Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step.
Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films. Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process.
Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy).|CSIRO, Division of Materials Science and Engineering Private Bag 33, Clayton South MDC, Victoria 3169 (Australia).
Paolo
P
Falcaro
Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy).
Luca
L
Malfatti
Sincrotrone Trieste S.C.p.A. S.S. 14, Km163.5, 34012 Basovizza TS (Italy).
Lisa
L
Vaccari
Institute of Biophysics and Nanosystems Research, Austrian Academy of Sciences Schmiedlstraße 6, 8042, Graz (Austria).
Heinz
H
Amenitsch
Institute of Biophysics and Nanosystems Research, Austrian Academy of Sciences Schmiedlstraße 6, 8042, Graz (Austria).
Benedetta
B
Marmiroli
TASC, INFM National Laboratory S.S. 14, Km163.5 in Area Science Park, 34012 Basovizza, Trieste (Italy).
Gianluca
G
Grenci
Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy).
Plinio
P
Innocenzi
deep X-ray lithography; lithography; microfluidic; sol-gel; synchrotron light