title: Large Stroke Vertical PZT Microactuator With High-Speed Rotational Scanning.
abstract: A thin-film piezoelectric microactuator using a novel combination of active vertical translational scanning and passive resonant rotational scanning is presented. Thin-film lead-zirconate-titanate unimorph bending beams surrounding a central platform provide nearly 200-μm displacement at 18 V with bandwidth greater than 200 Hz. Inside the platform, a mirror mount, or mirror surface, supported by silicon dioxide spring beams can be excited to resonance by low-voltage; high-frequency excitation of the outer PZT beams. Over ±5.5° mechanical resonance is obtained at 3.8 kHz and ±2 V. The combination of large translational vertical displacements and high-speed rotational scanning is intended to support real-time cross-sectional imaging in a dual axes confocal endomicroscope.
authors.affiliation: Department of Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Qiu
authors.affiliation: Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Choong-Ho
authors.initials: CH
authors.lastname: Rhee
authors.affiliation: Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Jongsoo
authors.initials: J
authors.lastname: Choi
authors.affiliation: Department of Internal Medicine, Biomedical Enginering, and Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Thomas D
authors.initials: TD
authors.lastname: Wang
authors.affiliation: Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Kenn R
authors.initials: KR
authors.lastname: Oldham
keywords: Microactuators; microscopy; piezoelectric transducers