title: Note: development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source.
abstract: We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.
authors.affiliation: Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.
authors.forename: Thanh Hung
authors.initials: TH
authors.lastname: Dinh
authors.affiliation: Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.
authors.forename: Yuhei
authors.initials: Y
authors.lastname: Suzuki
authors.affiliation: Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan.
authors.forename: Ryoichi
authors.initials: R
authors.lastname: Hirose
authors.affiliation: Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.
authors.forename: Hiroyuki
authors.initials: H
authors.lastname: Hara
authors.affiliation: Graduate School of Science and Engineering for Research, University of Toyama, Toyama, Toyama 930-8555, Japan.
authors.forename: Hayato
authors.initials: H
authors.lastname: Ohashi
authors.affiliation: School of Physics, University College Dublin, Belfield, Dublin 4, Ireland.
authors.forename: Bowen
authors.initials: B
authors.lastname: Li
authors.affiliation: School of Physics, University College Dublin, Belfield, Dublin 4, Ireland.
authors.forename: Padraig
authors.initials: P
authors.lastname: Dunne
authors.affiliation: School of Physics, University College Dublin, Belfield, Dublin 4, Ireland.
authors.forename: Gerry
authors.initials: G
authors.lastname: O'Sullivan
authors.affiliation: Institute for Laser Technology, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan.
authors.forename: Atsushi
authors.initials: A
authors.lastname: Sunahara
authors.affiliation: Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.
authors.forename: Takeshi
authors.initials: T
authors.lastname: Higashiguchi