title: Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2.
abstract: In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.
authors.affiliation: Conacyt, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico. gabriel.gonzalez@uaslp.mx.
authors.forename: Gabriel
authors.initials: G
authors.lastname: González
authors.affiliation: Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico. samuel.kolosovas@uaslp.mx.
authors.forename: Eleazar Samuel
authors.initials: ES
authors.lastname: Kolosovas-Machuca
authors.affiliation: Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico. edgar.luna@uaslp.mx.
authors.forename: Edgar
authors.initials: E
authors.lastname: López-Luna
authors.affiliation: Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico. heber.hernandez@uaslp.mx.
authors.forename: Heber
authors.initials: H
authors.lastname: Hernández-Arriaga
authors.affiliation: Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico. javier.gonzalez@uaslp.mx.
authors.forename: Francisco Javier
authors.initials: FJ
authors.lastname: González
mesh_terms: D000818:Animals; D002417:Cattle; D003198:Computer Simulation; D025802:Electric Capacitance; D004867:Equipment Design; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D009716:Numerical Analysis, Computer-Assisted; D012710:Serum Albumin, Bovine / Q000378:metabolism; D055672:Static Electricity
chemical_list: D012710:Serum Albumin, Bovine