Encapsulation method for atom probe tomography analysis of nanoparticles.
Open-space nanomaterials are a widespread class of technologically important materials that are generally incompatible with analysis by atom probe tomography (APT) due to issues with specimen preparation, field evaporation and data reconstruction. The feasibility of encapsulating such non-compact matter in a matrix to enable APT measurements is investigated using nanoparticles as an example. Simulations of field evaporation of a void, and the resulting artifacts in ion trajectory, underpin the requirement that no voids remain after encapsulation. The approach is demonstrated by encapsulating Pt nanoparticles in an ZnO:Al matrix created by atomic layer deposition, a growth technique which offers very high surface coverage and conformality. APT measurements of the Pt nanoparticles are correlated with transmission electron microscopy images and numerical simulations in order to evaluate the accuracy of the APT reconstruction.
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
D J
DJ
Larson
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
A D
AD
Giddings
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
Y
Y
Wu
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
M A
MA
Verheijen
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
T J
TJ
Prosa
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
F
F
Roozeboom
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
K P
KP
Rice
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
W M M
WM
Kessels
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
B P
BP
Geiser
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
T F
TF
Kelly
Atom probe tomography; Field evaporation; Nanoparticles; Simulation