title: A CMOS pressure sensor tag chip for passive wireless applications.
abstract: This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of -20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation.
authors: School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, China. dengfangming@ecjtu.jx.cn.|School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China. dengfangming@ecjtu.jx.cn.
authors: Fangming
authors: F
authors: Deng
authors: School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China. 18655136887@163.com.
authors: Yigang
authors: Y
authors: He
authors: School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China. libinghnu@163.com.
authors: Bing
authors: B
authors: Li
authors: School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China. 18655118171@126.com.
authors: Lei
authors: L
authors: Zuo
authors: School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, China. zgxiangyu@163.com.
authors: Xiang
authors: X
authors: Wu
authors: School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, China. fuzhihui@sohu.com.
authors: Zhihui
authors: Z
authors: Fu
mesh_terms: D057233:Radio Frequency Identification Device / Q000379:methods*; D058998:Remote Sensing Technology; D012815:Signal Processing, Computer-Assisted; D059015:Wireless Technology