title: Note: Eddy current displacement sensors independent of target conductivity.
abstract: Eddy current sensors (ECSs) are widely used for non-contact displacement measurement. In this note, the quantitative error of an ECS caused by target conductivity was analyzed using a complex image method. The response curves (L-x) of the ECS with different targets were similar and could be overlapped by shifting the curves on x direction with √2δ/2. Both finite element analysis and experiments match well with the theoretical analysis, which indicates that the measured error of high precision ECSs caused by target conductivity can be completely eliminated, and the ECSs can measure different materials precisely without calibration.
authors: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China.
authors: Hongbo
authors: H
authors: Wang
authors: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China.
authors: Wei
authors: W
authors: Li
authors: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China.
authors: Zhihua
authors: Z
authors: Feng