title: Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane.
abstract: This paper studies parameters which affect the pore size diameter of a silicon membrane. Electrochemical etching is performed in characterise the parameter involved in this process. The parameter has been studied is volume ratio of hydrofluoric acid (HF) and ethanol as an electrolyte aqueous for electrochemical etch. This electrolyte aqueous solution has been mixed between HF and ethanol with volume ratio 3:7, 5:5, 7:3 and 9:1. As a result, the higher volume of HF in this electrolyte gives the smallest pore size diameter compared to the lower volume of HF. These samples have been dipped into HF and ethanol electrolyte aqueous with supplied 25 mA/cm2 current density for 20, 30, 40, and 50 minutes. The samples will inspect under Scanning Electron Microscope (SEM) to execute the pore formations on silicon membrane surface.
authors.affiliation: Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia Faculty of Electrical Engineering, Universiti Teknologi Mara (UiTM), 40450, Shah Alam, Selangor, Malaysia.
authors.forename: Norhafizah
authors.initials: N
authors.lastname: Burham
authors.affiliation: Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia.
authors.forename: Azrul Azlan
authors.initials: AA
authors.lastname: Hamzah
authors.affiliation: Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia.
authors.forename: Burhanuddin Yeop
authors.initials: BY
authors.lastname: Majlis
mesh_terms: D001672:Biocompatible Materials / Q000737:chemistry*; D004595:Electroplating / Q000379:methods; D006858:Hydrofluoric Acid / Q000737:chemistry*; D008422:Materials Testing; D008567:Membranes, Artificial; D058608:Nanopores / Q000648:ultrastructure*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D016062:Porosity; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D001672:Biocompatible Materials; D008567:Membranes, Artificial; D006858:Hydrofluoric Acid; D012825:Silicon
keywords: Silicon membrane; electrochemical etch; hydrofluoric acid (HF); nanoporous; volume ratio