title: High-resolution, high-throughput imaging with a multibeam scanning electron microscope.
abstract: Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.
authors: Carl Zeiss Microscopy GmbH, Oberkochen, Germany.
authors: A L
authors: AL
authors: Eberle
authors: Max-Planck-Institute for Medical Research, Heidelberg, Germany.
authors: S
authors: S
authors: Mikula
authors: Department of Molecular and Cell Biology, Harvard University, Cambridge, Massachusetts, U.S.A.
authors: R
authors: R
authors: Schalek
authors: Department of Molecular and Cell Biology, Harvard University, Cambridge, Massachusetts, U.S.A.
authors: J
authors: J
authors: Lichtman
authors: Graduate School of Biomedical Engineering, University of New South Wales, Sydney, Australia.
authors: M L Knothe
authors: MLK
authors: Tate
authors: Carl Zeiss Microscopy GmbH, Oberkochen, Germany.
authors: D
authors: D
authors: Zeidler
mesh_terms: D000818:Animals; D001921:Brain / Q000648:ultrastructure; D004583:Electrons; D051379:Mice; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods*; D012666:Semiconductors
keywords: High-throughput imaging; multibeam; parallel data acquisition; scanning electron microscopy
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