title: Gas to particle conversion-gas exchange technique for direct analysis of metal carbonyl gas by inductively coupled plasma mass spectrometry.
abstract: A novel gas to particle conversion-gas exchange technique for the direct analysis of metal carbonyl gas by inductively coupled plasma mass spectrometry (ICPMS) was proposed and demonstrated in the present study. The technique is based on a transfer of gas into particle, which can be directly analyzed by ICPMS. Particles from metal carbonyl gases such as Cr(CO)6, Mo(CO)6, and W(CO)6 are formed by reaction with ozone (O3) and ammonium (NH3) gases within a newly developed gas to particle conversion device (GPD). The reaction mechanism of the gas to particle conversion is based on either oxidation of metal carbonyl gas by O3 or agglomeration of metal oxide with ammonium nitrate (NH4NO3) which is generated by the reaction of O3 and NH3. To separate the reaction gases (remaining O3 and NH3) from the formed particles, a previously reported gas exchange device (GED) was used and the in argon stabilized analyte particles were directly introduced and measured by ICPMS. This new technique provided limits of detection (LOD) of 0.15 pL L(-1) (0.32 ng m(-3)), 0.02 pL L(-1) (0.07 ng m(-3)), and 0.01 pL L(-1) (0.07 ng m(-3)) for Cr(CO)6, Mo(CO)6, and W(CO)6, respectively, which were 4-5 orders of magnitude lower than those conventional applied for detecting these gases, e.g., gas chromatography with electron captured detector (GC-ECD) as well as Fourier transform-infrared spectroscopy (FT-IR). The achieved LODs were also similar or slightly better than those for ICPMS coupled to GC. Since the gas to particle conversion technique can achieve the direct measurement of metal carbonyl gases as well as the removal of reaction and ambient gases from metal carbonyl gases, the technique is considered to be well suited to monitor gas quality in semiconductor industry, engine exhaust gases, and or waste incineration products.
authors.affiliation: J-Science Lab Co. Ltd. , 3-1 Hiuchigata, Kamitoba, Minami-ku, Kyoto 601-8144, Japan.
authors.forename: Kohei
authors.initials: K
authors.lastname: Nishiguchi
authors.forename: Keisuke
authors.initials: K
authors.lastname: Utani
authors.forename: Detlef
authors.initials: D
authors.lastname: Gunther
authors.forename: Masaki
authors.initials: M
authors.lastname: Ohata