Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films.
We describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also examined, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Furthermore, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.
Baskin School of Engineering, University of California, Santa Cruz, California 95064, USA.
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T
Favaloro
Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA.
J-H
JH
Bahk
Baskin School of Engineering, University of California, Santa Cruz, California 95064, USA.
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A
Shakouri