title: Quantitative analysis of Si/SiGeC superlattices using atom probe tomography.
abstract: SiGe and its alloys are used as key materials in innovative electronic devices. The analysis of these materials together with the localisation of dopants and impurities on a very fine scale is of crucial importance for better understanding their electronic properties. The quantification of carbon and germanium in an as-grown Si/SiGeC superlattice has been investigated using Atom Probe Tomography as a function of analysis conditions and sample anneal temperature. The mass spectrum is heavily influenced by the analysis conditions and chemical identification is needed. It was found that quantitative results are obtained using a intermediate electric field. The evaporation of carbon ions shows a strong spatial and temporal correlation. A series of annealed samples have been analysed, presenting an inhomogeneous carbon distribution, appearing in the shape of small clusters. These findings confirm previous results and give a better understanding of the processes occurring in these technologically important materials.
authors: Univ. Grenoble Alpes, 38000 Grenoble, France; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France. Electronic address: robert.estivillstroud@cea.fr.
authors: Robert
authors: R
authors: Estivill
authors: Univ. Grenoble Alpes, 38000 Grenoble, France; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France.
authors: Adeline
authors: A
authors: Grenier
authors: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors: Sébastien
authors: S
authors: Duguay
authors: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors: François
authors: F
authors: Vurpillot
authors: Univ. Grenoble Alpes, 38000 Grenoble, France; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France.
authors: Tanguy
authors: T
authors: Terlier
authors: Univ. Grenoble Alpes, 38000 Grenoble, France; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France.
authors: Jean-Paul
authors: JP
authors: Barnes
authors: Univ. Grenoble Alpes, 38000 Grenoble, France; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France.
authors: Jean-Michel
authors: JM
authors: Hartmann
authors: Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
authors: Didier
authors: D
authors: Blavette
keywords: Atom Probe; Carbon precipitation; Local magnification; SiGeC; Superlattices