title: Silicon optical modulator with shield coplanar waveguide electrodes.
abstract: A silicon Mach-Zehnder Interferometer (MZI) optical modulator with a shield coplanar waveguide (CPW) transmission line electrode design was demonstrated. This shield-CPW electrode suppresses the signal distortion caused by the parasitic slot-line (SL) mode and improves the electrical bandwidth and the electro-optical (EO) bandwidth. With the shield-CPW electrodes and 5.5 mm-long phase shifters, the silicon MZI optical modulator delivered an EO bandwidth of above 24 GHz and a V (π) = 3.0 V was achieved at λ = 1310 nm. When modulated at 28-Gb/s data rate, it achieved an extinction ratio of 5.66 dB under a driving voltage of V (pp) = 1.3 V, corresponding to a power consumption of 0.8 pJ/bit.
authors.forename: Xiaoguang
authors.initials: X
authors.lastname: Tu
authors.forename: Ka-Fai
authors.initials: KF
authors.lastname: Chang
authors.forename: Tsung-Yang
authors.initials: TY
authors.lastname: Liow
authors.forename: Junfeng
authors.initials: J
authors.lastname: Song
authors.forename: Xianshu
authors.initials: X
authors.lastname: Luo
authors.forename: Lianxi
authors.initials: L
authors.lastname: Jia
authors.forename: Qing
authors.initials: Q
authors.lastname: Fang
authors.forename: Mingbin
authors.initials: M
authors.lastname: Yu
authors.forename: Guo-Qiang
authors.initials: GQ
authors.lastname: Lo
authors.forename: Po
authors.initials: P
authors.lastname: Dong
authors.forename: Young-Kai
authors.initials: YK
authors.lastname: Chen
mesh_terms: D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation*; D055096:Optical Devices; D012031:Refractometry / Q000295:instrumentation*; D012666:Semiconductors; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D012825:Silicon; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D012825:Silicon