title: Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching.
abstract: In this letter, the uniform 4H silicon carbide (SiC) mesopores was fabricated by pulsed electrochemical etching method. The length of the mesopores is about 19 μm with a diameter of about 19 nm. The introduction of pause time (T off) is crucial to form the uniform 4H-SiC mesopores. The pore diameter will not change if etching goes with T off. The hole concentration decreasing at the pore tips during the T off is the main reason for uniformity.
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Jia-Hui
authors.initials: JH
authors.lastname: Tan
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Zhi-Zhan
authors.initials: ZZ
authors.lastname: Chen
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Wu-Yue
authors.initials: WY
authors.lastname: Lu
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Yue
authors.initials: Y
authors.lastname: Cheng
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Hong
authors.initials: H
authors.lastname: He
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Yi-Hong
authors.initials: YH
authors.lastname: Liu
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Yu-Jun
authors.initials: YJ
authors.lastname: Sun
authors.affiliation: Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China.
authors.forename: Gao-Jie
authors.initials: GJ
authors.lastname: Zhao
keywords: Constant pulsed current; Cycle time; Pause time; Uniform mesopores