title: [Progress in the application of laser ablation ICP-MS to surface microanalysis in material science].
abstract: In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).
authors.forename: Yong
authors.initials: Y
authors.lastname: Zhang
authors.forename: Yun-hai
authors.initials: YH
authors.lastname: Jia
authors.forename: Ji-wen
authors.initials: JW
authors.lastname: Chen
authors.forename: Xue-jing
authors.initials: XJ
authors.lastname: Shen
authors.forename: Ying
authors.initials: Y
authors.lastname: Liu
authors.forename: Leiz
authors.initials: L
authors.lastname: Zhao
authors.forename: Dong-ling
authors.initials: DL
authors.lastname: Li
authors.forename: Peng-cheng
authors.initials: PC
authors.lastname: Hang
authors.forename: Zhen
authors.initials: Z
authors.lastname: Zhao
authors.forename: Wan-lun
authors.initials: WL
authors.lastname: Fan
authors.forename: Hai-zhou
authors.initials: HZ
authors.lastname: Wang