title: Ptychography with multilayer Laue lenses.
abstract: Two different multilayer Laue lens designs were made with total deposition thicknesses of 48 µm and 53 µm, and focal lengths of 20.0 mm and 12.5 mm at 20.0 keV, respectively. From these two multilayer systems, several lenses were manufactured for one- and two-dimensional focusing. The latter is realised with a directly bonded assembly of two crossed lenses, that reduces the distance between the lenses in the beam direction to 30 µm and eliminates the necessity of producing different multilayer systems. Characterization of lens fabrication was performed using a laboratory X-ray microscope. Focusing properties have been investigated using ptychography.
authors.affiliation: Institute for Materials Science and Max Bergmann Center of Biomaterials, Technische Universität Dresden, 01062 Dresden, Germany.
authors.forename: Adam
authors.initials: A
authors.lastname: Kubec
authors.affiliation: Fraunhofer Institute for Material and Beam Technology, Winterbergstraße 28, 01277 Dresden, Germany.
authors.forename: Stefan
authors.initials: S
authors.lastname: Braun
authors.affiliation: Fraunhofer Institute for Ceramic Technologies and Systems, Winterbergstraße 28, 01277 Dresden, Germany.
authors.forename: Sven
authors.initials: S
authors.lastname: Niese
authors.affiliation: Fraunhofer Institute for Ceramic Technologies and Systems, Winterbergstraße 28, 01277 Dresden, Germany.
authors.forename: Peter
authors.initials: P
authors.lastname: Krüger
authors.affiliation: Institute of Structural Physics, Technische Universität Dresden, 01069 Dresden, Germany.
authors.forename: Jens
authors.initials: J
authors.lastname: Patommel
authors.affiliation: Center for Complex Analysis, GLOBALFOUNDRIES Dresden Module One LLC and Co KG, Wilschdorfer Landstraße 101, 01109 Dresden, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Hecker
authors.affiliation: Fraunhofer Institute for Material and Beam Technology, Winterbergstraße 28, 01277 Dresden, Germany.
authors.forename: Andreas
authors.initials: A
authors.lastname: Leson
authors.affiliation: Institute of Structural Physics, Technische Universität Dresden, 01069 Dresden, Germany.
authors.forename: Christian G
authors.initials: CG
authors.lastname: Schroer
keywords: X-ray nanofocusing; multilayer Laue lens; ptychography; scanning X-ray microscopy