title: A serial-kinematic nanopositioner for high-speed atomic force microscopy.
abstract: A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by using tapered flexures is proposed to increased the natural frequency of the nanopositioner. 25% increase in the natural frequency is achieved due to reduced mass with tapered flexures. Second, a study of possible sensor positioning in a serial-kinematic nanopositioner is presented. An arrangement of sensors for exact estimation of cross-coupling is incorporated in the proposed design. A feedforward control strategy based on phaser approach is presented to mitigate the dynamics and nonlinearity in the system. Limitations in design approach and control strategy are discussed in the Conclusion.
authors.affiliation: School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW, Australia.
authors.forename: Sachin P
authors.initials: SP
authors.lastname: Wadikhaye
authors.affiliation: School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW, Australia.
authors.forename: Yuen Kuan
authors.initials: YK
authors.lastname: Yong
authors.affiliation: School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW, Australia.
authors.forename: S O Reza
authors.initials: SO
authors.lastname: Moheimani