title: Crossed ring anchored disk resonator for self-alignment of the anchor.
abstract: Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q). Self-alignment method seems to be a good solution for misalignment problem, but it cannot be directly applied on high performance ring shape anchored resonators. This paper discusses misalignment effects for the ring shape anchored resonators and proposes a method for reconfiguring its anchor to be compatible with self-alignment process. Simulation results validate that the crossed ring anchor structure has the same resonance characteristics with the complete ring shape anchored resonator.
authors: Department of Electrical Engineering, Sahand University of Technology, Sahand New Town, P.O. Box 51335-1996, Tabriz, Iran.
authors: Masoud
authors: M
authors: Baghelani
authors: Department of Electrical Engineering, Sahand University of Technology, Sahand New Town, P.O. Box 51335-1996, Tabriz, Iran.
authors: Habib Badri
authors: HB
authors: Ghavifekr
authors: Department of Electrical Engineering, Sahand University of Technology, Sahand New Town, P.O. Box 51335-1996, Tabriz, Iran.
authors: Afshin
authors: A
authors: Ebrahimi
keywords: Insertion loss; Misalignment; Quality factor; RF MEMS resonator; Ring shaped anchor; Self-alignment