title: A three-dimensional microdisplacement sensing system based on MEMS bulk-silicon technology.
abstract: For the dimensional measurement and characterization of microsized and nanosized components, a three-dimensional microdisplacement sensing system was developed using the piezoresistive effect in silicon. The sensor was fabricated using microelectromechanical system bulk-silicon technology, and it was validated using the finite element method. A precise data acquisition circuit with an accuracy of 20 μV was designed to obtain weak voltage signals. By calibration, the sensing system was shown to have a sensitivity of 17.29 mV/μm and 4.59 mV/μm in the axial and lateral directions, respectively; the nonlinearity in these directions was 0.8% and 1.0% full scale, respectively. A full range of 4.6 μm was achieved in the axial direction. Results of a resolution test indicated that the sensing system had a resolution of 5 nm in the axial direction and 10 nm in the lateral direction.
authors.affiliation: School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, China. wujunjiesimt@gmail.com.
authors.forename: Junjie
authors.initials: J
authors.lastname: Wu
authors.affiliation: Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, No. 1500, Zhangheng Road, Shanghai 201203, China. leilh@simt.com.cn.
authors.forename: Lihua
authors.initials: L
authors.lastname: Lei
authors.affiliation: School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, China. xchen.ie@sjtu.edu.cn.
authors.forename: Xin
authors.initials: X
authors.lastname: Chen
authors.affiliation: Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, No. 1500, Zhangheng Road, Shanghai 201203, China. caixiaoyu@simt.com.cn.
authors.forename: Xiaoyu
authors.initials: X
authors.lastname: Cai
authors.affiliation: Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, No. 1500, Zhangheng Road, Shanghai 201203, China. liyuan@simt.com.cn.
authors.forename: Yuan
authors.initials: Y
authors.lastname: Li
authors.affiliation: School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, China. than@sjtu.edu.cn.
authors.forename: Tao
authors.initials: T
authors.lastname: Han