title: Photoinduced crystal-to-liquid phase transitions of azobenzene derivatives and their application in photolithography processes through a solid-liquid patterning.
abstract: The direct and reversible transformation of matter between the solid and liquid phases by light at constant temperature is of great interest because of its potential applications in various manufacturing settings. We report a simple molecular design strategy for the phase transitions: azobenzenes having para-dialkoxy groups with a methyl group at the meta-position. The photolithography processes were demonstrated using the azobenzene as a photoresist in a single process combining development and etching of a copper substrate.
authors.affiliation: Electronics and Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) , Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan.
authors.forename: Yasuo
authors.initials: Y
authors.lastname: Norikane
authors.forename: Emi
authors.initials: E
authors.lastname: Uchida
authors.forename: Satoko
authors.initials: S
authors.lastname: Tanaka
authors.forename: Kyoko
authors.initials: K
authors.lastname: Fujiwara
authors.forename: Emiko
authors.initials: E
authors.lastname: Koyama
authors.forename: Reiko
authors.initials: R
authors.lastname: Azumi
authors.forename: Haruhisa
authors.initials: H
authors.lastname: Akiyama
authors.forename: Hideyuki
authors.initials: H
authors.lastname: Kihara
authors.forename: Masaru
authors.initials: M
authors.lastname: Yoshida