title: 2.5D heterogeneously integrated microsystem for high-density neural sensing applications.
abstract: Heterogeneously integrated and miniaturized neural sensing microsystems are crucial for brain function investigation. In this paper, a 2.5D heterogeneously integrated bio-sensing microsystem with μ-probes and embedded through-silicon-via (TSVs) is presented for high-density neural sensing applications. This microsystem is composed of μ-probes with embedded TSVs, 4 dies and a silicon interposer. For capturing 16-channel neural signals, a 24 × 24 μ-probe array with embedded TSVs is fabricated on a 5×5 mm(2) chip and bonded on the back side of the interposer. Thus, each channel contains 6 × 6 μ -probes with embedded TSVs. Additionally, the 4 dies are bonded on the front side of the interposer and designed for biopotential acquisition, feature extraction and classification via low-power analog front-end (AFE) circuits, area-power-efficient analog-to-digital converters (ADCs), configurable discrete wavelet transforms (DWTs), filters, and a MCU. An on-interposer bus ( μ-SPI) is designed for transferring data on the interposer. Finally, the successful in-vivo test demonstrated the proposed 2.5D heterogeneously integrated bio-sensing microsystem. The overall power of this microsystem is only 676.3 μW for 16-channel neural sensing.
authors.forename: Po-Tsang
authors.initials: PT
authors.lastname: Huang
authors.forename: Shang-Lin
authors.initials: SL
authors.lastname: Wu
authors.forename: Yu-Chieh
authors.initials: YC
authors.lastname: Huang
authors.forename: Lei-Chun
authors.initials: LC
authors.lastname: Chou
authors.forename: Teng-Chieh
authors.initials: TC
authors.lastname: Huang
authors.forename: Tang-Hsuan
authors.initials: TH
authors.lastname: Wang
authors.forename: Yu-Rou
authors.initials: YR
authors.lastname: Lin
authors.forename: Chuan-An
authors.initials: CA
authors.lastname: Cheng
authors.forename: Wen-Wei
authors.initials: WW
authors.lastname: Shen
authors.forename: Ching-Te
authors.initials: CT
authors.lastname: Chuang
authors.forename: Kuan-Neng
authors.initials: KN
authors.lastname: Chen
authors.forename: Jin-Chern
authors.initials: JC
authors.lastname: Chiou
authors.forename: Wei
authors.initials: W
authors.lastname: Hwang
authors.forename: Ho-Ming
authors.initials: HM
authors.lastname: Tong
mesh_terms: D006801:Humans; D064926:Neurophysiological Monitoring / Q000295:instrumentation* / Q000379:methods*; D058998:Remote Sensing Technology / Q000295:instrumentation* / Q000379:methods*