title: A micro-fabricated force sensor using an all thin film piezoelectric active sensor.
abstract: The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.
authors.affiliation: Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea. mindsjw@gmail.com.
authors.forename: Junwoo
authors.initials: J
authors.lastname: Lee
authors.affiliation: Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea. duddnjsi2@naver.com.
authors.forename: Wook
authors.initials: W
authors.lastname: Choi
authors.affiliation: Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea. yongkyoung0108@gmail.com.
authors.forename: Yong Kyoung
authors.initials: YK
authors.lastname: Yoo
authors.affiliation: Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea. kshwang@kist.re.kr.
authors.forename: Kyo Seon
authors.initials: KS
authors.lastname: Hwang
authors.affiliation: Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea. sangmyung@kangwon.ac.kr.
authors.forename: Sang-Myung
authors.initials: SM
authors.lastname: Lee
authors.affiliation: Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea. kasch@kist.re.kr.
authors.forename: Sungchul
authors.initials: S
authors.lastname: Kang
authors.affiliation: Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea. jinseok@kist.re.kr.
authors.forename: Jinseok
authors.initials: J
authors.lastname: Kim
authors.affiliation: Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea. jhlee@kw.ac.kr.
authors.forename: Jeong Hoon
authors.initials: JH
authors.lastname: Lee
mesh_terms: D032701:Biomimetics / Q000295:instrumentation*; D008365:Manometry / Q000295:instrumentation*; D008567:Membranes, Artificial; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D011312:Pressure; D013314:Stress, Mechanical; D014110:Touch; D014160:Transducers, Pressure
chemical_list: D008567:Membranes, Artificial