Hexagonal Ag nanoarrays induced enhancement of blue light emission from amorphous oxidized silicon nitride via localized surface plasmon coupling.
A significant enhancement of blue light emission from amorphous oxidized silicon nitride (a-SiNx:O) films is achieved by introduction of ordered and size-controllable arrays of Ag nanoparticles between the silicon substrate and a-SiNx:O films. Using hexagonal arrays of Ag nanoparticles fabricated by nanosphere lithography, the localized surface plasmons (LSPs) resonance can effectively increase the internal quantum efficiency from 3.9% to 13.3%. Theoretical calculation confirms that the electromagnetic field-intensity enhancement is through the dipole surface plasma coupling with the excitons of a-SiNx:O films, which demonstrates a-SiNx:O films with enhanced blue emission are promising for silicon-based light-emitting applications by patterned Ag arrays.
Zhongyuan
Z
Ma
Xiaodong
X
Ni
Wenping
W
Zhang
Xiaofan
X
Jiang
Huafeng
H
Yang
Jie
J
Yu
Wen
W
Wang
Ling
L
Xu
Jun
J
Xu
Kunji
K
Chen
Duan
D
Feng
D008027:Light; D053768:Metal Nanoparticles / Q000032:analysis*; D036103:Nanotechnology / Q000295:instrumentation*; D055095:Optics and Photonics; D012825:Silicon / Q000737:chemistry*; D017655:Silicon Compounds / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
D017655:Silicon Compounds; C032734:silicon nitride; D012825:Silicon