title: 5 × 5 cm² silicon photonic crystal slabs on glass and plastic foil exhibiting broadband absorption and high-intensity near-fields.
abstract: Crystalline silicon photonic crystal slabs are widely used in various photonics applications. So far, the commercial success of such structures is still limited owing to the lack of cost-effective fabrication processes enabling large nanopatterned areas (≫ 1 cm(2)). We present a simple method for producing crystalline silicon nanohole arrays of up to 5 × 5 cm(2) size with lattice pitches between 600 and 1000 nm on glass and flexible plastic substrates. Exclusively up-scalable, fast fabrication processes are applied such as nanoimprint-lithography and silicon evaporation. The broadband light trapping efficiency of the arrays is among the best values reported for large-area experimental crystalline silicon nanostructures. Further, measured photonic crystal resonance modes are in good accordance with light scattering simulations predicting strong near-field intensity enhancements greater than 500. Hence, the large-area silicon nanohole arrays might become a promising platform for ultrathin solar cells on lightweight substrates, high-sensitive optical biosensors, and nonlinear optics.
authors: Helmholtz-Zentrum Berlin für Materialien und Energie, Kekuléstr. 5, 12489 Berlin, Germany.
authors: C
authors: C
authors: Becker
authors: Helmholtz-Zentrum Berlin für Materialien und Energie, Kekuléstr. 5, 12489 Berlin, Germany.
authors: P
authors: P
authors: Wyss
authors: Helmholtz-Zentrum Berlin für Materialien und Energie, Kekuléstr. 5, 12489 Berlin, Germany.
authors: D
authors: D
authors: Eisenhauer
authors: Helmholtz-Zentrum Berlin für Materialien und Energie, Kekuléstr. 5, 12489 Berlin, Germany.
authors: J
authors: J
authors: Probst
authors: Helmholtz-Zentrum Berlin für Materialien und Energie, Kekuléstr. 5, 12489 Berlin, Germany.
authors: V
authors: V
authors: Preidel
authors: Zuse Institute Berlin, Takustraße 7, 14195 Berlin, Germany.
authors: M
authors: M
authors: Hammerschmidt
authors: Zuse Institute Berlin, Takustraße 7, 14195 Berlin, Germany.
authors: S
authors: S
authors: Burger