title: CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries.
abstract: The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au and Cu) coatings by successive magnetron sputtering technique. The Cu-coated nb-Si show the most promising electrochemical performance enhancements for the initial specific capacity as well as their cyclability compared to pristine nb-Si. The electrochemical and microstructural properties before and after cycling of the metal-coated nb-Si compared to their pristine counterparts are discussed in detail.
authors.affiliation: Fraunhofer Institute for Mechanics of Materials IWM, Halle (Saale) 06120 Germany ; Department of Physics, Martin-Luther University of Halle-Wittenberg, Halle (Saale) 06099, Germany.
authors.forename: Gibaek
authors.initials: G
authors.lastname: Lee
authors.affiliation: Department of Physics, Martin-Luther University of Halle-Wittenberg, Halle (Saale) 06099, Germany.
authors.forename: Stefan L
authors.initials: SL
authors.lastname: Schweizer
authors.affiliation: Fraunhofer Institute for Mechanics of Materials IWM, Halle (Saale) 06120 Germany ; Department of Physics, Martin-Luther University of Halle-Wittenberg, Halle (Saale) 06099, Germany.
authors.forename: Ralf B
authors.initials: RB
authors.lastname: Wehrspohn
keywords: 1-D nanowires on black silicon; Anode materials; Electrochemical characterization; Lithium-ion batteries; Metal coating