title: Improving accuracy in period measurement of gratings with multiple diffraction orders.
abstract: Determining the period of a grating generating multiple diffraction orders from the data of diffraction angle measurement is not an easy task, mainly because of positioning error. We propose a novel technique, i.e., numerically adjusting the specimen position, to solve the problem. The procedure alone would reduce the amount of uncertainty by two orders of magnitude.
authors.forename: Hiroyuki
authors.initials: H
authors.lastname: Ichikawa
authors.forename: Tomohiro
authors.initials: T
authors.lastname: Toda