title: A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications.
abstract: In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs. We also propose a simple state-of-the-art fabrication methodology for the same. As compared to the standard Silicon Nitride CMUTs, the proposed structure gives the same electromechanical coupling coefficient with lower membrane dimensions and low pull-in voltage which in turn results in reduced area and power consumption. Moreover the proposed fabrication methodology is a low temperature process which makes it CMOS compatible.
authors.forename: Jose
authors.initials: J
authors.lastname: Joseph
authors.forename: Shiv Govind
authors.initials: SG
authors.lastname: Singh
authors.forename: Siva Rama Krishna
authors.initials: SR
authors.lastname: Vanjari
mesh_terms: D003952:Diagnostic Imaging / Q000379:methods*; D025802:Electric Capacitance; D004852:Epoxy Compounds / Q000737:chemistry*; D004867:Equipment Design; D055616:Microtechnology / Q000295:instrumentation*; D011108:Polymers / Q000737:chemistry*; D017655:Silicon Compounds / Q000737:chemistry; D014159:Transducers; D014465:Ultrasonics / Q000295:instrumentation*
chemical_list: D004852:Epoxy Compounds; D011108:Polymers; C520895:SU-8 compound; D017655:Silicon Compounds; C032734:silicon nitride