title: Development of a piezoelectric vacuum sensing component for a wide pressure range.
abstract: In this study, we develop a clamped-clamped beam-type piezoelectric vacuum pressure sensing element. The clamped-clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous forces on the piezoelectric beam vary at different air pressures, the vibration of the beam depends on the vacuum pressure. The developed pressure sensor can sense a wide range of pressure, from 6.5 × 10(-6) to 760 Torr. The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage.
authors.affiliation: Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan. sunny_0419@hotmail.com.
authors.forename: Bing-Yu
authors.initials: BY
authors.lastname: Wang
authors.affiliation: Instrument Technology Research Center, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan. fchsieh@itrc.narl.org.tw.
authors.forename: Fan-Chun
authors.initials: FC
authors.lastname: Hsieh
authors.affiliation: Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan. fchsieh@itrc.narl.org.tw.
authors.forename: Che-Yu
authors.initials: CY
authors.lastname: Lin
authors.affiliation: Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan. gear49761101@hotmail.com.
authors.forename: Shao-En
authors.initials: SE
authors.lastname: Chen
authors.affiliation: Instrument Technology Research Center, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan. chen@itrc.narl.org.tw.
authors.forename: Fong-Zhi
authors.initials: FZ
authors.lastname: Chen
authors.affiliation: Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan. josephwu@dragon.nchu.edu.tw.
authors.forename: Chia-Che
authors.initials: CC
authors.lastname: Wu