title: Doped SnO₂ transparent conductive multilayer thin films explored by continuous composition spread.
abstract: Mn-doped SnO₂ thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO₂ thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO₂. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO₂/Ag/Mn-doped SnO₂ multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10⁻⁵ Ω-cm and an average transmittance above 86% in the 550 nm wavelength region.
authors.affiliation: †Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul 136-791, Republic of Korea.|‡Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Republic of Korea.
authors.forename: Jin Ju
authors.initials: JJ
authors.lastname: Lee
authors.affiliation: §Institute for Research in Electronics and Applied Physics, University of Maryland, College Park Maryland 20742, United States.
authors.forename: Jong-Yoon
authors.initials: JY
authors.lastname: Ha
authors.affiliation: ∥Interface Control Research Center, Korea Institute of Science and Technology, Seoul 136-791, Republic of Korea.
authors.forename: Won-Kook
authors.initials: WK
authors.lastname: Choi
authors.affiliation: ‡Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Republic of Korea.
authors.forename: Yong Soo
authors.initials: YS
authors.lastname: Cho
authors.affiliation: †Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul 136-791, Republic of Korea.|∮Department of Nanomaterials Science and Technology, Korea University of Science and Technology, Daejeon 305-333, Republic of Korea.
authors.forename: Ji-Won
authors.initials: JW
authors.lastname: Choi
mesh_terms: D004553:Electric Conductivity; D017895:Manganese Compounds / Q000737:chemistry; D008422:Materials Testing; D008567:Membranes, Artificial; D010087:Oxides / Q000737:chemistry; D017971:Tin Compounds / Q000737:chemistry*
chemical_list: D017895:Manganese Compounds; D008567:Membranes, Artificial; D010087:Oxides; D017971:Tin Compounds; C027424:manganese oxide; C045358:stannic oxide
keywords: Mn-SnO2; continuous composition spread; multilayer; transparent conducting oxide