title: A high-precision instrument for mapping of rotational errors in rotary stages.
abstract: A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.
authors.affiliation: Photon Sciences, Brookhaven National Laboratory, Upton, NY 11973, USA.
authors.forename: Weihe
authors.initials: W
authors.lastname: Xu
authors.affiliation: Photon Sciences, Brookhaven National Laboratory, Upton, NY 11973, USA.
authors.forename: Kenneth
authors.initials: K
authors.lastname: Lauer
authors.affiliation: Photon Sciences, Brookhaven National Laboratory, Upton, NY 11973, USA.
authors.forename: Yong
authors.initials: Y
authors.lastname: Chu
authors.affiliation: Photon Sciences, Brookhaven National Laboratory, Upton, NY 11973, USA.
authors.forename: Evgeny
authors.initials: E
authors.lastname: Nazaretski
mesh_terms: D004867:Equipment Design; D006801:Humans; D021621:Imaging, Three-Dimensional / Q000295:instrumentation* / Q000379:methods; D012399:Rotation; D012680:Sensitivity and Specificity; D014057:Tomography, X-Ray Computed / Q000295:instrumentation* / Q000379:methods
keywords: high-precision instrument; rotary stages; rotational errors