title: Novel fabrication of flexible graphene-based chemical sensors with heaters using soft lithographic patterning method.
abstract: We have fabricated graphene-based chemical sensors with flexible heaters for the highly sensitive detection of specific gases. We believe that increasing the temperature of the graphene surface significantly enhanced the electrical signal change of the graphene-based channel, and reduced the recovery time needed to obtain a normal state of equilibrium. In addition, a simple and efficient soft lithographic patterning process was developed via surface energy modification for advanced, graphene-based flexible devices, such as gas sensors. As a proof of concept, we demonstrated the high sensitivity of NO2 gas sensors based on graphene nanosheets. These devices were fabricated using a simple soft-lithographic patterning method, where flexible graphene heaters adjacent to the channel of sensing graphene were utilized to control graphene temperature.
authors.affiliation: Thin Film Materials Research Group, Korea Research Institute of Chemical Technology , Daejeon 305-600, Republic of Korea.
authors.forename: Min Wook
authors.initials: MW
authors.lastname: Jung
authors.forename: Sung
authors.initials: S
authors.lastname: Myung
authors.forename: Wooseok
authors.initials: W
authors.lastname: Song
authors.forename: Min-A
authors.initials: MA
authors.lastname: Kang
authors.forename: Sung Ho
authors.initials: SH
authors.lastname: Kim
authors.forename: Cheol-Soo
authors.initials: CS
authors.lastname: Yang
authors.forename: Sun Sook
authors.initials: SS
authors.lastname: Lee
authors.forename: Jongsun
authors.initials: J
authors.lastname: Lim
authors.forename: Chong-Yun
authors.initials: CY
authors.lastname: Park
authors.forename: Jeong-O
authors.initials: JO
authors.lastname: Lee
authors.forename: Ki-Seok
authors.initials: KS
authors.lastname: An