title: The Structure and Properties of Amorphous Indium Oxide.
abstract: A series of In2O3thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In2O3were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), andab initiomolecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOxpolyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.
authors: Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States.
authors: D Bruce
authors: DB
authors: Buchholz
authors: DND-CAT, Northwestern Synchrotron Research Center at the Advanced Photon Source, Argonne National Laboratory , Argonne, Illinois 60439, United States.
authors: Qing
authors: Q
authors: Ma
authors: Department of Physics and Astronomy, University of Texas at San Antonio , San Antonio, Texas 78249, United States.
authors: Diego
authors: D
authors: Alducin
authors: Department of Physics and Astronomy, University of Texas at San Antonio , San Antonio, Texas 78249, United States.
authors: Arturo
authors: A
authors: Ponce
authors: Department of Physics and Astronomy, University of Texas at San Antonio , San Antonio, Texas 78249, United States.
authors: Miguel
authors: M
authors: Jose-Yacaman
authors: Department of Physics, Missouri University of Science & Technology , Rolla, Missouri 65409-0640, United States.
authors: Rabi
authors: R
authors: Khanal
authors: Department of Physics, Missouri University of Science & Technology , Rolla, Missouri 65409-0640, United States.
authors: Julia E
authors: JE
authors: Medvedeva
authors: Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States.
authors: Robert P H
authors: RP
authors: Chang