title: Varifocal MOEMS fiber scanner for confocal endomicroscopy.
abstract: Based on an advanced silicon optical bench technology with integrated MOEMS (Micro-Opto-Electro-Mechanical-System) components, a piezo-driven fiber scanner for confocal microscopy has been developed. This highly-miniaturized technology allows integration into an endoscope with a total outer probe diameter of 2.5 mm. The system features a hydraulically-driven varifocal lens providing axial confocal scanning without any translational movement of components. The demonstrated resolutions are 1.7 μm laterally and 19 μm axially.
authors.forename: Tobias
authors.initials: T
authors.lastname: Meinert
authors.forename: Niklas
authors.initials: N
authors.lastname: Weber
authors.forename: Hans
authors.initials: H
authors.lastname: Zappe
authors.forename: Andreas
authors.initials: A
authors.lastname: Seifert