title: Electrical contacts to individual SWCNTs: A review.
abstract: Owing to their superior electrical characteristics, nanometer dimensions and definable lengths, single-walled carbon nanotubes (SWCNTs) are considered as one of the most promising materials for various types of nanodevices. Additionally, they can be used as either passive or active elements. To be integrated into circuitry or devices, they are typically connected with metal leads to provide electrical contacts. The properties and quality of these electrical contacts are important for the function and performance of SWCNT-based devices. Since carbon nanotubes are quasi-one-dimensional structures, contacts to them are different from those for bulk semiconductors. Additionally, some techniques used in Si-based technology are not compatible with SWCNT-based device fabrication, such as the contact area cleaning technique. In this review, an overview of the investigations of metal-SWCNT contacts is presented, including the principle of charge carrier injection through the metal-SWCNT contacts and experimental achievements. The methods for characterizing the electrical contacts are discussed as well. The parameters which influence the contact properties are summarized, mainly focusing on the contact geometry, metal type and the cleanliness of the SWCNT surface affected by the fabrication processes. Moreover, the challenges for widespread application of CNFETs are additionally discussed.
authors.affiliation: Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland.
authors.forename: Wei
authors.initials: W
authors.lastname: Liu
authors.affiliation: Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland.
authors.forename: Christofer
authors.initials: C
authors.lastname: Hierold
authors.affiliation: Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland.
authors.forename: Miroslav
authors.initials: M
authors.lastname: Haluska
keywords: CNFET; SWCNT; charge carrier transport; electrical contact; metal–SWCNT interface