title: Wafer scale formation of monocrystalline silicon-based Mie resonators via silicon-on-insulator dewetting.
abstract: Subwavelength-sized dielectric Mie resonators have recently emerged as a promising photonic platform, as they combine the advantages of dielectric microstructures and metallic nanoparticles supporting surface plasmon polaritons. Here, we report the capabilities of a dewetting-based process, independent of the sample size, to fabricate Si-based resonators over large scales starting from commercial silicon-on-insulator (SOI) substrates. Spontaneous dewetting is shown to allow the production of monocrystalline Mie-resonators that feature two resonant modes in the visible spectrum, as observed in confocal scattering spectroscopy. Homogeneous scattering responses and improved spatial ordering of the Si-based resonators are observed when dewetting is assisted by electron beam lithography. Finally, exploiting different thermal agglomeration regimes, we highlight the versatility of this technique, which, when assisted by focused ion beam nanopatterning, produces monocrystalline nanocrystals with ad hoc size, position, and organization in complex multimers.
authors.affiliation: CNRS, Aix-Marseille Université , Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France.
authors.forename: Marco
authors.initials: M
authors.lastname: Abbarchi
authors.forename: Meher
authors.initials: M
authors.lastname: Naffouti
authors.forename: Benjamin
authors.initials: B
authors.lastname: Vial
authors.forename: Abdelmalek
authors.initials: A
authors.lastname: Benkouider
authors.forename: Laurent
authors.initials: L
authors.lastname: Lermusiaux
authors.forename: Luc
authors.initials: L
authors.lastname: Favre
authors.forename: Antoine
authors.initials: A
authors.lastname: Ronda
authors.forename: Sébastien
authors.initials: S
authors.lastname: Bidault
authors.forename: Isabelle
authors.initials: I
authors.lastname: Berbezier
authors.forename: Nicolas
authors.initials: N
authors.lastname: Bonod
keywords: Mie resonators; all-dielectric nanophotonics; silicon nanoparticles; thin fim dewetting