title: Fabrication of flexible microlens array through vapor-induced room temperature dewetting on plasma treated Parylene-C.
abstract: Microlens arrays have been widely used as an essential component in many optical systems. The conventional fabrication techniques, such as ink-jet printing, photoresist thermal reflow, grayscale photolithography, and LIGA process have some drawbacks in aspects of process complexity and high fabrication cost. This paper presents a low-temperature, rapid and cost-effective method to successfully generate SU-8 microlens arrays on biocompatible Parylene-C surfaces. Vapor-induced SU-8 dewetting has been achieved on chemically modified Parylene-C surfaces that were selectively pre-treated with O(2) or SF(6) plasma. By this technique, the SU-8 droplets are self-organized onto desired positions to form a microlens array. This method is also suitable for production of microlens array on curved surfaces. The progress of dewetting has been studied by both experiment and simulation.
authors.lastname: Xiaopeng Bi
authors.lastname: Wen Li
mesh_terms: D003198:Computer Simulation; D008853:Microscopy; D055616:Microtechnology / Q000295:instrumentation* / Q000379:methods*; D058626:Plasma Gases / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*; D013499:Surface Properties; D013696:Temperature; D014867:Water / Q000737:chemistry*; D014992:Xylenes / Q000737:chemistry*
chemical_list: D058626:Plasma Gases; D011108:Polymers; D014992:Xylenes; D014867:Water; C011055:parylene