title: Localization microscopy (SPDM) facilitates high precision control of lithographically produced nanostructures.
abstract: Nanoscale resolution in material sciences is usually restricted to scanning electron beam microscopes. Here we present a procedure that allows single molecule resolution of the sample surface with visible light. Highlighting the performance we used electron beam lithography to generate highly regular nanostructures consisting of interconnected cubes. The samples were labeled with Alexa 647 dyes. The spatial organization of the dyes on nanostructured surfaces was localized with single molecule resolution using localization microscopy. This succeeded also in an absolute spatial calibration of the localization method applied (spectral precision distance microscopy/SPDM). The findings will contribute to the field of product control for industrial applications and long-term fluorescence imaging.
authors.affiliation: Applied Physical Chemistry, University of Heidelberg, Im Neuenheimer Feld 253, 69120 Heidelberg, Germany.
authors.forename: A L
authors.initials: AL
authors.lastname: Grab
authors.affiliation: Kirchhoff-Institute for Physics, University of Heidelberg, Im Neuenheimer Feld 227, 69120 Heidelberg, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Hagmann
authors.affiliation: Applied Physical Chemistry, University of Heidelberg, Im Neuenheimer Feld 253, 69120 Heidelberg, Germany.
authors.forename: R
authors.initials: R
authors.lastname: Dahint
authors.affiliation: Kirchhoff-Institute for Physics, University of Heidelberg, Im Neuenheimer Feld 227, 69120 Heidelberg, Germany; Institute for Pharmacy and Molecular Biotechnology, University of Heidelberg, Im Neuenheimer Feld 364, 69120 Heidelberg, Germany; Institute of Molecular Biology, Ackermannweg 4, 55128 Mainz, Germany. Electronic address: c.cremer@imb-mainz.de.
authors.forename: C
authors.initials: C
authors.lastname: Cremer
keywords: Calibration; Localization microscopy; Spectral precision distance microscopy (SPDM)