title: Strain gauge using Si-based optical microring resonator.
abstract: This paper presents a strain gauge using the mechanical-optical coupling method. The Si-based optical microring resonator was employed as the sensing element, which was embedded on the microcantilevers. The experimental results show that applying external strain triggers a clear redshift of the output resonant spectrum of the structure. The sensitivity of 93.72  pm/MPa was achieved, which also was verified using theoretical simulations. This paper provides what we believe is a new method to develop micro-opto-electromechanical system (MOEMS) sensors.
authors.forename: Longhai
authors.initials: L
authors.lastname: Lei
authors.forename: Jun
authors.initials: J
authors.lastname: Tang
authors.forename: Tianen
authors.initials: T
authors.lastname: Zhang
authors.forename: Hao
authors.initials: H
authors.lastname: Guo
authors.forename: Yanna
authors.initials: Y
authors.lastname: Li
authors.forename: Chengfeng
authors.initials: C
authors.lastname: Xie
authors.forename: Chenglong
authors.initials: C
authors.lastname: Shang
authors.forename: Yu
authors.initials: Y
authors.lastname: Bi
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang
authors.forename: Chenyang
authors.initials: C
authors.lastname: Xue
authors.forename: Jun
authors.initials: J
authors.lastname: Liu