title: A new silicon drift detector for high spatial resolution STEM-XEDS: performance and applications.
abstract: A newly designed, 100 mm2, silicon drift detector has been installed on an aberration-corrected scanning transmission electron microscope equipped with an ultra-high resolution pole piece, without requiring column modifications. With its unique, windowless design, the detector's active region is in close proximity to the sample, resulting in a dramatic increase in count rate, while demonstrating an increased sensitivity to low energy X-rays and a muted tilt dependence. Numerous examples of X-ray energy dispersive spectrometry are presented on relevant materials such as Al x Ga1-x N nanowires, perovskite oxides, and polycrystalline CdTe thin films, across both varying length scales and accelerating voltages.
authors.affiliation: 1Department of Physics,University of Illinois at Chicago,845 W Taylor Street,Chicago,IL 60607,USA.
authors.forename: Patrick J
authors.initials: PJ
authors.lastname: Phillips
authors.affiliation: 1Department of Physics,University of Illinois at Chicago,845 W Taylor Street,Chicago,IL 60607,USA.
authors.forename: Tadas
authors.initials: T
authors.lastname: Paulauskas
authors.affiliation: 2Oxford Instruments NanoAnalysis,Halifax Road,High Wycombe,HP12 3SE,UK.
authors.forename: Neil
authors.initials: N
authors.lastname: Rowlands
authors.affiliation: 3Research Resources Center,University of Illinois at Chicago,845 W Taylor Street,Chicago,IL 60607,USA.
authors.forename: Alan W
authors.initials: AW
authors.lastname: Nicholls
authors.affiliation: 4BASF,25 Middlesex/Essex Turnpike,Iselin,NJ 08830,USA.
authors.forename: Ke-Bin
authors.initials: KB
authors.lastname: Low
authors.affiliation: 2Oxford Instruments NanoAnalysis,Halifax Road,High Wycombe,HP12 3SE,UK.
authors.forename: Santokh
authors.initials: S
authors.lastname: Bhadare
authors.affiliation: 1Department of Physics,University of Illinois at Chicago,845 W Taylor Street,Chicago,IL 60607,USA.
authors.forename: Robert F
authors.initials: RF
authors.lastname: Klie