title: Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.
abstract: We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.
authors.affiliation: School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Huang
authors.initials: H
authors.lastname: Gao
authors.affiliation: School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Yaowu
authors.initials: Y
authors.lastname: Hu
authors.affiliation: School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Yi
authors.initials: Y
authors.lastname: Xuan
authors.affiliation: School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Ji
authors.initials: J
authors.lastname: Li
authors.affiliation: School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Yingling
authors.initials: Y
authors.lastname: Yang
authors.affiliation: Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA Madrid Institute for Advanced Studies, IMDEA Nanoscience, Ciudad Universitaria de Cantoblanco, 28049 Madrid, Spain.
authors.forename: Ramses V
authors.initials: RV
authors.lastname: Martinez
authors.affiliation: Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Chunyu
authors.initials: C
authors.lastname: Li
authors.affiliation: Department of NanoEngineering, University of California, San Diego, La Jolla, CA 92093, USA.
authors.forename: Jian
authors.initials: J
authors.lastname: Luo
authors.affiliation: School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Minghao
authors.initials: M
authors.lastname: Qi
authors.affiliation: School of Industrial Engineering, Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, Purdue University, West Lafayette, IN 47907, USA School of Mechanical Engineering, Purdue University, West Lafayette, IN 47907, USA. gjcheng@purdue.edu.
authors.forename: Gary J
authors.initials: GJ
authors.lastname: Cheng
mesh_terms: D003460:Crystallization; D020342:Finite Element Analysis; D006046:Gold; D006108:Graphite; D007834:Lasers; D053768:Metal Nanoparticles; D046529:Microscopy, Electron, Transmission; D056004:Molecular Dynamics Simulation; D036103:Nanotechnology / Q000379:methods*; D013499:Surface Properties
chemical_list: D006046:Gold; D006108:Graphite