title: TEM based high resolution and low-dose scanning electron nanodiffraction technique for nanostructure imaging and analysis.
abstract: We report a high resolution and low-dose scanning electron nanodiffraction (SEND) technique for nanostructure analysis. The SEND patterns are recorded in a transmission electron microscope (TEM) using a low-brightness ∼2 nm electron beam with a LaB6 thermionic source obtained by a large demagnification of the condenser 1 lens. The diffraction pattern is directly recorded using a CCD camera optimized for low-dose imaging. A custom script was developed for calibration and automated data acquisition. The performance of low-dose SEND is evaluated using nanostructured Au as a test sample for the quality of diffraction patterns, sample stability and probe size. We demonstrate that our method provides an effective and robust way for recording diffraction patterns from nanometer-sized grains.
authors: Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA; Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
authors: Kyou-Hyun
authors: KH
authors: Kim
authors: Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA; Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA; School of Materials Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, People's Republic of China.
authors: Hui
authors: H
authors: Xing
authors: Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA; Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA. Electronic address: jianzuo@illinois.edu.
authors: Jian-Min
authors: JM
authors: Zuo
authors: Western Digital Technologies, Inc., 44200 Osgood Road, Fremont CA, 94539, USA.
authors: Peng
authors: P
authors: Zhang
authors: Western Digital Technologies, Inc., 44200 Osgood Road, Fremont CA, 94539, USA.
authors: Haifeng
authors: H
authors: Wang
mesh_terms: D002138:Calibration; D004583:Electrons; D006046:Gold; D007091:Image Processing, Computer-Assisted / Q000379:methods*; D046529:Microscopy, Electron, Transmission / Q000379:methods*; D049329:Nanostructures / Q000032:analysis* / Q000648:ultrastructure*
chemical_list: D006046:Gold