title: Fabrication of planarised conductively patterned diamond for bio-applications.
abstract: The development of smooth, featureless surfaces for biomedical microelectronics is a challenging feat. Other than the traditional electronic materials like silicon, few microelectronic circuits can be produced with conductive features without compromising the surface topography and/or biocompatibility. Diamond is fast becoming a highly sought after biomaterial for electrical stimulation, however, its inherent surface roughness introduced by the growth process limits its applications in electronic circuitry. In this study, we introduce a fabrication method for developing conductive features in an insulating diamond substrate whilst maintaining a planar topography. Using a combination of microwave plasma enhanced chemical vapour deposition, inductively coupled plasma reactive ion etching, secondary diamond growth and silicon wet-etching, we have produced a patterned substrate in which the surface roughness at the interface between the conducting and insulating diamond is approximately 3 nm. We also show that the patterned smooth topography is capable of neuronal cell adhesion and growth whilst restricting bacterial adhesion.
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Wei
authors.initials: W
authors.lastname: Tong
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia. Electronic address: kfox@unimelb.edu.au.
authors.forename: Kate
authors.initials: K
authors.lastname: Fox
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Kumaravelu
authors.initials: K
authors.lastname: Ganesan
authors.affiliation: Department of Anatomy and Neuroscience, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Ann M
authors.initials: AM
authors.lastname: Turnley
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Olga
authors.initials: O
authors.lastname: Shimoni
authors.affiliation: Department of Chemical and Biomolecular Engineering, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Phong A
authors.initials: PA
authors.lastname: Tran
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Alexander
authors.initials: A
authors.lastname: Lohrmann
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Thomas
authors.initials: T
authors.lastname: McFarlane
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Arman
authors.initials: A
authors.lastname: Ahnood
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: David J
authors.initials: DJ
authors.lastname: Garrett
authors.affiliation: National Information and Communication Technology Australia, Victoria 3010, Australia; Department of Electrical and Electronic Engineering, University of Melbourne, Victoria 3010, Australia.
authors.forename: Hamish
authors.initials: H
authors.lastname: Meffin
authors.affiliation: Oral Health Cooperative Research Centre, Melbourne Dental School, The University of Melbourne, 720 Swanston Street, Victoria 3010, Australia.
authors.forename: Neil M
authors.initials: NM
authors.lastname: O'Brien-Simpson
authors.affiliation: Oral Health Cooperative Research Centre, Melbourne Dental School, The University of Melbourne, 720 Swanston Street, Victoria 3010, Australia.
authors.forename: Eric C
authors.initials: EC
authors.lastname: Reynolds
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria, Australia.
authors.forename: Steven
authors.initials: S
authors.lastname: Prawer
mesh_terms: D000900:Anti-Bacterial Agents / Q000494:pharmacology; D001672:Biocompatible Materials; D018130:Diamond; D004558:Electric Stimulation; D008826:Microbial Sensitivity Tests; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D013057:Spectrum Analysis / Q000379:methods; D013499:Surface Properties
chemical_list: D000900:Anti-Bacterial Agents; D001672:Biocompatible Materials; D018130:Diamond
keywords: Antibacterial; Biocompatible; Diamond; Neural; Planar