title: Switched capacitor charge pump used for low-distortion imaging in atomic force microscope.
abstract: The switched capacitor charge pump (SCCP) is an effective method of linearizing charges on piezoelectric actuators and therefore constitute a significant approach to nano-positioning. In this work, it was for the first time implemented in an atomic force microscope for low-distortion imaging. Experimental results showed that the image quality was improved evidently under the SCCP drive compared with that under traditional linear voltage drive.
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Jie
authors.initials: J
authors.lastname: Zhang
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Lian Sheng
authors.initials: LS
authors.lastname: Zhang
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Zhi Hua
authors.initials: ZH
authors.lastname: Feng
keywords: atomic force microscope; low-distortion imaging; switched capacitor charge pump