title: Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV.
abstract: X-ray microscopy is a successful technique with applications in several key fields. Fresnel zone plates (FZPs) have been the optical elements driving its success, especially in the soft X-ray range. However, focusing of hard X-rays via FZPs remains a challenge. It is demonstrated here, that two multilayer type FZPs, delivered from the same multilayer deposit, focus both hard and soft X-rays with high fidelity. The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm FWHM (full-pitch) resolution at 7.9 keV, deduced from autocorrelation analysis. Reported FZPs had more than 10% diffraction efficiency near 1.5 keV.
authors.forename: Kahraman
authors.initials: K
authors.lastname: Keskinbora
authors.forename: Anna-Lena
authors.initials: AL
authors.lastname: Robisch
authors.forename: Marcel
authors.initials: M
authors.lastname: Mayer
authors.forename: Umut T
authors.initials: UT
authors.lastname: Sanli
authors.forename: Corinne
authors.initials: C
authors.lastname: Grévent
authors.forename: Christian
authors.initials: C
authors.lastname: Wolter
authors.forename: Markus
authors.initials: M
authors.lastname: Weigand
authors.forename: Adriana
authors.initials: A
authors.lastname: Szeghalmi
authors.forename: Mato
authors.initials: M
authors.lastname: Knez
authors.forename: Tim
authors.initials: T
authors.lastname: Salditt
authors.forename: Gisela
authors.initials: G
authors.lastname: Schütz