title: Gas sensing properties of nanocrystalline diamond at room temperature.
abstract: This study describes an integrated NH3 sensor based on a hydrogenated nanocrystalline diamond (NCD)-sensitive layer coated on an interdigitated electrode structure. The gas sensing properties of the sensor structure were examined using a reducing gas (NH3) at room temperature and were found to be dependent on the electrode arrangement. A pronounced response of the sensor, which was comprised of dense electrode arrays (of 50 µm separation distance), was observed. The sensor functionality was explained by the surface transfer doping effect. Moreover, the three-dimensional model of the current density distribution of the hydrogenated NCD describes the transient flow of electrons between interdigitated electrodes and the hydrogenated NCD surface, that is, the formation of a closed current loop.
authors.affiliation: Institute of Physics, Academy of Science of the Czech Republic, Cukrovarnicka 10, 16200 Prague, Czech Republic.
authors.forename: Marina
authors.initials: M
authors.lastname: Davydova
authors.affiliation: Department of Microelectronics, Faculty of Electrical Engineering, CTU in Prague, Technicka 2, 16627 Prague, Czech Republic.
authors.forename: Pavel
authors.initials: P
authors.lastname: Kulha
authors.affiliation: Department of Microelectronics, Faculty of Electrical Engineering, CTU in Prague, Technicka 2, 16627 Prague, Czech Republic.
authors.forename: Alexandr
authors.initials: A
authors.lastname: Laposa
authors.affiliation: Institute of Physics, Academy of Science of the Czech Republic, Cukrovarnicka 10, 16200 Prague, Czech Republic.
authors.forename: Karel
authors.initials: K
authors.lastname: Hruska
authors.affiliation: Institute of Physics, Academy of Science of the Czech Republic, Cukrovarnicka 10, 16200 Prague, Czech Republic.
authors.forename: Pavel
authors.initials: P
authors.lastname: Demo
authors.affiliation: Institute of Physics, Academy of Science of the Czech Republic, Cukrovarnicka 10, 16200 Prague, Czech Republic.
authors.forename: Alexander
authors.initials: A
authors.lastname: Kromka
keywords: gas sensor; integrator; interdigitated electrodes; nanocrystalline diamond; response