Servo-integrated patterned media by hybrid directed self-assembly.
A hybrid directed self-assembly approach is developed to fabricate unprecedented servo-integrated bit-patterned media templates, by combining sphere-forming block copolymers with 5 teradot/in.(2) resolution capability, nanoimprint and optical lithography with overlay control. Nanoimprint generates prepatterns with different dimensions in the data field and servo field, respectively, and optical lithography controls the selective self-assembly process in either field. Two distinct directed self-assembly techniques, low-topography graphoepitaxy and high-topography graphoepitaxy, are elegantly integrated to create bit-patterned templates with flexible embedded servo information. Spinstand magnetic test at 1 teradot/in.(2) shows a low bit error rate of 10(-2.43), indicating fully functioning bit-patterned media and great potential of this approach for fabricating future ultra-high-density magnetic storage media.
Media Research Center, Seagate Technology , 47010 Kato Road, Fremont, California 94538, United States.
Shuaigang
S
Xiao
Xiaomin
X
Yang
Philip
P
Steiner
Yautzong
Y
Hsu
Kim
K
Lee
Koichi
K
Wago
David
D
Kuo
bit-patterned media; block copolymer; directed self-assembly; overlay; servo integration; spinstand