title: An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset.
abstract: High-quality frequency references are the cornerstones in position, navigation and timing applications of both scientific and commercial domains. Optomechanical oscillators, with direct coupling to continuous-wave light and non-material-limited f × Q product, are long regarded as a potential platform for frequency reference in radio-frequency-photonic architectures. However, one major challenge is the compatibility with standard CMOS fabrication processes while maintaining optomechanical high quality performance. Here we demonstrate the monolithic integration of photonic crystal optomechanical oscillators and on-chip high speed Ge detectors based on the silicon CMOS platform. With the generation of both high harmonics (up to 59 th order) and subharmonics (down to 1/4), our chipset provides multiple frequency tones for applications in both frequency multipliers and dividers. The phase noise is measured down to -125 dBc/Hz at 10 kHz offset at ~400 μW dropped-in powers, one of the lowest noise optomechanical oscillators to date and in room-temperature and atmospheric non-vacuum operating conditions. These characteristics enable optomechanical oscillators as a frequency reference platform for radio-frequency-photonic information processing.
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Xingsheng
authors.initials: X
authors.lastname: Luan
authors.affiliation: 1] Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA [2] Key Laboratory of Broadband Optical Fiber Transmission &Communication Networks, School of Communication and Information Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China.
authors.forename: Yongjun
authors.initials: Y
authors.lastname: Huang
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Ying
authors.initials: Y
authors.lastname: Li
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: James F
authors.initials: JF
authors.lastname: McMillan
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Jiangjun
authors.initials: J
authors.lastname: Zheng
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Shu-Wei
authors.initials: SW
authors.lastname: Huang
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Pin-Chun
authors.initials: PC
authors.lastname: Hsieh
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Tingyi
authors.initials: T
authors.lastname: Gu
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Di
authors.initials: D
authors.lastname: Wang
authors.affiliation: National Institute of Standards and Technology, Boulder, CO 80303, USA.
authors.forename: Archita
authors.initials: A
authors.lastname: Hati
authors.affiliation: National Institute of Standards and Technology, Boulder, CO 80303, USA.
authors.forename: David A
authors.initials: DA
authors.lastname: Howe
authors.affiliation: Key Laboratory of Broadband Optical Fiber Transmission &Communication Networks, School of Communication and Information Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China.
authors.forename: Guangjun
authors.initials: G
authors.lastname: Wen
authors.affiliation: The Institute of Microelectronics, 11 Science Park Road, Singapore 117685, Singapore.
authors.forename: Mingbin
authors.initials: M
authors.lastname: Yu
authors.affiliation: The Institute of Microelectronics, 11 Science Park Road, Singapore 117685, Singapore.
authors.forename: Guoqiang
authors.initials: G
authors.lastname: Lo
authors.affiliation: The Institute of Microelectronics, 11 Science Park Road, Singapore 117685, Singapore.
authors.forename: Dim-Lee
authors.initials: DL
authors.lastname: Kwong
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York, NY 10027, USA.
authors.forename: Chee Wei
authors.initials: CW
authors.lastname: Wong