title: An APT investigation of an amorphous Cr-B-C thin film.
abstract: A magnetron sputtered amorphous Cr-B-C thin film was investigated by means of atom probe tomography (APT). The film is constituted of two phases; a Cr-rich phase present as a few nanometer large regions embedded in a Cr-poor phase (tissue phase). The Cr-rich regions form columnar chains oriented parallel to the growth direction of the film. It was found that the Cr-rich regions have a higher B:C ratio than the Cr-poor regions. The composition of the phases was determined as approximately 35Cr-33B-30C and 15Cr-40B-42C (at%), respectively. The results suggest that this type of nanocomposite films has a more complex structure than previously anticipated, which may have an importance for the mechanical and electrical properties.
authors: Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden.
authors: T
authors: T
authors: Boll
authors: Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden. Electronic address: mattias.thuvander@chalmers.se.
authors: M
authors: M
authors: Thuvander
authors: Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden.
authors: S
authors: S
authors: Koch
authors: KNMF, Karslruhe Institute of Technology, DE-76344 Eggenstein-Leopoldshafen, Germany.
authors: J N
authors: JN
authors: Wagner
authors: Department of Chemistry, The Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden.
authors: N
authors: N
authors: Nedfors
authors: Department of Chemistry, The Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden.
authors: U
authors: U
authors: Jansson
authors: Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden.
authors: K
authors: K
authors: Stiller
keywords: Atom probe tomography; Boride; Carbon; Cr–B–C; Metall carbo-boride; Nanocomposite; Thin film