title: High quality-factor optical nanocavities in bulk single-crystal diamond.
abstract: Single-crystal diamond, with its unique optical, mechanical and thermal properties, has emerged as a promising material with applications in classical and quantum optics. However, the lack of heteroepitaxial growth and scalable fabrication techniques remains the major limiting factors preventing more wide-spread development and application of diamond photonics. In this work, we overcome this difficulty by adapting angled-etching techniques, previously developed for realization of diamond nanomechanical resonators, to fabricate racetrack resonators and photonic crystal cavities in bulk single-crystal diamond. Our devices feature large optical quality factors, in excess of 105, and operate over a wide wavelength range, spanning visible and telecom. These newly developed high-Q diamond optical nanocavities open the door for a wealth of applications, ranging from nonlinear optics and chemical sensing, to quantum information processing and cavity optomechanics.
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Michael J
authors.initials: MJ
authors.lastname: Burek
authors.affiliation: Department of Physics, Harvard University, 17 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Yiwen
authors.initials: Y
authors.lastname: Chu
authors.affiliation: 1] School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA [2] University of Waterloo, 200 University Avenue West, Waterloo, Ontario, Canada N2L 3G1.
authors.forename: Madelaine S Z
authors.initials: MS
authors.lastname: Liddy
authors.affiliation: 1] School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA [2] University of Waterloo, 200 University Avenue West, Waterloo, Ontario, Canada N2L 3G1.
authors.forename: Parth
authors.initials: P
authors.lastname: Patel
authors.affiliation: 1] School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA [2] University of Waterloo, 200 University Avenue West, Waterloo, Ontario, Canada N2L 3G1.
authors.forename: Jake
authors.initials: J
authors.lastname: Rochman
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Srujan
authors.initials: S
authors.lastname: Meesala
authors.affiliation: Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Wooyoung
authors.initials: W
authors.lastname: Hong
authors.affiliation: Rowland Institute at Harvard, Harvard University, 100 Edwin H. Land Boulevard, Cambridge, Massachusetts 02142, USA.
authors.forename: Qimin
authors.initials: Q
authors.lastname: Quan
authors.affiliation: Department of Physics, Harvard University, 17 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Mikhail D
authors.initials: MD
authors.lastname: Lukin
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, USA.
authors.forename: Marko
authors.initials: M
authors.lastname: Lončar