title: Integrated optical dual-cantilever arrays in silica on silicon.
abstract: A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.
authors.forename: Peter A
authors.initials: PA
authors.lastname: Cooper
authors.forename: Lewis G
authors.initials: LG
authors.lastname: Carpenter
authors.forename: Paolo L
authors.initials: PL
authors.lastname: Mennea
authors.forename: Christopher
authors.initials: C
authors.lastname: Holmes
authors.forename: James C
authors.initials: JC
authors.lastname: Gates
authors.forename: Peter G R
authors.initials: PG
authors.lastname: Smith
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D055096:Optical Devices; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*; D013314:Stress, Mechanical; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D018511:Systems Integration; D014160:Transducers, Pressure
chemical_list: D012822:Silicon Dioxide; D012825:Silicon