title: Transparent nanotubular capacitors based on transplanted anodic aluminum oxide templates.
abstract: Transparent AlZnO/Al2O3/AlZnO nanocapacitor arrays have been fabricated by atomic layer deposition in anodic aluminum oxide templates transplanted on the AlZnO/glass substrates. A high capacitance density of 37 fF/μm(2) is obtained, which is nearly 5.8 times bigger than that of planar capacitors. The capacitance density almost remains the same in a broad frequency range from 1 kHz to 200 kHz. Moreover, a low leakage current density of 1.7 × 10(-7) A/cm(2) at 1 V has been achieved. The nanocapacitors exhibit an average optical transmittance of more than 80% in the visible range, and thus open the door to practical applications in transparent integrated circuits.
authors.affiliation: Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, and School of Physics and Technology, Wuhan University , Wuhan 430072, China.
authors.forename: Guozhen
authors.initials: G
authors.lastname: Zhang
authors.forename: Hao
authors.initials: H
authors.lastname: Wu
authors.forename: Chao
authors.initials: C
authors.lastname: Chen
authors.forename: Ti
authors.initials: T
authors.lastname: Wang
authors.forename: Wenhui
authors.initials: W
authors.lastname: Wu
authors.forename: Jin
authors.initials: J
authors.lastname: Yue
authors.forename: Chang
authors.initials: C
authors.lastname: Liu
keywords: anodic aluminum oxide; atomic layer deposition; transparent capacitors