title: Design and fabrication of far ultraviolet filters based on π-multilayer technology in high-k materials.
abstract: Application of π-multilayer technology is extended to high extinction coefficient materials, which is introduced into metal-dielectric filter design. Metal materials often have high extinction coefficients in far ultraviolet (FUV) region, so optical thickness of metal materials should be smaller than that of the dielectric material. A broadband FUV filter of 9-layer non-periodic Al/MgF2 multilayer was successfully designed and fabricated and it shows high reflectance in 140-180 nm, suppressed reflectance in 120-137 nm and 181-220 nm.
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Xiao-Dong
authors: XD
authors: Wang
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Bo
authors: B
authors: Chen
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Hai-Feng
authors: HF
authors: Wang
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Fei
authors: F
authors: He
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Xin
authors: X
authors: Zheng
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Ling-Ping
authors: LP
authors: He
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Bin
authors: B
authors: Chen
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Shi-Jie
authors: SJ
authors: Liu
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Zhong-Xu
authors: ZX
authors: Cui
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Xiao-Hu
authors: XH
authors: Yang
authors: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
authors: Yun-Peng
authors: YP
authors: Li