title: Wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible biomedical platform.
abstract: We present wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible parylene platform, as progress toward sustainably powering biomedical microsystems suitable for implantable and wearable applications. All-solid-state, low-profile (<30 μm), and high-density (up to ~500 μF/mm(2)) micro-supercapacitors are formed on an ultrathin (~20 μm) freestanding parylene film by a wafer-scale parylene packaging process in combination with a polyaniline (PANI) nanowire growth technique assisted by surface plasma treatment. These micro-supercapacitors are highly flexible and shown to be resilient toward flexural stress. Further, direct integration of micro-supercapacitors into a radio frequency (RF) rectifying circuit is achieved on a single parylene platform, yielding a complete RF energy harvesting microsystem. The system discharging rate is shown to improve by ~17 times in the presence of the integrated micro-supercapacitors. This result suggests that the integrated micro-supercapacitor technology described herein is a promising strategy for sustainably powering biomedical microsystems dedicated to implantable and wearable applications.
authors: Center for Implantable Devices, Weldon School of Biomedical Engineering, Purdue University, West Lafayette, IN, 47907, USA, jmaeng@purdue.edu.
authors: Jimin
authors: J
authors: Maeng
authors: Chuizhou
authors: C
authors: Meng
authors: Pedro P
authors: PP
authors: Irazoqui
mesh_terms: D025802:Electric Capacitance; D008567:Membranes, Artificial; D053770:Nanowires / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry; D058998:Remote Sensing Technology / Q000295:instrumentation* / Q000379:methods*; D014992:Xylenes / Q000737:chemistry
chemical_list: D008567:Membranes, Artificial; D011108:Polymers; D014992:Xylenes; C011055:parylene