title: Nano-artifact metrics based on random collapse of resist.
abstract: Artifact metrics is an information security technology that uses the intrinsic characteristics of a physical object for authentication and clone resistance. Here, we demonstrate nano-artifact metrics based on silicon nanostructures formed via an array of resist pillars that randomly collapse when exposed to electron-beam lithography. The proposed technique uses conventional and scalable lithography processes, and because of the random collapse of resist, the resultant structure has extremely fine-scale morphology with a minimum dimension below 10 nm, which is less than the resolution of current lithography capabilities. By evaluating false match, false non-match and clone-resistance rates, we clarify that the nanostructured patterns based on resist collapse satisfy the requirements for high-performance security applications.
authors.affiliation: Graduate School of Environment and Information Sciences, Yokohama National University, Hodogaya, Yokohama, Kanagawa 240-8501, Japan.
authors.forename: Tsutomu
authors.initials: T
authors.lastname: Matsumoto
authors.affiliation: Dai Nippon Printing Co. Ltd., 250-1 Wakashiba, Kashiwa, Chiba 277-0871, Japan.
authors.forename: Morihisa
authors.initials: M
authors.lastname: Hoga
authors.affiliation: Dai Nippon Printing Co. Ltd., 250-1 Wakashiba, Kashiwa, Chiba 277-0871, Japan.
authors.forename: Yasuyuki
authors.initials: Y
authors.lastname: Ohyagi
authors.affiliation: Dai Nippon Printing Co. Ltd., 250-1 Wakashiba, Kashiwa, Chiba 277-0871, Japan.
authors.forename: Mikio
authors.initials: M
authors.lastname: Ishikawa
authors.affiliation: Photonic Network Research Institute, National Institute of Information and Communications Technology, 4-2-1 Nukui-kita, Koganei, Tokyo 184-8795, Japan.
authors.forename: Makoto
authors.initials: M
authors.lastname: Naruse
authors.affiliation: Graduate School of Environment and Information Sciences, Yokohama National University, Hodogaya, Yokohama, Kanagawa 240-8501, Japan.
authors.forename: Kenta
authors.initials: K
authors.lastname: Hanaki
authors.affiliation: Graduate School of Environment and Information Sciences, Yokohama National University, Hodogaya, Yokohama, Kanagawa 240-8501, Japan.
authors.forename: Ryosuke
authors.initials: R
authors.lastname: Suzuki
authors.affiliation: Graduate School of Environment and Information Sciences, Yokohama National University, Hodogaya, Yokohama, Kanagawa 240-8501, Japan.
authors.forename: Daiki
authors.initials: D
authors.lastname: Sekiguchi
authors.affiliation: Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan.
authors.forename: Naoya
authors.initials: N
authors.lastname: Tate
authors.affiliation: Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan.
authors.forename: Motoichi
authors.initials: M
authors.lastname: Ohtsu