title: Theoretical prediction of experimental jump and pull-in dynamics in a MEMS sensor.
abstract: The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the resonant branch. They mainly concern the practical range of existence of each attractor and the final outcome after its disappearance. These differences are likely due to disturbances, which are unavoidable in practice, but have not been included in the model. To take disturbances into account, in addition to the classical local investigations, we consider the global dynamics and explore the robustness of the obtained results by performing a dynamical integrity analysis. Our aim is that of developing an applicable confident estimate of the system response. Integrity profiles and integrity charts are built to detect the parameter range where reliability is practically strong and where it becomes weak. Integrity curves exactly follow the experimental data. They inform about the practical range of actuality. We discuss the combined use of integrity charts in the engineering design. Although we refer to a particular case-study, the approach is very general.
authors.affiliation: Department of Civil and Building Engineering and Architecture, Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italy. laura.ruzziconi@uniecampus.it.
authors.forename: Laura
authors.initials: L
authors.lastname: Ruzziconi
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia. aramini1@binghamton.edu.
authors.forename: Abdallah H
authors.initials: AH
authors.lastname: Ramini
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia. mohammad.younis@kaust.edu.sa.
authors.forename: Mohammad I
authors.initials: MI
authors.lastname: Younis
authors.affiliation: Department of Civil and Building Engineering and Architecture, Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italy. lenci@univpm.it.
authors.forename: Stefano
authors.initials: S
authors.lastname: Lenci