title: Note: development of high speed confocal 3D profilometer.
abstract: A high-speed confocal 3D profilometer based on the chromatic confocal technology and spinning Nipkow disk technique has been developed and tested. It can measure a whole surface topography by taking only one image that requires less than 0.3 s. Surface height information is retrieved based on the ratios of red, green, and blue color information. A new vector projection technique has developed to enhance the vertical resolution of the measurement. The measurement accuracy of the prototype system has been verified via different test samples.
authors.affiliation: Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.
authors.forename: Kar Tien
authors.initials: KT
authors.lastname: Ang
authors.affiliation: Singapore Institute of Manufacturing Technology, 71, Nanyang Drive, Singapore 638075.
authors.forename: Zhong Ping
authors.initials: ZP
authors.lastname: Fang
authors.affiliation: Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.
authors.forename: Arthur
authors.initials: A
authors.lastname: Tay