title: An orthogonal return method for linearly polarized beam based on the Faraday effect and its application in interferometer.
abstract: Correct return of the measuring beam is essential for laser interferometers to carry out measurement. In the actual situation, because the measured object inevitably rotates or laterally moves, not only the measurement accuracy will decrease, or even the measurement will be impossibly performed. To solve this problem, a novel orthogonal return method for linearly polarized beam based on the Faraday effect is presented. The orthogonal return of incident linearly polarized beam is realized by using a Faraday rotator with the rotational angle of 45°. The optical configuration of the method is designed and analyzed in detail. To verify its practicability in polarization interferometry, a laser heterodyne interferometer based on this method was constructed and precision displacement measurement experiments were performed. These results show that the advantage of the method is that the correct return of the incident measuring beam is ensured when large lateral displacement or angular rotation of the measured object occurs and then the implementation of interferometric measurement can be ensured.
authors.affiliation: Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China.
authors.forename: Benyong
authors.initials: B
authors.lastname: Chen
authors.affiliation: Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China.
authors.forename: Enzheng
authors.initials: E
authors.lastname: Zhang
authors.affiliation: Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China.
authors.forename: Liping
authors.initials: L
authors.lastname: Yan
authors.affiliation: Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China.
authors.forename: Yanna
authors.initials: Y
authors.lastname: Liu