title: Strong hydrophobizer: laterally chemisorbed low-molecular-weight polydimethylsiloxane.
abstract: We introduce a siloxane chain-based hydrophobizer that exhibits superior thermal and chemical stability compared to the conventional hydrophobizing silane agent under conditions of over 300 °C and pH 2-13. To demonstrate the capability of the siloxane chain-based hydrophobizer to serve as a highly robust chemical surface modifier, we present two applications: the formation of fine metal nanoparticles with a narrow size distribution by thermal aggregation of a metal thin film and the selective deposition of a ruthenium thin film by atomic layer deposition.
authors.affiliation: Department of Materials Science and Engineering, Yonsei University, 134 Shinchong-dong, Seoul 120-750, Republic Korea. thinfilm@yonsei.ac.kr.
authors.forename: Soo Sang
authors.initials: SS
authors.lastname: Chae
authors.forename: Jin Young
authors.initials: JY
authors.lastname: Oh
authors.forename: Jee Ho
authors.initials: JH
authors.lastname: Park
authors.forename: Won Jin
authors.initials: WJ
authors.lastname: Choi
authors.forename: Jeong Hwan
authors.initials: JH
authors.lastname: Han
authors.forename: Jeong-O
authors.initials: JO
authors.lastname: Lee
authors.forename: Hong Koo
authors.initials: HK
authors.lastname: Baik
authors.forename: Tae Il
authors.initials: TI
authors.lastname: Lee
mesh_terms: D000327:Adsorption; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D006358:Hot Temperature; D006863:Hydrogen-Ion Concentration; D057927:Hydrophobic and Hydrophilic Interactions; D053768:Metal Nanoparticles / Q000737:chemistry*; D008970:Molecular Weight; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D012428:Ruthenium / Q000737:chemistry*; D012834:Silver / Q000737:chemistry*
chemical_list: D004129:Dimethylpolysiloxanes; D012834:Silver; C013830:baysilon; D012428:Ruthenium