title: Depth profilometry via multiplexed optical high-coherence interferometry.
abstract: Depth Profilometry involves the measurement of the depth profile of objects, and has significant potential for various industrial applications that benefit from non-destructive sub-surface profiling such as defect detection, corrosion assessment, and dental assessment to name a few. In this study, we investigate the feasibility of depth profilometry using an Multiplexed Optical High-coherence Interferometry MOHI instrument. The MOHI instrument utilizes the spatial coherence of a laser and the interferometric properties of light to probe the reflectivity as a function of depth of a sample. The axial and lateral resolutions, as well as imaging depth, are decoupled in the MOHI instrument. The MOHI instrument is capable of multiplexing interferometric measurements into 480 one-dimensional interferograms at a location on the sample and is built with axial and lateral resolutions of 40 μm at a maximum imaging depth of 700 μm. Preliminary results, where a piece of sand-blasted aluminum, an NBK7 glass piece, and an optical phantom were successfully probed using the MOHI instrument to produce depth profiles, demonstrate the feasibility of such an instrument for performing depth profilometry.
authors: Department of Systems Design Engineering, University of Waterloo, Ontario, Canada.
authors: Farnoud
authors: F
authors: Kazemzadeh
authors: Department of Systems Design Engineering, University of Waterloo, Ontario, Canada.
authors: Alexander
authors: A
authors: Wong
authors: Department of Systems Design Engineering, University of Waterloo, Ontario, Canada; Tornado Spectral Systems, Toronto, Ontario, Canada.
authors: Bradford B
authors: BB
authors: Behr
authors: Department of Systems Design Engineering, University of Waterloo, Ontario, Canada; Tornado Spectral Systems, Toronto, Ontario, Canada.
authors: Arsen R
authors: AR
authors: Hajian
mesh_terms: D007368:Interferometry / Q000295:instrumentation*; D008027:Light; D055096:Optical Devices; D012542:Scattering, Radiation; D059629:Signal-To-Noise Ratio