxidation-Reduction; D012107:Research Design; D012996:Solutions; D062065:Wastewater / Q000737:chemistry*; D014874:Water Pollutants, Chemical / Q000032:analysis* / Q000737:chemistry; D018508:Water Purification / Q000295:instrumentation / Q000379:methods*
chemical_list: D004121:Dimethyl Sulfoxide; D006861:Hydrogen Peroxide; D007501:Iron; D012996:Solutions; D062065:Wastewater; D014874:Water Pollutants, Chemical; C045076:Fenton's reagent