title: Optical microscope for three-dimensional surface displacement and shape measurements at the microscale.
abstract: We report a novel optical microscope for full-field, noncontact measurements of three-dimensional (3D) surface deformation and topography at the microscale. The microscope system is based on a seamless integration of the diffraction-assisted image correlation (DAIC) method with fluorescent microscopy. We experimentally demonstrate the microscope's capability for 3D measurements with submicrometer spatial resolution and subpixel measurement accuracy.
authors.forename: Shuman
authors.initials: S
authors.lastname: Xia
authors.forename: Zhipeng
authors.initials: Z
authors.lastname: Pan
authors.forename: Jingwen
authors.initials: J
authors.lastname: Zhang