Comparison of waveguide properties and Raman spectroscopic visualization of C and O ion implantation on LaAlO(3) crystals.
LaAlO3crystals were implanted by C ions and O ions at an energy of 6.0 MeV with a fluence of 1.5×1015ions/cm2. The profiles of the guided modes were measured through prism coupling and end-face coupling methods with a 633 nm laser source. A nonleaky waveguide structure in the TM mode was fabricated by O ion implantation after a proper annealing treatment. Characteristics of the implanted C and O ions were compared. Some changes of the full width at half of the maximum and intensity of the Raman spectra were observed between the waveguide and substrate regions in LaAlO3crystals. Thus, the Raman spectra can be used to visualize any damage or defects in the LaAlO3crystals during the implantation process.
Mei
M
Qiao
Tie-Jun
TJ
Wang
Xiao-Fei
XF
Yu
Hong-Lian
HL
Song
Jing
J
Guan
Peng
P
Liu
Jin-Hua
JH
Zhao
Xue-Lin
XL
Wang