title: Enabling complex nanoscale pattern customization using directed self-assembly.
abstract: Block copolymer directed self-assembly is an attractive method to fabricate highly uniform nanoscale features for various technological applications, but the dense periodicity of block copolymer features limits the complexity of the resulting patterns and their potential utility. Therefore, customizability of nanoscale patterns has been a long-standing goal for using directed self-assembly in device fabrication. Here we show that a hybrid organic/inorganic chemical pattern serves as a guiding pattern for self-assembly as well as a self-aligned mask for pattern customization through cotransfer of aligned block copolymer features and an inorganic prepattern. As informed by a phenomenological model, deliberate process engineering is implemented to maintain global alignment of block copolymer features over arbitrarily shaped, 'masking' features incorporated into the chemical patterns. These hybrid chemical patterns with embedded customization information enable deterministic, complex two-dimensional nanoscale pattern customization through directed self-assembly.
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Gregory S
authors.initials: GS
authors.lastname: Doerk
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Joy Y
authors.initials: JY
authors.lastname: Cheng
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Gurpreet
authors.initials: G
authors.lastname: Singh
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Charles T
authors.initials: CT
authors.lastname: Rettner
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Jed W
authors.initials: JW
authors.lastname: Pitera
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Srinivasan
authors.initials: S
authors.lastname: Balakrishnan
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Noel
authors.initials: N
authors.lastname: Arellano
authors.affiliation: IBM Research-Almaden, 650 Harry Road, San Jose, California 95120, USA.
authors.forename: Daniel P
authors.initials: DP
authors.lastname: Sanders