title: Highly deformable liquid-state heterojunction sensors.
abstract: Mechanically deformable devices and sensors enable conformal coverage of electronic systems on curved and soft surfaces. Sensors utilizing liquids confined in soft templates as the sensing component present the ideal platform for such applications, as liquids are inherently more deformable than solids. However, to date, liquid-based devices have been limited to metal lines based on a single-liquid component given the difficulty in the fabrication of liquid-based junctions due to intermixing. Here, we demonstrate a robust platform for the fabrication of liquid-liquid 'heterojunction' devices, presenting an important advancement towards the realization of liquid-state electronic systems. The device architecture and fabrication scheme we present are generic for different sensing liquids, enabling demonstration of sensors responsive to different stimuli. As a proof of concept, we demonstrate temperature, humidity and oxygen sensors by using different ionic liquids, exhibiting high sensitivity with excellent mechanical deformability arising from the inherent property of the liquid phase.
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Hiroki
authors.initials: H
authors.lastname: Ota
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Kevin
authors.initials: K
authors.lastname: Chen
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Yongjing
authors.initials: Y
authors.lastname: Lin
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Daisuke
authors.initials: D
authors.lastname: Kiriya
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Shiraki
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Zhibin
authors.initials: Z
authors.lastname: Yu
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Tae-Jun
authors.initials: TJ
authors.lastname: Ha
authors.affiliation: 1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA [2] Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, California 94720, USA [3] Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Ali
authors.initials: A
authors.lastname: Javey