title: Quantitative investigation of SiGeC layers using atom probe tomography.
abstract: The quantification of carbon and germanium in a Si/SiGeC multilayer structure using atom probe tomography has been investigated as a function of analysis conditions. The best conditions for quantitative results are obtained using an intermediate electric field and laser power. Carbon evaporation shows strong spatial and temporal correlation. By using multi-ion event analysis, an evaporation mechanism is put forward to explain the modification of mass spectra as a function of electric field and laser power.
authors.affiliation: CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France. Electronic address: robert.estivill@cea.fr.
authors.forename: Robert
authors.initials: R
authors.lastname: Estivill
authors.affiliation: CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
authors.forename: Adeline
authors.initials: A
authors.lastname: Grenier
authors.affiliation: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors.forename: Sébastien
authors.initials: S
authors.lastname: Duguay
authors.affiliation: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors.forename: François
authors.initials: F
authors.lastname: Vurpillot
authors.affiliation: CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
authors.forename: Tanguy
authors.initials: T
authors.lastname: Terlier
authors.affiliation: CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
authors.forename: Jean-Paul
authors.initials: JP
authors.lastname: Barnes
authors.affiliation: CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
authors.forename: Jean-Michel
authors.initials: JM
authors.lastname: Hartmann
authors.affiliation: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors.forename: Didier
authors.initials: D
authors.lastname: Blavette
keywords: Atom probe; Carbon doped SiGe; Molecular ions; Multi-events; SiGe quantification