title: Miniature multi-contact MEMS switch for broadband terahertz modulation.
abstract: A miniature MEMS switch is designed, fabricated, and incorporated in a reconfigurable metallic mesh filter for broadband terahertz modulation. The mechanical, electrical, and geometrical properties of the MEMS switch are set to enable broadband terahertz modulation with relatively low modulation voltage, high modulation speed, and high device reliability. The implemented miniature MEMS switch exhibits an actuation voltage of 30 V, a fundamental mechanical resonance frequency of 272 kHz, and an actuation time of 1.23 μs, enabling terahertz modulation with a record high modulation depth of more than 70% over a terahertz band of 0.1-1.5 THz, with a modulation voltage of 30 V and modulation speeds exceeding 20 kHz.
authors.forename: Mehmet
authors.initials: M
authors.lastname: Unlu
authors.forename: Mona
authors.initials: M
authors.lastname: Jarrahi
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008839:Microelectrodes; D008904:Miniaturization; D055096:Optical Devices; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*; D055053:Terahertz Radiation