title: Fast and robust piezoelectric axicon mirror.
abstract: In this Letter, we demonstrate the first high-speed piezoelectric axicon mirror. We achieve a usable aperture of 10 mm up to the maximum radius of the robust, 300 μm thick mirror substrate using a floating boundary condition. The highly aspheric, conical shape is programmed into the device by ring-shaped electrodes, for which we have developed an automated optimization strategy for their individual electrode potentials. In addition, we developed a simple control circuit, in which the conical profile can be programmed and adjusted with just one control signal. The device is fabricated by rapid prototyping to avoid cleanroom processing. The tunable mirror features a resonance frequency of 10 kHz and a static deflection of 5.8 μm at a surface deviation of 63 nm, and is thus able to generate a quasi-Bessel beam.
authors: Jens
authors: J
authors: Brunne
authors: Matthias C
authors: MC
authors: Wapler
authors: Ulrike
authors: U
authors: Wallrabe
mesh_terms: D004566:Electrodes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*