title: Resonant efficiency improvement design of piezoelectric biosensor for bacteria gravimetric sensing.
abstract: The piezoelectric biosensor have been widely used in ultra-small mass detection of biomolecular, based on PZT piezoelectric material can create a variety of compositions geometrically; it could widely develop a high-frequency resonator and measure the change of the slightest mass while improve the limited detection simultaneously. Therefore, the piezoelectric biosensor of this study was fabricated by a spin-coating method and backside etching process for improving the characteristic of piezoelectric biosensor. The result exhibited that the 250 μm × 250 μm working size has the most favorable piezoelectric characteristic. The tunability was approximately 38.56 % and it showed that reducing the substrate thickness could obtain a clear resonance signal in a range of 60 to 380 MHz. In theory calculated for gravimetric sensing, it could achieve 0.1 ng sensing sensitivity. In gravimetric sensing, the sensing range was between 50,000~100,000 CFU/ml. Sensing range was lower in clinical urinary tract infection (100,000 CFU/ml), thus demonstrating its usefulness for preventive medicine. It can understand the piezoelectric sensor of this study has potential application in the future for biomedical gravimetric sensing.
authors.affiliation: Department of Electrical Engineering, National Central University, No.300, Jhongda Rd., Jhongli City, Taoyuan County 32001, Taiwan, R.O.C.
authors.forename: Jang-Zern
authors.initials: JZ
authors.lastname: Tsai
authors.affiliation: School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China.
authors.forename: Ching-Jung
authors.initials: CJ
authors.lastname: Chen
authors.affiliation: Department of Electrical Engineering, National Central University, No.300, Jhongda Rd., Jhongli City, Taoyuan County 32001, Taiwan, R.O.C.
authors.forename: Dung-Ting
authors.initials: DT
authors.lastname: Shie
authors.affiliation: The College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, No.19A Yuquan Road, Beijing 100049, China.
authors.forename: Jen-Tsai
authors.initials: JT
authors.lastname: Liu
mesh_terms: D061725:Accelerometry / Q000295:instrumentation*; D058491:Bacterial Load / Q000379:methods* / Q000502:physiology*; D015374:Biosensing Techniques / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D004926:Escherichia coli / Q000302:isolation & purification* / Q000502:physiology; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers
keywords: Lead zirconate titanate (PZT); biosensor; escherichia coli (E. coli); piezoelectric; resonance-frequency