title: Fabrication of High-Performance Ultrathin In2O3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography.
abstract: We demonstrate straightforward fabrication of highly sensitive biosensor arrays based on field-effect transistors, using an efficient high-throughput, large-area patterning process. Chemical lift-off lithography is used to construct field-effect transistor arrays with high spatial precision suitable for the fabrication of both micrometer- and nanometer-scale devices. Sol-gel processing is used to deposit ultrathin (∼4 nm) In2O3 films as semiconducting channel layers. The aqueous sol-gel process produces uniform In2O3 coatings with thicknesses of a few nanometers over large areas through simple spin-coating, and only low-temperature thermal annealing of the coatings is required. The ultrathin In2O3 enables construction of highly sensitive and selective biosensors through immobilization of specific aptamers to the channel surface; the ability to detect subnanomolar concentrations of dopamine is demonstrated.
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Jaemyung
authors: J
authors: Kim
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|§Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: You Seung
authors: YS
authors: Rim
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|§Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Huajun
authors: H
authors: Chen
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Huan H
authors: HH
authors: Cao
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Nako
authors: N
authors: Nakatsuka
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Hannah L
authors: HL
authors: Hinton
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.|⊥Department of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China.
authors: Chuanzhen
authors: C
authors: Zhao
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.|∥Department of Psychiatry and Semel Institute for Neuroscience and Human Behavior, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Anne M
authors: AM
authors: Andrews
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|§Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Yang
authors: Y
authors: Yang
authors: †California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States.|‡Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States.|§Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States.
authors: Paul S
authors: PS
authors: Weiss
mesh_terms: D052157:Aptamers, Nucleotide / Q000235:genetics / Q000378:metabolism; D001483:Base Sequence; D015374:Biosensing Techniques / Q000295:instrumentation*; D004298:Dopamine / Q000032:analysis / Q000378:metabolism; D007204:Indium / Q000737:chemistry*; D057230:Limit of Detection; D036103:Nanotechnology / Q000295:instrumentation*; D011327:Printing; D014173:Transistors, Electronic
chemical_list: D052157:Aptamers, Nucleotide; D007204:Indium; C047711:indium oxide; D004298:Dopamine
keywords: aptamer; biosensor; chemical lift-off lithography; dopamine; field-effect transistor; metal-oxide semiconductor; nanofabrication; nanotechnology; neurotransmitter; sensor; sol−gel chemistry