title: Generation of ensembles of individually resolvable nitrogen vacancies using nanometer-scale apertures in ultrahigh-aspect ratio planar implantation masks.
abstract: A central challenge in developing magnetically coupled quantum registers in diamond is the fabrication of nitrogen vacancy (NV) centers with localization below ∼20 nm to enable fast dipolar interaction compared to the NV decoherence rate. Here, we demonstrate the targeted, high throughput formation of NV centers using masks with a thickness of 270 nm and feature sizes down to ∼1 nm. Super-resolution imaging resolves NVs with a full-width maximum distribution of 26 ± 7 nm and a distribution of NV-NV separations of 16 ± 5 nm.
authors.affiliation: Department of Electrical Engineering and Computer Science, and Research Lab of Electronics, Massachusetts Institute of Technology , 77 Massachusetts Avenue, Building 36-575, Cambridge, Massachusetts 02139, United States.
authors.forename: Igal
authors.initials: I
authors.lastname: Bayn
authors.forename: Edward H
authors.initials: EH
authors.lastname: Chen
authors.forename: Matthew E
authors.initials: ME
authors.lastname: Trusheim
authors.forename: Luozhou
authors.initials: L
authors.lastname: Li
authors.forename: Tim
authors.initials: T
authors.lastname: Schröder
authors.forename: Ophir
authors.initials: O
authors.lastname: Gaathon
authors.forename: Ming
authors.initials: M
authors.lastname: Lu
authors.forename: Aaron
authors.initials: A
authors.lastname: Stein
authors.forename: Mingzhao
authors.initials: M
authors.lastname: Liu
authors.forename: Kim
authors.initials: K
authors.lastname: Kisslinger
authors.forename: Hannah
authors.initials: H
authors.lastname: Clevenson
authors.forename: Dirk
authors.initials: D
authors.lastname: Englund
keywords: diamond color centers; implantation mask; nanoaperture; nitrogen vacancy; quantum computing; spin chain