A flexible and implantable microelectrode arrays using high-temperature grown vertical carbon nanotubes and a biocompatible polymer substrate.
This paper presents a novel microelectrode arrays using high-temperature grown vertically aligned carbon nanotubes (CNTs) integrated on a flexible and biocompatible parylene substrate. A simple microfabrication process is proposed to unite the high quality vertical CNTs grown at high temperature with the heat sensitive parylene substrate in a highly controllable manner. Briefly, the CNTs electrode is encapsulated by two layers of parylene and the device is released using xenon difluoride (XeF2). The process is compatible with wafer-scale post complementary metal oxide semiconductor integration. Lower impedance and larger interfacial capacitance have been demonstrated using CNTs compared to a Pt electrode. The flexible CNT electrodes have been utilized for extracellular neuronal recording and stimulation in rats. The signal-to-noise ratio of the device is about 12.5. The threshold voltage for initiating action potential is about 0.5 V.
Electrical and Computer Engineering, Detroit MI USA.
Wenwen
W
Yi
Chaoyang
C
Chen
Zhaoying
Z
Feng
Yong
Y
Xu
Chengpeng
C
Zhou
Nirul
N
Masurkar
John
J
Cavanaugh
Mark Ming-Cheng
MM
Cheng
D000818:Animals; D001672:Biocompatible Materials / Q000737:chemistry*; D017097:Electric Impedance; D004558:Electric Stimulation; D004560:Electricity; D004567:Electrodes, Implanted; D006358:Hot Temperature; D058542:Implantable Neurostimulators; D008297:Male; D008422:Materials Testing; D008839:Microelectrodes; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure; D009474:Neurons / Q000502:physiology; D011108:Polymers / Q000737:chemistry*; D051381:Rats; D017207:Rats, Sprague-Dawley; D014992:Xylenes / Q000737:chemistry*
D001672:Biocompatible Materials; D037742:Nanotubes, Carbon; D011108:Polymers; D014992:Xylenes; C011055:parylene