title: Modeling Atom Probe Tomography: A review.
abstract: Improving both the precision and the accuracy of Atom Probe Tomography reconstruction requires a correct understanding of the imaging process. In this aim, numerical modeling approaches have been developed for 15 years. The injected ingredients of these modeling tools are related to the basic physic of the field evaporation mechanism. The interplay between the sample nature and structure of the analyzed sample and the reconstructed image artefacts have pushed to gradually improve and make the model more and more sophisticated. This paper reviews the evolution of the modeling approach in Atom Probe Tomography and presents some future potential directions in order to improve the method.
authors.affiliation: Groupe de Physique des Matériaux, UMR CNRS 6634, Université de Rouen, Saint Etienne du Rouvray 76801, France. Electronic address: francois.vurpillot@univ-rouen.fr.
authors.forename: F
authors.initials: F
authors.lastname: Vurpillot
authors.affiliation: Institut für Materialwissenschaft, Lehrstuhl für Materialphysik, Universität Stuttgart, Heisenbergstr. 3, 70569 Stuttgart, Germany.
authors.forename: C
authors.initials: C
authors.lastname: Oberdorfer
keywords: Atom Probe Tomography; Field evaporation; Reconstruction; Simulations