title: Tunable optical filters with wide wavelength range based on porous multilayers.
abstract: A novel concept for micromechanical tunable optical filter (TOF) with porous-silicon-based photonic crystals which provide wavelength tuning of ca. ±20% around a working wavelength at frequencies up to kilohertz is presented. The combination of fast mechanical tilting and pore-filling of the porous silicon multilayer structure increases the tunable range to more than 200 nm or provides fine adjustment of working wavelength of the TOF. Experimental and optical simulation data for the visible and near-infrared wavelength range supporting the approach are shown. TOF are used in spectroscopic applications, e.g., for process analysis.
authors.affiliation: Institute for Applied Research and Faculty of Medical and Mechanical Engineering, Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.
authors.forename: Ulrich
authors.initials: U
authors.lastname: Mescheder
authors.affiliation: Institute for Applied Research and Faculty of Medical and Mechanical Engineering, Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.
authors.forename: Isman
authors.initials: I
authors.lastname: Khazi
authors.affiliation: Institute for Applied Research and Faculty of Medical and Mechanical Engineering, Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.
authors.forename: Andras
authors.initials: A
authors.lastname: Kovacs
authors.affiliation: Institute for Applied Research and Faculty of Medical and Mechanical Engineering, Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.
authors.forename: Alexey
authors.initials: A
authors.lastname: Ivanov
keywords: Biosensor; Dual tunability; MEMS; MOEMS; Photonic crystal; Porous silicon; Silicon anodization; Tunable optical filter