title: Single shot interferogram analysis for optical metrology.
abstract: We report a novel constrained optimization method for single shot interferogram analysis. The unknown test wavefront is estimated as a minimum L2-norm squared solution whose phase is constrained to the space spanned by a finite number of Zernike polynomials. Using a single frame from standard phase shifting datasets, we demonstrate that our approach provides a phase map that matches with that generated using phase shifting algorithms to within λ/100  rms error. Our simulations and experimental results suggest the possibility of a simplified low-cost high quality optical metrology system for performing routine metrology tests involving smooth surface profiles.
authors.forename: Mahendra Pratap
authors.initials: MP
authors.lastname: Singh
authors.forename: Mandeep
authors.initials: M
authors.lastname: Singh
authors.forename: Kedar
authors.initials: K
authors.lastname: Khare