title: Full-field X-ray microscopy with crossed partial multilayer Laue lenses.
abstract: We demonstrate full-field X-ray microscopy using crossed multilayer Laue lenses (MLL). Two partial MLLs are prepared out of a 48 μm high multilayer stack consisting of 2451 alternating zones of WSi2 and Si. They are assembled perpendicularly in series to obtain two-dimensional imaging. Experiments are done in a laboratory X-ray microscope using Cu-Kα radiation (E = 8.05 keV, focal length f = 8.0 mm). Sub-100 nm resolution is demonstrated without mixed-order imaging at an appropriate position of the image plane. Although existing deviations from design parameters still cause aberrations, MLLs are a promising approach to realize hard X-ray microscopy at high efficiencies with resolutions down to the sub-10 nm range in future.
authors.forename: Sven
authors.initials: S
authors.lastname: Niese
authors.forename: Peter
authors.initials: P
authors.lastname: Krüger
authors.forename: Adam
authors.initials: A
authors.lastname: Kubec
authors.forename: Stefan
authors.initials: S
authors.lastname: Braun
authors.forename: Jens
authors.initials: J
authors.lastname: Patommel
authors.forename: Christian G
authors.initials: CG
authors.lastname: Schroer
authors.forename: Andreas
authors.initials: A
authors.lastname: Leson
authors.forename: Ehrenfried
authors.initials: E
authors.lastname: Zschech