title: Polymerization kinetics in three-dimensional direct laser writing.
abstract: By in-situ measuring the scattered light during microstructure formation, the polymerization kinetics of three-dimensional direct laser writing are investigated in detail. Oxygen quenching, oxygen diffusion, and inhibitor depletion are shown to have substantial impact on the kinetic behavior. For typical photoresists based on multifunctional acrylates, the polymerization occurs in less than a millisecond.
authors.affiliation: Institute of Applied Physics (APH), Karlsruhe Institute of Technology (KIT), 76128, Karlsruhe, Germany.
authors.forename: Jonathan B
authors.initials: JB
authors.lastname: Mueller
authors.forename: Joachim
authors.initials: J
authors.lastname: Fischer
authors.forename: Frederik
authors.initials: F
authors.lastname: Mayer
authors.forename: Muamer
authors.initials: M
authors.lastname: Kadic
authors.forename: Martin
authors.initials: M
authors.lastname: Wegener
keywords: crosslinking; laser lithography; multi-photon absorption; polymer chemistry; radical polymerization