title: Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors.
abstract: Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å(-1) (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.
authors.affiliation: Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: A
authors.initials: A
authors.lastname: Biswas
authors.affiliation: Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: R
authors.initials: R
authors.lastname: Sampathkumar
authors.affiliation: Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: Ajaya
authors.initials: A
authors.lastname: Kumar
authors.affiliation: Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: D
authors.initials: D
authors.lastname: Bhattacharyya
authors.affiliation: Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
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authors.initials: NK
authors.lastname: Sahoo
authors.affiliation: Division of Remote Handling & Robotics, Bhabha Atomic Research Centre, Mumbai 400 085, India.
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authors.initials: KD
authors.lastname: Lagoo
authors.affiliation: Division of Remote Handling & Robotics, Bhabha Atomic Research Centre, Mumbai 400 085, India.
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authors.initials: RD
authors.lastname: Veerapur
authors.affiliation: Division of Remote Handling & Robotics, Bhabha Atomic Research Centre, Mumbai 400 085, India.
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authors.initials: M
authors.lastname: Padmanabhan
authors.affiliation: Division of Remote Handling & Robotics, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: R K
authors.initials: RK
authors.lastname: Puri
authors.affiliation: Solid State Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: Debarati
authors.initials: D
authors.lastname: Bhattacharya
authors.affiliation: Solid State Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: Surendra
authors.initials: S
authors.lastname: Singh
authors.affiliation: Solid State Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
authors.forename: S
authors.initials: S
authors.lastname: Basu