title: Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner.
abstract: In this paper, a novel X-Y parallel piezoelectric-actuator driven nanopositioner is studied from the perspectives of design optimization, dynamical modeling, as well as controller synthesis for high precision positioning. FEM (Finite Element Method) and dynamical modeling are provided to analyze the mechatronic structure of the proposed two-dimensional nano-stage, where the system model, including the hysteresis loop, is derived analytically and further verified experimentally. A robust control architecture incorporating an H∞ controller and an anti-windup compensator is then developed to deal with the hysteresis and saturation nonlinearities of the piezoelectric actuators. Real time experiments on the nano-stage platform demonstrate good robustness, high precision positioning and tracking performance, as well as recovery speed in the presence of saturation.
authors.affiliation: Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Shandong University), Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Pengbo
authors.initials: P
authors.lastname: Liu
authors.affiliation: Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Shandong University), Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong 250061, China; School of Automation Science and Electrical Engineering, Beihang University, Beijing 100191, China. Electronic address: PengYan2007@gmail.com.
authors.forename: Peng
authors.initials: P
authors.lastname: Yan
authors.affiliation: Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China; Beijing Key Lab of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, 100084, China.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Zhang
authors.affiliation: Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Shandong University), Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong 250061, China.
authors.forename: Tongtong
authors.initials: T
authors.lastname: Leng
keywords: Anti-windup compensator; Control saturation; Hysteresis; Nanopositioner; controller