title: Coded aperture detector: an image sensor with sub 20-nm pixel resolution.
abstract: We describe the coded aperture detector, a novel image sensor based on uniformly redundant arrays (URAs) with customizable pixel size, resolution, and operating photon energy regime. In this sensor, a coded aperture is scanned laterally at the image plane of an optical system, and the transmitted intensity is measured by a photodiode. The image intensity is then digitally reconstructed using a simple convolution. We present results from a proof-of-principle optical prototype, demonstrating high-fidelity image sensing comparable to a CCD. A 20-nm half-pitch URA fabricated by the Center for X-ray Optics (CXRO) nano-fabrication laboratory is presented that is suitable for high-resolution image sensing at EUV and soft X-ray wavelengths.
authors.forename: Ryan
authors.initials: R
authors.lastname: Miyakawa
authors.forename: Rafael
authors.initials: R
authors.lastname: Mayer
authors.forename: Antoine
authors.initials: A
authors.lastname: Wojdyla
authors.forename: Nicolas
authors.initials: N
authors.lastname: Vannier
authors.forename: Ian
authors.initials: I
authors.lastname: Lesser
authors.forename: Shifrah
authors.initials: S
authors.lastname: Aron-Dine
authors.forename: Patrick
authors.initials: P
authors.lastname: Naulleau