title: The smallest resonator arrays in atmosphere by chip-size-grown nanowires with tunable Q-factor and frequency for subnanometer thickness detection.
abstract: A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is developed to effectively identify the resonance of NW resonator with diameter 50 nm in atmosphere. Size-effect and half-dimensional properties of the NW resonator have been systematically studied. Additionally, VNR has been demonstrated with the ability of detecting nanofilm thickness with subnanometer (<10(-9)m) resolution.
authors.affiliation: Department of Metallurgical and Materials Engineering, Center for Materials for Information Technology (MINT), The University of Alabama , Tuscaloosa, Alabama 35487, United States.
authors.forename: Chengming
authors.initials: C
authors.lastname: Jiang
authors.forename: Chaolong
authors.initials: C
authors.lastname: Tang
authors.forename: Jinhui
authors.initials: J
authors.lastname: Song
keywords: NEMS; Nanowire resonator; half-dimension; nanoresonator arrays; size-effect; thickness detection