title: Post deposition annealing of epitaxial Ce(1-x)Pr(x)O(2-δ) films grown on Si(111).
abstract: In this work the structural and morphological changes of Ce1-xPrxO2-δ (x = 0.20, 0.35 and 0.75) films grown on Si(111) due to post deposition annealing are investigated by low energy electron diffraction combined with a spot profile analysis. The surface of the oxide films exhibit mosaics with large terraces separated by monoatomic steps. It is shown that the Ce/Pr ratio and post deposition annealing temperature can be used to tune the mosaic spread, terrace size and step height of the grains. The morphological changes are accompanied by a phase transition from a fluorite type lattice to a bixbyite structure. Furthermore, at high PDA temperatures a silicate formation via a polycrystalline intermediate state is observed.
authors.affiliation: Fachbereich Physik, Universität Osnabrück, Barbarastr. 7, D-49069 Osnabrück, Germany. jwollsch@uos.de.
authors.forename: H
authors.initials: H
authors.lastname: Wilkens
authors.forename: W
authors.initials: W
authors.lastname: Spiess
authors.forename: M H
authors.initials: MH
authors.lastname: Zoellner
authors.forename: G
authors.initials: G
authors.lastname: Niu
authors.forename: T
authors.initials: T
authors.lastname: Schroeder
authors.forename: J
authors.initials: J
authors.lastname: Wollschläger