title: Performance comparison of cross-like Hall plates with different covering layers.
abstract: This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. lvfeieric@gmail.com.
authors.forename: Fei
authors.initials: F
authors.lastname: Lyu
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. zhangzhenyan518@163.com.
authors.forename: Zhenyan
authors.initials: Z
authors.lastname: Zhang
authors.affiliation: GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore. EngHuat.TOH@globalfoundries.com.
authors.forename: Eng-Huat
authors.initials: EH
authors.lastname: Toh
authors.affiliation: GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore. XinFu.LIU@globalfoundries.com.
authors.forename: Xinfu
authors.initials: X
authors.lastname: Liu
authors.affiliation: GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore. YINJIE.DING@globalfoundries.com.
authors.forename: Yinjie
authors.initials: Y
authors.lastname: Ding
authors.affiliation: Nanjing Foreign Language School, Nanjing 210008, China. panyifanhappy@163.com.
authors.forename: Yifan
authors.initials: Y
authors.lastname: Pan
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. lichengjie.520@163.com.
authors.forename: Chengjie
authors.initials: C
authors.lastname: Li
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. lili@nju.edu.cn.
authors.forename: Li
authors.initials: L
authors.lastname: Li
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. shajin@nju.edu.cn.
authors.forename: Jin
authors.initials: J
authors.lastname: Sha
authors.affiliation: School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. phb@nju.edu.cn.
authors.forename: Hongbing
authors.initials: H
authors.lastname: Pan