title: Development of a monochromator for aberration-corrected scanning transmission electron microscopy.
abstract: In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV. In an EELS mapping experiment performed on SrTiO3 with a monochromated electron probe whose energy resolution is 146 meV, an elemental map exhibits atomic resolution.
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan mmukai@jeol.co.jp.
authors: Masaki
authors: M
authors: Mukai
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Eiji
authors: E
authors: Okunishi
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Masanori
authors: M
authors: Ashino
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Kazuya
authors: K
authors: Omoto
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Tomohisa
authors: T
authors: Fukuda
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Akihiro
authors: A
authors: Ikeda
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Kazunori
authors: K
authors: Somehara
authors: JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors: Toshikatsu
authors: T
authors: Kaneyama
authors: Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan.
authors: Tomohiro
authors: T
authors: Saitoh
authors: Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan.
authors: Tsukasa
authors: T
authors: Hirayama
authors: Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan.
authors: Yuichi
authors: Y
authors: Ikuhara
keywords: Wien filter; aberration corrector; atomic-resolution EELS mapping; high-resolution EELS; high-resolution STEM; monochromator