title: Fabrication of a plasmonic modulator incorporating an overlaid grating coupler.
abstract: The fabrication of a novel plasmonic reflection modulator is presented and described. The modulator includes plasmon excitation using a diffraction grating coupler and is based on a metal-insulator-semiconductor structure on silicon. Fabrication includes a thin thermal oxide, a plasmonic metal surface defined by optical lithography, a metal grating coupler defined by overlaid e-beam lithography, a passivation layer with metalized vias, and electrical contacts. Physical characterization of intermediate structures is provided along with modulation measurements at λ0 ∼ 1550 nm which verify the concept.
authors.affiliation: Department of Chemical and Biological Engineering, University of Ottawa, 161 Louis Pasteur St., Ottawa, ON K1N 6N5, Canada.
authors.forename: Sa'ad
authors.initials: S
authors.lastname: Hassan
authors.forename: Ewa
authors.initials: E
authors.lastname: Lisicka-Skrzek
authors.forename: Anthony
authors.initials: A
authors.lastname: Olivieri
authors.forename: R Niall
authors.initials: RN
authors.lastname: Tait
authors.forename: Pierre
authors.initials: P
authors.lastname: Berini