title: Visible light curing of Epon SU-8 based superparamagnetic polymer composites with random and ordered particle configurations.
abstract: The performance of superparamagnetic polymer composite microdevices is highly dependent on the magnetic particle content. While high loading levels are desired for many applications, the UV absorption of these nanoparticles limits the overall thickness of the fabricated microstructures and subsequently their capability of magnetic interaction. The combination of a visible-light-sensitive photoinitiator and particle self-organization is proposed to extend the exposure depth limitation in Epon SU-8 based superparamagnetic polymer composites. While superparamagnetic iron oxide particles strongly absorb i-line radiation required to cross-link the Epon SU-8 polymer matrix, we propose the utilization of H-Nu 470 photoinitiator to expand the photosensitivity of the composite toward the visible spectrum, where the dispersed nanoparticles are more transparent. The novel photoinitiator preserves the composite's superparamagnetic properties as well as a homogeneous particle distribution. As a result, particle load or resist thickness can be more than doubled while maintaining exposure time. The self-organization of ordered magnetic structures allows for an additional increase in exposure depth of up to 40%, resulting in a 2.5-fold saturation magnetization.
authors.affiliation: Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich , Tannenstrasse 3, 8092 Zurich, Switzerland.
authors.forename: Christian
authors.initials: C
authors.lastname: Peters
authors.forename: Olgaç
authors.initials: O
authors.lastname: Ergeneman
authors.forename: Georgios A
authors.initials: GA
authors.lastname: Sotiriou
authors.forename: Hongsoo
authors.initials: H
authors.lastname: Choi
authors.forename: Bradley J
authors.initials: BJ
authors.lastname: Nelson
authors.forename: Christofer
authors.initials: C
authors.lastname: Hierold
keywords: H-Nu 470; lithography; magnetite; superparamagnetic polymer composite; visible light curing