title: Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region.
abstract: We explore possibilities of waveguide-mode interference lithography (WMIL) technique for high contrast subwavelength structures in the visible region. Selecting an appropriate waveguide-mode, we demonstrate high contrast resist mask patterns for the first time. TM1 mode in the waveguide is shown to be useful for providing a three-dimensional structure whose cross section is checkerboard pattern. Applying our WMIL technique, we demonstrate 1D, 2D and 3D subwavelength resist patterns that are widely used for the fabrication of metamteterials in the visible region. In addition to the resist patterns, we demonstrate a resonance at 1.9 eV for a split tube structure experimentally.
authors.forename: Kanta
authors.initials: K
authors.lastname: Kusaka
authors.forename: Hiroyuki
authors.initials: H
authors.lastname: Kurosawa
authors.forename: Seigo
authors.initials: S
authors.lastname: Ohno
authors.forename: Yozaburo
authors.initials: Y
authors.lastname: Sakaki
authors.forename: Kazuyuki
authors.initials: K
authors.lastname: Nakayama
authors.forename: Yuto
authors.initials: Y
authors.lastname: Moritake
authors.forename: Teruya
authors.initials: T
authors.lastname: Ishihara