title: A high-performance LC wireless passive pressure sensor fabricated using low-temperature co-fired ceramic (LTCC) technology.
abstract: An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar.
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xuechenyang@nuc.edu.cn.
authors.forename: Chen
authors.initials: C
authors.lastname: Li
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulinnuc@163.com.
authors.forename: Qiulin
authors.initials: Q
authors.lastname: Tan
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. xuechenyang@nuc.edu.cn.
authors.forename: Chenyang
authors.initials: C
authors.lastname: Xue
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. wdzhang@nuc.edu.cn.
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. lyz111@nuc.edu.cn.
authors.forename: Yunzhi
authors.initials: Y
authors.lastname: Li
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xiongjijun@nuc.edu.cn.
authors.forename: Jijun
authors.initials: J
authors.lastname: Xiong