title: Tuning the phase transition of ZnO thin films through lithography: an integrated bottom-up and top-down processing.
abstract: An innovative approach towards the physico-chemical tailoring of zinc oxide thin films is reported. The films have been deposited by liquid phase using the sol-gel method and then exposed to hard X-rays, provided by a synchrotron storage ring, for lithography. The use of surfactant and chelating agents in the sol allows easy-to-pattern films made by an organic-inorganic matrix to be deposited. The exposure to hard X-rays strongly affects the nucleation and growth of crystalline ZnO, triggering the formation of two intermediate phases before obtaining a wurtzite-like structure. At the same time, X-ray lithography allows for a fast patterning of the coatings enabling microfabrication for sensing and arrays technology.
authors.affiliation: Laboratorio di Scienza dei Materiali e Nanotecnologie, CR-INSTM, Università di Sassari, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (SS), Italy.
authors.forename: Luca
authors.initials: L
authors.lastname: Malfatti
authors.affiliation: Laboratorio di Scienza dei Materiali e Nanotecnologie, CR-INSTM, Università di Sassari, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (SS), Italy.
authors.forename: Alessandra
authors.initials: A
authors.lastname: Pinna
authors.affiliation: Dipartimento di Chimica e Farmacia, Università di Sassari, Local INSTM Unit, Via Vienna 2, 07100 Sassari, Italy.
authors.forename: Stefano
authors.initials: S
authors.lastname: Enzo
authors.affiliation: Division of Materials Science and Engineering, CSIRO, Private Bag 33, Clayton South MDC, Victoria 3169, Australia.
authors.forename: Paolo
authors.initials: P
authors.lastname: Falcaro
authors.affiliation: Institute of Inorganic Chemistry, Graz University of Technology, Stremayrgasse 9/IV, 8010 Graz, Austria.
authors.forename: Benedetta
authors.initials: B
authors.lastname: Marmiroli
authors.affiliation: Laboratorio di Scienza dei Materiali e Nanotecnologie, CR-INSTM, Università di Sassari, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (SS), Italy.
authors.forename: Plinio
authors.initials: P
authors.lastname: Innocenzi
keywords: bottom-up/top-down; lithography; sol–gel; thin film; zinc oxide