title: Compensation for the variable cyclic error in homodyne laser interferometers.
abstract: This paper presents a real-time method to compensate for the variable cyclic error in a homodyne laser interferometer. The parameters describing the quadrature signals of the interferometer are estimated using simple peak value detectors. The cyclic error in the homodyne laser interferometer was then corrected through simple arithmetic calculations of the quadrature signals. A field programmable gate array was utilized for the real-time compensation of the cyclic error in a homodyne laser interferometer. The simulation and experimental results indicated that the proposed method could provide a cyclic error that was fixed without compensation down to a value under 0.6 nm in a homodyne laser interferometer. The proposed method could also reduce the time-varying cyclic error to a value under 0.6 nm in a homodyne laser interferometer, in contrast to the equivalent value of 13.3 nm for a conventional elliptical fitting method.
authors: Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. hupc@hit.edu.cn.
authors: Pengcheng
authors: P
authors: Hu
authors: Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 13B901015@hit.edu.cn.
authors: Jinghao
authors: J
authors: Zhu
authors: Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 13B901006@hit.edu.cn.
authors: Xuanbiao
authors: X
authors: Guo
authors: Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. jbtan@hit.edu.cn.
authors: Jiubin
authors: J
authors: Tan
references: Opt Lett. 2006 Sep 15;31(18):2692-4
references: 16936860
references: Opt Express. 2009 Dec 7;17(25):23299-308
references: 20052256
references: Opt Express. 2012 Sep 24;20(20):22195-207
references: 23037368
references: Appl Opt. 1981 Oct 1;20(19):3382-4
references: 20333158
references: Appl Opt. 2005 Jun 10;44(17):3492-8
references: 16007847