title: Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet.
abstract: An extremely compact soft x-ray microscope operating in the "water window" region at the wavelength λ = 2.88 nm is presented, making use of a long-term stable and nearly debris-free laser-induced plasma from a pulsed nitrogen gas jet target. The well characterized soft x-ray radiation is focused by an ellipsoidal grazing incidence condenser mirror. Imaging of a sample onto a CCD camera is achieved with a Fresnel zone plate using magnifications up to 500x. The spatial resolution of the recorded microscopic images is about 100 nm as demonstrated for a Siemens star test pattern.
authors.forename: Matthias
authors.initials: M
authors.lastname: Müller
authors.forename: Tobias
authors.initials: T
authors.lastname: Mey
authors.forename: Jürgen
authors.initials: J
authors.lastname: Niemeyer
authors.forename: Klaus
authors.initials: K
authors.lastname: Mann
mesh_terms: D003952:Diagnostic Imaging / Q000295:instrumentation*; D003941:Diagnostic Techniques, Ophthalmological / Q000295:instrumentation*; D017377:Diatoms / Q000648:ultrastructure*; D004867:Equipment Design; D006801:Humans; D007834:Lasers; D008027:Light; D008853:Microscopy / Q000379:methods*; D014965:X-Rays