title: Gold complexes for focused-electron-beam-induced deposition.
abstract: Four gold complexes were tested as a precursor for focused-electron-beam-induced deposition: [ClAu(III)Me2]2, ClAu(I)(SMe2), ClAu(I)(PMe3), and MeAu(I)(PMe3). Complexes [ClAu(III)Me2]2 and MeAu(I)(PMe3) are volatile, have sufficient vapor pressure at room temperature for deposition experiments, and were found to yield deposits that contain gold (29-41 and 19-25 atom %, respectively). Electrons easily remove the Cl ligand from [ClAu(III)Me2]2, and predominantly both methyl ligands are incorporated into the deposit. Electrons remove at least one methyl group from MeAu(I)(PMe3). Complexes ClAu(I)(SMe2) and ClAu(I)(PMe3) are not suitable as a precursor. They dissociate in vacuum, and the only volatile components are Cl, SMe2, and PMe3, respectively.
authors.affiliation: Zernike Institute for Advanced Materials, University of Groningen , Nijenborgh 4, 9747 AG Groningen, The Netherlands.
authors.forename: W F
authors.initials: WF
authors.lastname: van Dorp
authors.forename: X
authors.initials: X
authors.lastname: Wu
authors.forename: J J L
authors.initials: JJ
authors.lastname: Mulders
authors.forename: S
authors.initials: S
authors.lastname: Harder
authors.forename: P
authors.initials: P
authors.lastname: Rudolf
authors.forename: J T M
authors.initials: JT
authors.lastname: De Hosson